RU2002127865A - MAGNETRON SPRAYING SYSTEM - Google Patents
MAGNETRON SPRAYING SYSTEMInfo
- Publication number
- RU2002127865A RU2002127865A RU2002127865/02A RU2002127865A RU2002127865A RU 2002127865 A RU2002127865 A RU 2002127865A RU 2002127865/02 A RU2002127865/02 A RU 2002127865/02A RU 2002127865 A RU2002127865 A RU 2002127865A RU 2002127865 A RU2002127865 A RU 2002127865A
- Authority
- RU
- Russia
- Prior art keywords
- magnetic
- target cathode
- spraying system
- permanent magnets
- magnetron sputtering
- Prior art date
Links
- 238000005507 spraying Methods 0.000 title 1
- 238000001755 magnetron sputter deposition Methods 0.000 claims 2
- 230000001939 inductive effect Effects 0.000 claims 1
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2002127865/02A RU2242821C2 (en) | 2002-10-17 | 2002-10-17 | Magnetron spraying system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2002127865/02A RU2242821C2 (en) | 2002-10-17 | 2002-10-17 | Magnetron spraying system |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2002127865A true RU2002127865A (en) | 2004-04-10 |
RU2242821C2 RU2242821C2 (en) | 2004-12-20 |
Family
ID=34387219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2002127865/02A RU2242821C2 (en) | 2002-10-17 | 2002-10-17 | Magnetron spraying system |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2242821C2 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120067717A1 (en) * | 2010-09-17 | 2012-03-22 | Guardian Industries Corp. | Method of co-sputtering alloys and compounds using a dual C-MAG cathode arrangement and corresponding apparatus |
RU2595266C2 (en) * | 2014-10-24 | 2016-08-27 | Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" | Ion sputtering device (versions) |
GEP201606512B (en) * | 2015-05-28 | 2016-07-11 | Planar magnetron sputter | |
RU2726223C1 (en) * | 2019-11-28 | 2020-07-10 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технологический университет "СТАНКИН" (ФГБОУ ВО "МГТУ "СТАНКИН") | Magnetron sprayer |
RU2748443C1 (en) * | 2020-06-15 | 2021-05-25 | Акционерное общество "Омский научно-исследовательский институт приборостроения" (АО "ОНИИП") | Magnetron sputtering system |
CN115287614A (en) * | 2022-07-22 | 2022-11-04 | 宣城开盛新能源科技有限公司 | Method for improving TCO film thickness uniformity of CIGS chip and film coating device |
-
2002
- 2002-10-17 RU RU2002127865/02A patent/RU2242821C2/en not_active IP Right Cessation
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