RO96889B1 - Procedeu de izolare a componentelor din structura de circuit integrat monolitic - Google Patents

Procedeu de izolare a componentelor din structura de circuit integrat monolitic

Info

Publication number
RO96889B1
RO96889B1 RO130244A RO13024487A RO96889B1 RO 96889 B1 RO96889 B1 RO 96889B1 RO 130244 A RO130244 A RO 130244A RO 13024487 A RO13024487 A RO 13024487A RO 96889 B1 RO96889 B1 RO 96889B1
Authority
RO
Romania
Prior art keywords
integrated circuit
circuit structure
layer
monolitic
components
Prior art date
Application number
RO130244A
Other languages
English (en)
Other versions
RO96889A2 (ro
Inventor
Constantin Postolache
Florin Gaiseanu
Constantin Popescu
Original Assignee
Centrul De Cercetare Stiintifica Si Inginerie Tehnologica Pentru Componente Electrice
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centrul De Cercetare Stiintifica Si Inginerie Tehnologica Pentru Componente Electrice filed Critical Centrul De Cercetare Stiintifica Si Inginerie Tehnologica Pentru Componente Electrice
Priority to RO130244A priority Critical patent/RO96889B1/ro
Publication of RO96889A2 publication Critical patent/RO96889A2/ro
Publication of RO96889B1 publication Critical patent/RO96889B1/ro

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  • Semiconductor Integrated Circuits (AREA)

Abstract

Prezenta inventie se refera la un procedeu de izolare a componentelor discrete din structura de circuit integrat monolitic. Procedeul de izolare conform inventiei consta în aceea ca stratul de izolare se realizeaza prin difuzie simultana din doua surse locale de difuzie, sursa inferioara fiind obtinuta prin deschiderea ferestrei pentru stratul de izolare dupa doparea stratului îngropat în substrat,si incinte de cresterea stratului epitaxial în substrat, iar sursa superioara fiind realizata la nivelul ferestrei fotolitogratiate în stratul de bioxid de siliciu.
RO130244A 1987-10-30 1987-10-30 Procedeu de izolare a componentelor din structura de circuit integrat monolitic RO96889B1 (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RO130244A RO96889B1 (ro) 1987-10-30 1987-10-30 Procedeu de izolare a componentelor din structura de circuit integrat monolitic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RO130244A RO96889B1 (ro) 1987-10-30 1987-10-30 Procedeu de izolare a componentelor din structura de circuit integrat monolitic

Publications (2)

Publication Number Publication Date
RO96889A2 RO96889A2 (ro) 1989-04-28
RO96889B1 true RO96889B1 (ro) 1989-04-30

Family

ID=20120687

Family Applications (1)

Application Number Title Priority Date Filing Date
RO130244A RO96889B1 (ro) 1987-10-30 1987-10-30 Procedeu de izolare a componentelor din structura de circuit integrat monolitic

Country Status (1)

Country Link
RO (1) RO96889B1 (ro)

Also Published As

Publication number Publication date
RO96889A2 (ro) 1989-04-28

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