PT3583243T - Aparelho de ferramenta para múltiplos passos de processo - Google Patents

Aparelho de ferramenta para múltiplos passos de processo

Info

Publication number
PT3583243T
PT3583243T PT187083274T PT18708327T PT3583243T PT 3583243 T PT3583243 T PT 3583243T PT 187083274 T PT187083274 T PT 187083274T PT 18708327 T PT18708327 T PT 18708327T PT 3583243 T PT3583243 T PT 3583243T
Authority
PT
Portugal
Prior art keywords
process steps
multiple process
tool fixture
fixture
tool
Prior art date
Application number
PT187083274T
Other languages
English (en)
Original Assignee
Oerlikon Surface Solutions Ag Pfaeffikon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag Pfaeffikon filed Critical Oerlikon Surface Solutions Ag Pfaeffikon
Publication of PT3583243T publication Critical patent/PT3583243T/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • B05C13/025—Means for manipulating or holding work, e.g. for separate articles for particular articles relatively small cylindrical objects, e.g. cans, bottles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/28—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/28—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools
    • B23P15/32—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools twist-drills
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P19/00—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes
    • B23P19/04—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes for assembling or disassembling parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0006—Details, accessories not peculiar to any of the following furnaces
    • C21D9/0025—Supports; Baskets; Containers; Covers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens, or the like for the charge within the furnace
    • F27D5/005—Supports specially adapted for holding elongated articles in an upright position, e.g. sparking plugs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S269/00—Work holders
    • Y10S269/90—Supporting structure having work holder receiving apertures or projections

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Automatic Tool Replacement In Machine Tools (AREA)
  • Physical Vapour Deposition (AREA)
  • Jigs For Machine Tools (AREA)
  • Forging (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Cleaning In General (AREA)
  • Coating Apparatus (AREA)
PT187083274T 2017-02-16 2018-02-16 Aparelho de ferramenta para múltiplos passos de processo PT3583243T (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201762459665P 2017-02-16 2017-02-16

Publications (1)

Publication Number Publication Date
PT3583243T true PT3583243T (pt) 2022-12-30

Family

ID=61557220

Family Applications (1)

Application Number Title Priority Date Filing Date
PT187083274T PT3583243T (pt) 2017-02-16 2018-02-16 Aparelho de ferramenta para múltiplos passos de processo

Country Status (16)

Country Link
US (1) US11590528B2 (pt)
EP (1) EP3583243B1 (pt)
JP (1) JP7190184B2 (pt)
KR (1) KR102655730B1 (pt)
CN (1) CN110312820A (pt)
CA (1) CA3053286A1 (pt)
ES (1) ES2934799T3 (pt)
FI (1) FI3583243T3 (pt)
HU (1) HUE060883T2 (pt)
IL (1) IL268449B2 (pt)
MX (1) MX2019009767A (pt)
PH (1) PH12019501829A1 (pt)
PL (1) PL3583243T3 (pt)
PT (1) PT3583243T (pt)
SG (1) SG11201906439PA (pt)
WO (1) WO2018149548A1 (pt)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD881242S1 (en) * 2018-01-29 2020-04-14 Oerlikon Surface Solutions Ag, Pfaffikon Tool holder
DE102019135182A1 (de) * 2019-12-19 2021-06-24 Oerlikon Surface Solutions Ag, Pfäffikon Haltevorrichtung zum Halten eines Substrats
DE102019135183A1 (de) * 2019-12-19 2021-06-24 Oerlikon Surface Solutions Ag, Pfäffikon Haltesystem zum Halten von Substraten
EP3865247A1 (de) * 2020-02-14 2021-08-18 Ivoclar Vivadent AG Einspannvorrichtung für ein werkzeug an einer werkzeugmaschine
CN113318934A (zh) * 2021-05-25 2021-08-31 龙港市圣嘉刀具有限公司 一种用于精密刀具涂层的刀柄插放装置及加工设备
DE202021105714U1 (de) * 2021-10-20 2023-01-24 Mls Mikrowellen-Labor-Systeme Gmbh Probenbehälterhandhabungssystem
CN114457318B (zh) * 2022-02-09 2023-01-13 上海惠而顺精密工具股份有限公司 一种全方位表面镀膜工装机构
CN114855120B (zh) * 2022-04-14 2023-12-19 超微中程纳米科技（苏州）有限公司 刀具蓝纳米复合涂层

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0361973U (pt) * 1989-10-23 1991-06-18
US6004627A (en) 1997-01-07 1999-12-21 Nylok Fastener Corporation Method and apparatus for applying a coating to the head/shank junction of externally threaded articles
JP3548932B1 (ja) 2003-07-16 2004-08-04 有限会社ヒット 歯科用切削ツール洗浄装置
CN1590579A (zh) * 2003-09-03 2005-03-09 巨擘科技股份有限公司 于工具上镀膜同时形成标记的方法
WO2007025397A1 (de) * 2005-08-29 2007-03-08 Oerlikon Trading Ag, Trübbach Werkstückträgereinrichtung
CA2724917C (en) 2008-06-11 2016-03-29 Oerlikon Trading Ag, Truebbach Workpiece carrier
CN201565773U (zh) 2009-12-30 2010-09-01 赵新杰 用于车床四工位刀架的刀具安装装置
TWI450995B (zh) 2010-04-07 2014-09-01 Hon Hai Prec Ind Co Ltd 鍍膜旋轉裝置及鍍膜設備
DE102010056157A1 (de) 2010-12-28 2012-06-28 Oerlikon Trading Ag, Trübbach Halterung für Bohrkopfbeschichtung
JP2014124555A (ja) 2012-12-25 2014-07-07 Showa Corp 塗装用保持具
DE102013007454A1 (de) 2013-05-02 2014-11-06 Oerlikon Trading Ag, Trübbach Vielseitige Haltevorrichtung zur Oberflächenbehandlung von stangenförmigen Substraten
DE102013107375A1 (de) * 2013-07-11 2015-01-15 Walter Ag Verfahren und Vorrichtung zur Beschichtung von Schneidwerkzeugen mit stabförmiger Grundform
JP6135519B2 (ja) 2014-01-17 2017-05-31 株式会社デンソー 成膜装置
CN204251698U (zh) 2014-12-09 2015-04-08 宜昌后皇真空科技有限公司 一种刀具pvd镀膜自转转架
CN105127065B (zh) 2015-09-17 2024-05-31 科汇纳米技术（深圳）有限公司 一种pvd涂层用装刀夹具
CN105779947B (zh) 2016-04-26 2017-12-29 成都极星等离子科技有限公司 一种多弧离子镀及镀膜方法

Also Published As

Publication number Publication date
WO2018149548A1 (en) 2018-08-23
IL268449B2 (en) 2023-03-01
IL268449A (en) 2019-09-26
US20190388931A1 (en) 2019-12-26
KR20190118605A (ko) 2019-10-18
JP7190184B2 (ja) 2022-12-15
EP3583243B1 (en) 2022-10-05
BR112019016982A2 (pt) 2020-04-07
CN110312820A (zh) 2019-10-08
US11590528B2 (en) 2023-02-28
IL268449B (en) 2022-11-01
HUE060883T2 (hu) 2023-04-28
ES2934799T3 (es) 2023-02-27
CA3053286A1 (en) 2018-08-23
JP2020509221A (ja) 2020-03-26
EP3583243A1 (en) 2019-12-25
MX2019009767A (es) 2019-10-14
SG11201906439PA (en) 2019-08-27
PH12019501829A1 (en) 2020-09-14
FI3583243T3 (fi) 2023-01-13
PL3583243T3 (pl) 2023-03-06
KR102655730B1 (ko) 2024-04-09

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