PT2335081T - Dispositivo para a colocação e conexão de contactos de verificação - Google Patents

Dispositivo para a colocação e conexão de contactos de verificação

Info

Publication number
PT2335081T
PT2335081T PT97517700T PT09751770T PT2335081T PT 2335081 T PT2335081 T PT 2335081T PT 97517700 T PT97517700 T PT 97517700T PT 09751770 T PT09751770 T PT 09751770T PT 2335081 T PT2335081 T PT 2335081T
Authority
PT
Portugal
Prior art keywords
positioning
test contacts
contacting test
contacting
contacts
Prior art date
Application number
PT97517700T
Other languages
English (en)
Inventor
Ghassem Azdasht
Original Assignee
Pac Tech Packaging Tech Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pac Tech Packaging Tech Gmbh filed Critical Pac Tech Packaging Tech Gmbh
Publication of PT2335081T publication Critical patent/PT2335081T/pt

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06705Apparatus for holding or moving single probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76897Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75Apparatus for connecting with bump connectors or layer connectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Geometry (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Eye Examination Apparatus (AREA)
PT97517700T 2008-10-17 2009-10-05 Dispositivo para a colocação e conexão de contactos de verificação PT2335081T (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008051853A DE102008051853B4 (de) 2008-10-17 2008-10-17 Vorrichtung zur Platzierung und Kontaktierung von Prüfkontakten

Publications (1)

Publication Number Publication Date
PT2335081T true PT2335081T (pt) 2018-02-08

Family

ID=41586203

Family Applications (1)

Application Number Title Priority Date Filing Date
PT97517700T PT2335081T (pt) 2008-10-17 2009-10-05 Dispositivo para a colocação e conexão de contactos de verificação

Country Status (8)

Country Link
US (1) US8480298B2 (pt)
EP (1) EP2335081B1 (pt)
JP (1) JP5399500B2 (pt)
KR (1) KR101610424B1 (pt)
DE (1) DE102008051853B4 (pt)
ES (1) ES2658356T3 (pt)
PT (1) PT2335081T (pt)
WO (1) WO2010043196A1 (pt)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9685423B2 (en) * 2013-01-31 2017-06-20 PAC Tech—Packaging Technologies GmbH Semiconductor chip assembly and method for manufacturing the same
DE102015114129A1 (de) * 2015-08-26 2017-03-02 Pac Tech - Packaging Technologies Gmbh Vorrichtung zur Entfernung eines Prüfkontakts einer Prüfkontaktanordnung
DE102016100561A1 (de) * 2016-01-14 2017-07-20 Pac Tech - Packaging Technologies Gmbh Verfahren zur Platzierung und Kontaktierung eines Prüfkontakts
US20190187179A1 (en) * 2017-12-15 2019-06-20 International Business Machines Corporation Portable Electrical Testing Device with Electrical Probe and Laser Soldering Device
DE102018119137B4 (de) * 2018-08-07 2021-08-19 Pac Tech-Packaging Technologies Gmbh Verfahren und Vorrichtung zur Reparatur einer Prüfkontaktanordnung

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4534811A (en) * 1983-12-30 1985-08-13 International Business Machines Corporation Apparatus for thermo bonding surfaces
US4778097A (en) * 1986-12-04 1988-10-18 Hauser John G Ultrasonic wire bonding tool
US4970365A (en) * 1989-09-28 1990-11-13 International Business Machines Corporation Method and apparatus for bonding components leads to pads located on a non-rigid substrate
JPH05259220A (ja) * 1992-03-10 1993-10-08 Toshiba Corp ボンディングツ−ル
US6255727B1 (en) * 1999-08-03 2001-07-03 Advantest Corp. Contact structure formed by microfabrication process
DE19901623B4 (de) * 1999-01-18 2007-08-23 Pac Tech-Packaging Technologies Gmbh Verfahren und Vorrichtung zur thermischen Verbindung von Anschlußflächen zweier Substrate
US6359454B1 (en) * 1999-08-03 2002-03-19 Advantest Corp. Pick and place mechanism for contactor
JP4590032B2 (ja) * 2000-01-24 2010-12-01 東京エレクトロン株式会社 プローブの製造方法
KR100444191B1 (ko) * 2003-03-17 2004-08-21 주식회사 파이컴 프로브 포지셔닝 및 본딩시스템 및 그 방법
US7311239B2 (en) * 2004-05-04 2007-12-25 Sv Probe Pte Ltd. Probe attach tool
JP2006100454A (ja) * 2004-09-29 2006-04-13 Tdk Corp 半田を用いた接合装置
JP2006234691A (ja) * 2005-02-25 2006-09-07 National Institute For Materials Science 集積化プローブカードの修復方法及び修復装置
WO2007000799A1 (ja) * 2005-06-27 2007-01-04 Advantest Corporation コンタクタ、該コンタクタを備えたコンタクトストラクチャ、プローブカード、試験装置、コンタクトストラクチャ製造方法、及び、コンタクトストラクチャ製造装置
US7721430B2 (en) 2006-02-22 2010-05-25 Sv Probe Pte Ltd. Approach for fabricating cantilever probes
US7836587B2 (en) 2006-09-21 2010-11-23 Formfactor, Inc. Method of repairing a contactor apparatus
JP2008232722A (ja) * 2007-03-19 2008-10-02 Advantest Corp コンタクタの実装方法及びコンタクタ実装装置
US8299394B2 (en) * 2007-06-15 2012-10-30 Sv Probe Pte Ltd. Approach for assembling and repairing probe assemblies using laser welding

Also Published As

Publication number Publication date
DE102008051853B4 (de) 2010-07-15
WO2010043196A1 (de) 2010-04-22
EP2335081B1 (de) 2017-11-22
KR20110069832A (ko) 2011-06-23
US20110235681A1 (en) 2011-09-29
JP5399500B2 (ja) 2014-01-29
EP2335081A1 (de) 2011-06-22
KR101610424B1 (ko) 2016-04-08
JP2012506028A (ja) 2012-03-08
US8480298B2 (en) 2013-07-09
DE102008051853A1 (de) 2010-04-29
ES2658356T3 (es) 2018-03-09

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