PL423540A1 - Method for producing a measuring probe that enables direct preview of a measuring place by means of the microscopy methods with the scanning probe - Google Patents

Method for producing a measuring probe that enables direct preview of a measuring place by means of the microscopy methods with the scanning probe

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Publication number
PL423540A1
PL423540A1 PL423540A PL42354017A PL423540A1 PL 423540 A1 PL423540 A1 PL 423540A1 PL 423540 A PL423540 A PL 423540A PL 42354017 A PL42354017 A PL 42354017A PL 423540 A1 PL423540 A1 PL 423540A1
Authority
PL
Poland
Prior art keywords
blade
measuring
probe
chamber
fib device
Prior art date
Application number
PL423540A
Other languages
Polish (pl)
Other versions
PL234014B1 (en
Inventor
Adam Łaszcz
Paweł Janus
Andrzej CZERWIŃSKI
Original Assignee
Instytut Tech Elektronowej
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Instytut Tech Elektronowej filed Critical Instytut Tech Elektronowej
Priority to PL423540A priority Critical patent/PL234014B1/en
Publication of PL423540A1 publication Critical patent/PL423540A1/en
Publication of PL234014B1 publication Critical patent/PL234014B1/en

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Abstract

Przedmiotem zgłoszenia jest sposób wytwarzania sondy pomiarowej do precyzyjnych pomiarów powierzchni materiału w mikro- i nanoskali, umożliwiającej bezpośredni podgląd miejsca pomiaru, w którym wykonuje się płaską belkę (5) oraz matrycę ostrzy w postaci ostrosłupów lub stożków z wybranego materiału, który zawiera następujące etapy: umieszczenia płaskiej belki (5) oraz matrycy ostrzy w komorze urządzenia FIB; przymocowania igły (2) manipulatora w komorze urządzenia FIB do wybranego ostrza (1) za pomocą metalicznej spoiny; odcięcia ostrza (1) od podłoża przy podstawie ostrza (1) pod skosem do podłoża przy użyciu zogniskowanej wiązki jonów; przetransportowania ostrza (1) do krawędzi płaskiej belki (5) przy użyciu manipulatora w komorze urządzenia FIB; połączenia ostrza (1) z belką (5) poprzez nałożenie metalicznej spoiny (6) w miejscu styku belki (5) i podstawy ostrza (1) w komorze urządzenia FIB i dołączenie ostrza (1) do belki (5) w ten sposób, aby ostrze (1) było umieszczone pod powierzchnią belki (5) na swobodnym końcu belki tak, aby wierzchołek ostrza (7) wystawał poza krawędź swobodnego końca belki (5), odcięcia (8) igły (2) manipulatora od ostrza (1) przy użyciu zogniskowanej wiązki jonów.The subject of the application is a method of manufacturing a probe for precise measurements of the material surface in the micro- and nanoscale, enabling a direct view of the measurement place in which a flat beam (5) is made and a matrix of blades in the form of pyramids or cones of the selected material, which includes the following stages: placing a flat beam (5) and a blade matrix in the chamber of the FIB device; attaching the needle (2) of the manipulator in the chamber of the FIB device to the selected blade (1) by means of a metallic weld; cutting the blade (1) from the ground at the base of the blade (1) at an angle to the ground using a focused ion beam; transporting the blade (1) to the edge of the flat beam (5) using a manipulator in the chamber of the FIB device; connecting the blade (1) to the beam (5) by applying a metallic weld (6) at the contact point of the beam (5) and the blade base (1) in the chamber of the FIB device and attaching the blade (1) to the beam (5) in such a way the blade (1) was placed under the surface of the beam (5) at the free end of the beam so that the tip of the blade (7) protrudes beyond the edge of the free end of the beam (5), the cut-off (8) of the needle (2) of the manipulator from the blade (1) using focused ion beam.

PL423540A 2017-11-22 2017-11-22 Method for producing a measuring probe that enables direct preview of a measuring place by means of the microscopy methods with the scanning probe PL234014B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL423540A PL234014B1 (en) 2017-11-22 2017-11-22 Method for producing a measuring probe that enables direct preview of a measuring place by means of the microscopy methods with the scanning probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL423540A PL234014B1 (en) 2017-11-22 2017-11-22 Method for producing a measuring probe that enables direct preview of a measuring place by means of the microscopy methods with the scanning probe

Publications (2)

Publication Number Publication Date
PL423540A1 true PL423540A1 (en) 2019-06-03
PL234014B1 PL234014B1 (en) 2019-12-31

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ID=66649199

Family Applications (1)

Application Number Title Priority Date Filing Date
PL423540A PL234014B1 (en) 2017-11-22 2017-11-22 Method for producing a measuring probe that enables direct preview of a measuring place by means of the microscopy methods with the scanning probe

Country Status (1)

Country Link
PL (1) PL234014B1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050247886A1 (en) * 2004-05-04 2005-11-10 Shixin Wang Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same
WO2009086534A1 (en) * 2007-12-28 2009-07-09 Veeco Instruments Inc. Method of fabricating a probe device for a metrology instrument and probe device produced thereby
US20100138964A1 (en) * 2008-11-26 2010-06-03 The Regents Of The University Of California Probes for enhanced magnetic force microscopy resolution
JP2010276617A (en) * 2010-08-31 2010-12-09 Nippon Telegr & Teleph Corp <Ntt> Method for manufacturing probe, probe, and scanning probe microscope

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050247886A1 (en) * 2004-05-04 2005-11-10 Shixin Wang Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same
WO2009086534A1 (en) * 2007-12-28 2009-07-09 Veeco Instruments Inc. Method of fabricating a probe device for a metrology instrument and probe device produced thereby
US20100138964A1 (en) * 2008-11-26 2010-06-03 The Regents Of The University Of California Probes for enhanced magnetic force microscopy resolution
JP2010276617A (en) * 2010-08-31 2010-12-09 Nippon Telegr & Teleph Corp <Ntt> Method for manufacturing probe, probe, and scanning probe microscope

Also Published As

Publication number Publication date
PL234014B1 (en) 2019-12-31

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