PL3493948T3 - Urządzenie szlifierskie i sposób eksploatowania urządzenia szlifierskiego - Google Patents

Urządzenie szlifierskie i sposób eksploatowania urządzenia szlifierskiego

Info

Publication number
PL3493948T3
PL3493948T3 PL17754106T PL17754106T PL3493948T3 PL 3493948 T3 PL3493948 T3 PL 3493948T3 PL 17754106 T PL17754106 T PL 17754106T PL 17754106 T PL17754106 T PL 17754106T PL 3493948 T3 PL3493948 T3 PL 3493948T3
Authority
PL
Poland
Prior art keywords
grinding device
operating
grinding
Prior art date
Application number
PL17754106T
Other languages
English (en)
Inventor
Thomas Bettermann
Original Assignee
Homag Bohrsysteme Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Homag Bohrsysteme Gmbh filed Critical Homag Bohrsysteme Gmbh
Publication of PL3493948T3 publication Critical patent/PL3493948T3/pl

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B24B21/06—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces involving members with limited contact area pressing the belt against the work, e.g. shoes sweeping across the whole area to be ground
    • B24B21/08—Pressure shoes; Pressure members, e.g. backing belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B24B21/10—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces involving a rigid member, e.g. pressure bar, table, pressing or supporting the belt over substantially its whole span
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
PL17754106T 2016-08-05 2017-08-02 Urządzenie szlifierskie i sposób eksploatowania urządzenia szlifierskiego PL3493948T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102016214568.1A DE102016214568A1 (de) 2016-08-05 2016-08-05 Bearbeitungsvorrichtung und Bearbeitungsverfahren
PCT/EP2017/069520 WO2018024769A2 (de) 2016-08-05 2017-08-02 Bearbeitungsvorrichtung und bearbeitungsverfahren
EP17754106.7A EP3493948B1 (de) 2016-08-05 2017-08-02 Schleifvorrichtung und verfahren zum betreiben der schleifvorrichtung

Publications (1)

Publication Number Publication Date
PL3493948T3 true PL3493948T3 (pl) 2022-03-28

Family

ID=59649674

Family Applications (1)

Application Number Title Priority Date Filing Date
PL17754106T PL3493948T3 (pl) 2016-08-05 2017-08-02 Urządzenie szlifierskie i sposób eksploatowania urządzenia szlifierskiego

Country Status (6)

Country Link
US (1) US11325219B2 (pl)
EP (1) EP3493948B1 (pl)
CN (1) CN109715341A (pl)
DE (1) DE102016214568A1 (pl)
PL (1) PL3493948T3 (pl)
WO (1) WO2018024769A2 (pl)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201800000625A1 (it) * 2018-01-09 2019-07-09 Costa Levigatrici Spa Macchina levigatrice con nastro trasversale
DE102018121139B3 (de) 2018-08-29 2019-09-26 Vsm Vereinigte Schmirgel- Und Maschinen-Fabriken Ag Endlos-Schleifband für eine Schleifmaschine
JP6852034B2 (ja) * 2018-10-15 2021-03-31 本田技研工業株式会社 研磨装置
CH716746A2 (de) * 2019-10-16 2021-04-30 Kuendig Ag Vorrichtung und Verfahren für den seitlich präzis definierten Einsatz von Schleifbändern bei Bandschleifmaschinen im Durchlauf.

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2634829C3 (de) 1976-08-03 1982-04-01 Böttcher & Gessner GmbH, 2000 Hamburg Druckbalken für Bandschleifmaschinen
DE3402104C2 (de) 1984-01-21 1986-07-17 Karl Heesemann Maschinenfabrik GmbH & Co KG, 4970 Bad Oeynhausen Bandschleifmaschine
DE3639329C1 (de) * 1986-11-18 1988-02-25 Heesemann Karl Masch Bandschleifmaschine
DE3716832C2 (de) * 1987-05-20 1995-06-14 Boettcher Renardy & Co Gmbh Druckbalken für eine Bandschleifmaschine
US5486129A (en) * 1993-08-25 1996-01-23 Micron Technology, Inc. System and method for real-time control of semiconductor a wafer polishing, and a polishing head
US5868896A (en) * 1996-11-06 1999-02-09 Micron Technology, Inc. Chemical-mechanical planarization machine and method for uniformly planarizing semiconductor wafers
DE19833881C1 (de) * 1998-07-28 1999-10-21 Juergen Heesemann Bandschleifmaschine
US6325706B1 (en) * 1998-10-29 2001-12-04 Lam Research Corporation Use of zeta potential during chemical mechanical polishing for end point detection
US6186865B1 (en) * 1998-10-29 2001-02-13 Lam Research Corporation Apparatus and method for performing end point detection on a linear planarization tool
US6520834B1 (en) * 2000-08-09 2003-02-18 Micron Technology, Inc. Methods and apparatuses for analyzing and controlling performance parameters in mechanical and chemical-mechanical planarization of microelectronic substrates
JP2002059349A (ja) * 2000-08-21 2002-02-26 Fukuoka Prefecture ベルト研磨の制御方法
IT251598Y1 (it) * 2000-10-16 2003-12-18 Viet Spa Tampone per carteggiatrici, con dosaggio ottimale della forza premente di ogni suo settore mobile.
US6837774B2 (en) * 2001-03-28 2005-01-04 Taiwan Semiconductor Manufacturing Co., Ltd Linear chemical mechanical polishing apparatus equipped with programmable pneumatic support platen and method of using
US6863771B2 (en) * 2001-07-25 2005-03-08 Micron Technology, Inc. Differential pressure application apparatus for use in polishing layers of semiconductor device structures and methods
DE10303407A1 (de) * 2003-01-27 2004-08-19 Friedrich-Schiller-Universität Jena Verfahren und Vorrichtung zur hochgenauen Bearbeitung der Oberfläche eines Objektes, insbesondere zum Polieren und Läppen von Halbleitersubstraten
AU2003234082A1 (en) * 2003-05-22 2004-12-13 Costa Levigatrici Spa Method and device for sanding planar objects
DE102004003203A1 (de) 2004-01-22 2005-08-11 Robert Bosch Gmbh Elektro-Handwerkzeug mit optimiertem Arbeitsbereich
US7840305B2 (en) * 2006-06-28 2010-11-23 3M Innovative Properties Company Abrasive articles, CMP monitoring system and method
US8626458B2 (en) * 2009-11-05 2014-01-07 Vibration Technologies, Llc Method and system for measuring the dynamic response of a structure during a machining process
CN102601711B (zh) 2012-03-20 2014-10-08 友达光电（苏州）有限公司 板体研磨装置
JP6568006B2 (ja) * 2016-04-08 2019-08-28 株式会社荏原製作所 研磨装置および研磨方法
US10160094B2 (en) * 2016-12-21 2018-12-25 Ronald Lipson Intelligent polisher and system

Also Published As

Publication number Publication date
WO2018024769A2 (de) 2018-02-08
DE102016214568A1 (de) 2018-02-08
EP3493948A2 (de) 2019-06-12
WO2018024769A3 (de) 2018-03-29
CN109715341A (zh) 2019-05-03
US11325219B2 (en) 2022-05-10
US20190232455A1 (en) 2019-08-01
EP3493948B1 (de) 2021-12-22

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