PL2780698T3 - Urządzenie do analizy materiału promieniotwórczego za pomocą mikrosondy - Google Patents

Urządzenie do analizy materiału promieniotwórczego za pomocą mikrosondy

Info

Publication number
PL2780698T3
PL2780698T3 PL12806528T PL12806528T PL2780698T3 PL 2780698 T3 PL2780698 T3 PL 2780698T3 PL 12806528 T PL12806528 T PL 12806528T PL 12806528 T PL12806528 T PL 12806528T PL 2780698 T3 PL2780698 T3 PL 2780698T3
Authority
PL
Poland
Prior art keywords
microprobe
analysing
radiating material
radiating
Prior art date
Application number
PL12806528T
Other languages
English (en)
Inventor
Jérôme Lamontagne
Thierry Blay
Philippe Benard
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Publication of PL2780698T3 publication Critical patent/PL2780698T3/pl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2204—Specimen supports therefor; Sample conveying means therefore
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/184—Vacuum locks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/204—Means for introducing and/or outputting objects

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
PL12806528T 2011-11-15 2012-11-15 Urządzenie do analizy materiału promieniotwórczego za pomocą mikrosondy PL2780698T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1103461A FR2982670B1 (fr) 2011-11-15 2011-11-15 Dispositif d'analyse d'un materiau irradiant a l'aide d'une microsonde
EP12806528.1A EP2780698B1 (fr) 2011-11-15 2012-11-15 Dispositif d'analyse d'un matériau irradiant à l'aide d'une microsonde
PCT/FR2012/000462 WO2013072580A1 (fr) 2011-11-15 2012-11-15 Dispositif d'analyse d'un matériau irradiant à l'aide d'une microsonde

Publications (1)

Publication Number Publication Date
PL2780698T3 true PL2780698T3 (pl) 2016-04-29

Family

ID=47436026

Family Applications (1)

Application Number Title Priority Date Filing Date
PL12806528T PL2780698T3 (pl) 2011-11-15 2012-11-15 Urządzenie do analizy materiału promieniotwórczego za pomocą mikrosondy

Country Status (10)

Country Link
US (1) US9052272B2 (pl)
EP (1) EP2780698B1 (pl)
JP (1) JP6133317B2 (pl)
KR (1) KR20140078767A (pl)
CN (1) CN103975234B (pl)
CA (1) CA2853177A1 (pl)
ES (1) ES2554277T3 (pl)
FR (1) FR2982670B1 (pl)
PL (1) PL2780698T3 (pl)
WO (1) WO2013072580A1 (pl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106353345B (zh) * 2016-08-12 2019-03-05 上海蓝十字脑科医院有限公司 放射科用放射反应观察装置
DE102022133028A1 (de) * 2022-12-12 2024-06-13 Kammrath Und Weiss Gmbh Transfermodul und Transferverfahren für ein Probenmaterial

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4033904A (en) * 1974-03-22 1977-07-05 Varian Associates, Inc. Interchangeable specimen trays and apparatus for a vacuum type testing system
IT1165685B (it) * 1979-06-12 1987-04-22 Agusta Aeronaut Costr Procedimento e dispositivo per il montaggio di pezzi all interno di una camera sotto vuoto di un micorscopio elettronico
JPS5623447U (pl) * 1979-07-31 1981-03-03
JPS612250A (ja) * 1984-06-15 1986-01-08 Hitachi Ltd 走査電子顕微鏡およびその類似装置における試料導入装置
JP2636113B2 (ja) * 1992-03-26 1997-07-30 広島大学長 帯域フィルター型逆光電子分光検出装置
JPH10340699A (ja) * 1997-06-09 1998-12-22 Jeol Ltd ホルダ搬送装置
JPH11201920A (ja) * 1998-01-13 1999-07-30 Takayuki Ichikawa 真空系観察・分析装置による試料の観察・分析方法と、真空系観察・分析装置用試料ボックス
JP2001153760A (ja) * 1999-11-30 2001-06-08 Shimadzu Corp 搬送用試料容器
JP3998435B2 (ja) * 2001-03-08 2007-10-24 日本電子株式会社 試料交換装置
JP3603278B2 (ja) * 2001-09-06 2004-12-22 理学電機工業株式会社 蛍光ｘ線分析システムおよびそれに用いるプログラム
JP2003172715A (ja) * 2001-12-06 2003-06-20 Ebara Corp 電子線装置及びデバイス製造方法
US7297945B2 (en) * 2003-12-05 2007-11-20 Hitachi High-Technologies Corporation Defective product inspection apparatus, probe positioning method and probe moving method
JP2005203556A (ja) * 2004-01-15 2005-07-28 Tokyo Seimitsu Co Ltd 電子ビーム露光装置及び電子ビーム露光方法
JP4874698B2 (ja) * 2006-04-14 2012-02-15 日本電子株式会社 電子プローブマイクロアナライザ
US7644637B2 (en) * 2006-09-25 2010-01-12 Omniprobe, Inc. Method and apparatus for transfer of samples in a controlled environment
JP4443580B2 (ja) * 2007-02-28 2010-03-31 株式会社日立ハイテクノロジーズ 探針収納容器、プローバ装置及び探針の収納方法
CN102971822B (zh) * 2010-04-07 2016-03-02 多伦多大学董事局 用于电子显微镜的操纵器载体
JP4988905B2 (ja) * 2010-07-28 2012-08-01 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
FR2982670A1 (fr) 2013-05-17
WO2013072580A1 (fr) 2013-05-23
EP2780698B1 (fr) 2015-09-30
CN103975234B (zh) 2016-05-18
US20140326880A1 (en) 2014-11-06
FR2982670B1 (fr) 2013-11-29
ES2554277T3 (es) 2015-12-17
JP6133317B2 (ja) 2017-05-24
JP2014533369A (ja) 2014-12-11
US9052272B2 (en) 2015-06-09
KR20140078767A (ko) 2014-06-25
CN103975234A (zh) 2014-08-06
CA2853177A1 (fr) 2013-05-23
EP2780698A1 (fr) 2014-09-24

Similar Documents

Publication Publication Date Title
EP2739220A4 (en) HANDLE FOR ACTUATING A DEVICE
GB2491479B (en) Apparatus for implanting a device
GB201104686D0 (en) A device
GB2547377B (en) A flywheel apparatus
GB2493603B (en) A vibrator
EP2682735A4 (en) MARKING DEVICE
PL2794995T3 (pl) Urządzenie dozujące
ZA201403364B (en) A circumcision device
AU338445S (en) Removable cover for a device
EP2769294A4 (en) PRINT SERVER FOR A PORTABLE DEVICE
GB201114945D0 (en) A mounting apparatus
EP2903758A4 (en) MATERIAL FORMING APPARATUS
GB2491848B (en) A weighing apparatus
GB201101312D0 (en) A device comprising an antenna
EP2729783A4 (en) MATERIAL SAMPLING DEVICE
GB2481477B (en) A handle apparatus
AU343538S (en) A measuring device
GB201106318D0 (en) A device for a patch panel
GB2501846B (en) Case for a device
GB2489943B (en) A Device
EP2791617A4 (en) DEVICE FOR MEASURING A MATERIAL THICKNESS
PL2622119T3 (pl) Sposób działania urządzenia dozującego
GB201111414D0 (en) A securing device for elongate material
HU4035U (en) Hand held adjusting device for points
GB2491828B (en) A device