NO911991D0 - Mikrominiatyrisert elektrostatisk pumpe. - Google Patents

Mikrominiatyrisert elektrostatisk pumpe.

Info

Publication number
NO911991D0
NO911991D0 NO911991A NO911991A NO911991D0 NO 911991 D0 NO911991 D0 NO 911991D0 NO 911991 A NO911991 A NO 911991A NO 911991 A NO911991 A NO 911991A NO 911991 D0 NO911991 D0 NO 911991D0
Authority
NO
Norway
Prior art keywords
pct
pump
electrodes
microminiatyrized
sec
Prior art date
Application number
NO911991A
Other languages
English (en)
Other versions
NO911991L (no
Inventor
Axel Richter
Herrmann Sandmeier
Fritz Schoppe
Original Assignee
Frauenhof Ges Zur Foerderung D
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Frauenhof Ges Zur Foerderung D filed Critical Frauenhof Ges Zur Foerderung D
Publication of NO911991D0 publication Critical patent/NO911991D0/no
Publication of NO911991L publication Critical patent/NO911991L/no

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
    • H02N11/006—Motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/16—Arrangements for supplying liquids or other fluent material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • ing And Chemical Polishing (AREA)
  • Semiconductor Memories (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Extraction Or Liquid Replacement (AREA)
  • Compressor (AREA)
  • Dc-Dc Converters (AREA)
NO91911991A 1989-08-03 1991-05-23 Mikrominiatyrisert elektrostatisk pumpe. NO911991L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3925749A DE3925749C1 (no) 1989-08-03 1989-08-03
PCT/EP1990/000611 WO1991002375A1 (de) 1989-08-03 1990-04-17 Mikrominiaturisierte elektrostatische pumpe

Publications (2)

Publication Number Publication Date
NO911991D0 true NO911991D0 (no) 1991-05-23
NO911991L NO911991L (no) 1991-05-23

Family

ID=6386473

Family Applications (1)

Application Number Title Priority Date Filing Date
NO91911991A NO911991L (no) 1989-08-03 1991-05-23 Mikrominiatyrisert elektrostatisk pumpe.

Country Status (12)

Country Link
US (1) US5180288A (no)
EP (1) EP0469019B1 (no)
JP (1) JPH05501026A (no)
KR (1) KR940006869B1 (no)
AT (1) ATE82088T1 (no)
CA (1) CA2056403C (no)
DE (2) DE3925749C1 (no)
DK (1) DK0469019T3 (no)
ES (1) ES2036114T3 (no)
FI (1) FI912798A0 (no)
NO (1) NO911991L (no)
WO (1) WO1991002375A1 (no)

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DE4105118C1 (en) * 1991-02-19 1992-04-30 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De Miniature electrostatic pump or flow velocity sensor - has active zone protected while remainder of semiconductor device is embedded in resin mass
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DE4117914A1 (de) * 1991-05-31 1992-12-03 Fraunhofer Ges Forschung Mikrominiaturisierte elektrostatische pumpe
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Also Published As

Publication number Publication date
ES2036114T3 (es) 1993-05-01
EP0469019B1 (de) 1992-11-04
CA2056403C (en) 1994-07-26
KR940006869B1 (ko) 1994-07-28
EP0469019A1 (de) 1992-02-05
DE59000435D1 (de) 1992-12-10
DE3925749C1 (no) 1990-10-31
WO1991002375A1 (de) 1991-02-21
DK0469019T3 (da) 1992-12-14
US5180288A (en) 1993-01-19
JPH0561745B2 (no) 1993-09-07
KR920700350A (ko) 1992-02-19
NO911991L (no) 1991-05-23
FI912798A0 (fi) 1991-06-11
JPH05501026A (ja) 1993-02-25
ATE82088T1 (de) 1992-11-15

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