NO314963B1 - Trykksensor - Google Patents
Trykksensor Download PDFInfo
- Publication number
- NO314963B1 NO314963B1 NO20013509A NO20013509A NO314963B1 NO 314963 B1 NO314963 B1 NO 314963B1 NO 20013509 A NO20013509 A NO 20013509A NO 20013509 A NO20013509 A NO 20013509A NO 314963 B1 NO314963 B1 NO 314963B1
- Authority
- NO
- Norway
- Prior art keywords
- measuring element
- pressure gauge
- cavity
- gauge according
- cross
- Prior art date
Links
- 238000005516 engineering process Methods 0.000 claims description 10
- 230000000295 complement effect Effects 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000012528 membrane Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 241000283068 Tapiridae Species 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0026—Transmitting or indicating the displacement of flexible, deformable tubes by electric, electromechanical, magnetic or electromagnetic means
- G01L9/0027—Transmitting or indicating the displacement of flexible, deformable tubes by electric, electromechanical, magnetic or electromagnetic means using variations in ohmic resistance
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Measuring And Recording Apparatus For Diagnosis (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NO20013509A NO314963B1 (no) | 2001-07-13 | 2001-07-13 | Trykksensor |
| AT02746217T ATE312341T1 (de) | 2001-07-13 | 2002-07-11 | Drucksensor |
| DE60207864T DE60207864T2 (de) | 2001-07-13 | 2002-07-11 | Drucksensor |
| EP02746217A EP1407240B1 (de) | 2001-07-13 | 2002-07-11 | Drucksensor |
| PCT/NO2002/000257 WO2003014690A1 (en) | 2001-07-13 | 2002-07-11 | Pressure sensor |
| US10/483,398 US6966229B2 (en) | 2001-07-13 | 2002-07-11 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NO20013509A NO314963B1 (no) | 2001-07-13 | 2001-07-13 | Trykksensor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| NO20013509D0 NO20013509D0 (no) | 2001-07-13 |
| NO20013509L NO20013509L (no) | 2003-01-14 |
| NO314963B1 true NO314963B1 (no) | 2003-06-16 |
Family
ID=19912670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO20013509A NO314963B1 (no) | 2001-07-13 | 2001-07-13 | Trykksensor |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6966229B2 (de) |
| EP (1) | EP1407240B1 (de) |
| AT (1) | ATE312341T1 (de) |
| DE (1) | DE60207864T2 (de) |
| NO (1) | NO314963B1 (de) |
| WO (1) | WO2003014690A1 (de) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9010191B2 (en) | 2011-12-22 | 2015-04-21 | Rosemount Inc. | Pressure sensor module for sub-sea applications |
| IN2014MN01663A (de) | 2012-03-06 | 2015-05-29 | Rosemount Inc | |
| US9442031B2 (en) | 2013-06-28 | 2016-09-13 | Rosemount Inc. | High integrity process fluid pressure probe |
| JP6425723B2 (ja) * | 2013-07-19 | 2018-11-21 | ローズマウント インコーポレイテッド | ２ピース式の隔離プラグのある隔離部品を有する圧力伝送器 |
| US9459170B2 (en) | 2013-09-26 | 2016-10-04 | Rosemount Inc. | Process fluid pressure sensing assembly for pressure transmitters subjected to high working pressure |
| US9234776B2 (en) | 2013-09-26 | 2016-01-12 | Rosemount Inc. | Multivariable process fluid transmitter for high pressure applications |
| US9638600B2 (en) | 2014-09-30 | 2017-05-02 | Rosemount Inc. | Electrical interconnect for pressure sensor in a process variable transmitter |
| US9683675B2 (en) | 2014-11-24 | 2017-06-20 | General Electric Company | Pressure modulator |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4535631A (en) * | 1982-09-29 | 1985-08-20 | Schlumberger Technology Corporation | Surface acoustic wave sensors |
| US4481497A (en) * | 1982-10-27 | 1984-11-06 | Kulite Semiconductor Products, Inc. | Transducer structures employing ceramic substrates and diaphragms |
| US4984467A (en) * | 1988-03-15 | 1991-01-15 | Pfister Gmbh | Transducer for pressures and/or vibrations and method for manufacturing thereof |
| FR2638524B1 (fr) * | 1988-10-27 | 1994-10-28 | Schlumberger Prospection | Capteur de pression utilisable dans les puits de petrole |
| DE4000326C2 (de) * | 1990-01-08 | 1995-12-14 | Mannesmann Ag | Drucksensor |
| NO179651C (no) * | 1994-03-07 | 1996-11-20 | Sinvent As | Trykkmåler |
| NO304328B1 (no) | 1996-02-27 | 1998-11-30 | Nyfotek As | TrykkmÕler |
| AU2059597A (en) * | 1996-02-28 | 1997-09-16 | Sigma-Netics, Inc. | Improved strain gauge and method of manufacture |
-
2001
- 2001-07-13 NO NO20013509A patent/NO314963B1/no not_active IP Right Cessation
-
2002
- 2002-07-11 DE DE60207864T patent/DE60207864T2/de not_active Expired - Lifetime
- 2002-07-11 AT AT02746217T patent/ATE312341T1/de not_active IP Right Cessation
- 2002-07-11 EP EP02746217A patent/EP1407240B1/de not_active Expired - Lifetime
- 2002-07-11 WO PCT/NO2002/000257 patent/WO2003014690A1/en not_active Application Discontinuation
- 2002-07-11 US US10/483,398 patent/US6966229B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| NO20013509D0 (no) | 2001-07-13 |
| DE60207864D1 (de) | 2006-01-12 |
| US6966229B2 (en) | 2005-11-22 |
| EP1407240A1 (de) | 2004-04-14 |
| WO2003014690A1 (en) | 2003-02-20 |
| DE60207864T2 (de) | 2006-08-17 |
| ATE312341T1 (de) | 2005-12-15 |
| NO20013509L (no) | 2003-01-14 |
| EP1407240B1 (de) | 2005-12-07 |
| US20040159160A1 (en) | 2004-08-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK1K | Patent expired |