NO2824071T3 - - Google Patents
Info
- Publication number
- NO2824071T3 NO2824071T3 NO12870741A NO12870741A NO2824071T3 NO 2824071 T3 NO2824071 T3 NO 2824071T3 NO 12870741 A NO12870741 A NO 12870741A NO 12870741 A NO12870741 A NO 12870741A NO 2824071 T3 NO2824071 T3 NO 2824071T3
- Authority
- NO
- Norway
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/037—Purification
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J6/00—Heat treatments such as Calcining; Fusing ; Pyrolysis
- B01J6/005—Fusing
- B01J6/007—Fusing in crucibles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/0015—Controlling the temperature by thermal insulation means
- B01J2219/00155—Controlling the temperature by thermal insulation means using insulating materials or refractories
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2012/056113 WO2013132651A1 (ja) | 2012-03-09 | 2012-03-09 | シリコン精製装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NO2824071T3 true NO2824071T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2018-07-21 |
Family
ID=49116163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO12870741A NO2824071T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2012-03-09 | 2012-03-09 |
Country Status (10)
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104568566A (zh) * | 2015-01-29 | 2015-04-29 | 德清县立荣金属粉末有限公司 | 一种加热加酸溶解试验箱 |
| US10455680B2 (en) * | 2016-02-29 | 2019-10-22 | Asml Netherlands B.V. | Method and apparatus for purifying target material for EUV light source |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2933164A1 (de) | 1979-08-16 | 1981-02-26 | Consortium Elektrochem Ind | Verfahren zum reinigen von rohsilicium |
| JPS59115052U (ja) * | 1983-01-24 | 1984-08-03 | 株式会社アイジ−技術研究所 | サイデイングボ−ド |
| JPH0639352B2 (ja) * | 1987-09-11 | 1994-05-25 | 信越半導体株式会社 | 単結晶の製造装置 |
| JP3016897B2 (ja) * | 1991-03-20 | 2000-03-06 | 信越半導体株式会社 | シリコン単結晶の製造方法及び装置 |
| JPH07309614A (ja) | 1994-03-24 | 1995-11-28 | Kawasaki Steel Corp | シリコンの精製方法 |
| JP3140300B2 (ja) | 1994-03-29 | 2001-03-05 | 川崎製鉄株式会社 | シリコンの精製方法および精製装置 |
| JPH09309716A (ja) | 1996-03-19 | 1997-12-02 | Kawasaki Steel Corp | シリコンの精製方法 |
| JPH10167716A (ja) | 1996-12-09 | 1998-06-23 | Kawasaki Steel Corp | シリコンの精製方法 |
| JPH10182130A (ja) | 1996-12-26 | 1998-07-07 | Kawasaki Steel Corp | シリコンの精製方法 |
| JP3473369B2 (ja) | 1998-01-21 | 2003-12-02 | Ｊｆｅスチール株式会社 | シリコンの精製方法 |
| JP2000247623A (ja) | 1999-02-24 | 2000-09-12 | Kawasaki Steel Corp | シリコンの精製方法および装置 |
| JP4722403B2 (ja) | 2004-02-20 | 2011-07-13 | 新日鉄マテリアルズ株式会社 | シリコン精製装置及びシリコン精製方法 |
| JP4672559B2 (ja) * | 2005-01-26 | 2011-04-20 | 新日鉄マテリアルズ株式会社 | シリコン精製装置及びシリコン精製方法 |
| JP4955230B2 (ja) * | 2005-07-07 | 2012-06-20 | 東京瓦斯株式会社 | 蒸発混合器および燃料電池式発電装置 |
| US20100197070A1 (en) * | 2007-07-20 | 2010-08-05 | BP Corproation North America Inc. | Methods and Apparatuses for Manufacturing Cast Silicon From Seed Crystals |
| TW201012978A (en) * | 2008-08-27 | 2010-04-01 | Bp Corp North America Inc | Apparatus and method of use for a casting system with independent melting and solidification |
| JP2010254534A (ja) * | 2009-04-28 | 2010-11-11 | Sharp Corp | 坩堝、該坩堝を用いた精製装置および精製方法 |
| JP5178651B2 (ja) * | 2009-07-09 | 2013-04-10 | シャープ株式会社 | シリコン精製装置およびシリコン精製方法 |
| KR20120130005A (ko) * | 2010-02-26 | 2012-11-28 | 모건 어드밴스드 머티리얼즈 앤 테크놀러지 인크 | 탄소계 격납 시스템 |
| JP2012012258A (ja) * | 2010-07-01 | 2012-01-19 | Tokuyama Corp | レーザー耐性が改良されたフッ化金属単結晶の製造方法 |
| JP2012025646A (ja) * | 2010-07-28 | 2012-02-09 | Nippon Steel Materials Co Ltd | シリコン精製装置及びシリコン精製方法 |
-
2012
- 2012-03-09 NO NO12870741A patent/NO2824071T3/no unknown
- 2012-03-09 LT LTEP12870741.1T patent/LT2824071T/lt unknown
- 2012-03-09 ES ES12870741.1T patent/ES2667699T3/es active Active
- 2012-03-09 SI SI201231291T patent/SI2824071T1/sl unknown
- 2012-03-09 JP JP2014503395A patent/JP5938093B2/ja active Active
- 2012-03-09 US US14/381,150 patent/US10370253B2/en active Active
- 2012-03-09 EP EP12870741.1A patent/EP2824071B1/en active Active
- 2012-03-09 PL PL12870741T patent/PL2824071T3/pl unknown
- 2012-03-09 WO PCT/JP2012/056113 patent/WO2013132651A1/ja not_active Ceased
- 2012-03-09 CN CN201280071193.9A patent/CN104245580B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104245580B (zh) | 2016-09-28 |
| PL2824071T3 (pl) | 2018-08-31 |
| EP2824071B1 (en) | 2018-02-21 |
| WO2013132651A1 (ja) | 2013-09-12 |
| EP2824071A1 (en) | 2015-01-14 |
| US10370253B2 (en) | 2019-08-06 |
| ES2667699T3 (es) | 2018-05-14 |
| JP5938093B2 (ja) | 2016-06-22 |
| US20150033798A1 (en) | 2015-02-05 |
| EP2824071A4 (en) | 2015-11-25 |
| CN104245580A (zh) | 2014-12-24 |
| SI2824071T1 (sl) | 2018-10-30 |
| LT2824071T (lt) | 2018-08-10 |
| JPWO2013132651A1 (ja) | 2015-07-30 |