NO132659B - - Google Patents
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- Publication number
- NO132659B NO132659B NO4121/69A NO412169A NO132659B NO 132659 B NO132659 B NO 132659B NO 4121/69 A NO4121/69 A NO 4121/69A NO 412169 A NO412169 A NO 412169A NO 132659 B NO132659 B NO 132659B
- Authority
- NO
- Norway
- Prior art keywords
- silicon
- temperature
- halogenosilane
- trichlorosilane
- pure
- Prior art date
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 238000000354 decomposition reaction Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 21
- 229910052710 silicon Inorganic materials 0.000 description 21
- 239000010703 silicon Substances 0.000 description 21
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical group Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 11
- 239000005052 trichlorosilane Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 239000001257 hydrogen Substances 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 4
- PPDADIYYMSXQJK-UHFFFAOYSA-N trichlorosilicon Chemical compound Cl[Si](Cl)Cl PPDADIYYMSXQJK-UHFFFAOYSA-N 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 239000003403 water pollutant Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/022—Measuring gradient
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
- G01R23/02—Arrangements for measuring frequency, e.g. pulse repetition rate; Arrangements for measuring period of current or voltage
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2200/00—Indexing scheme relating to amplifiers
- H03F2200/261—Amplifier which being suitable for instrumentation applications
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Measuring Frequencies, Analyzing Spectra (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR6932157A FR2058678A5 (fr) | 1969-09-22 | 1969-09-22 | Procede de mesure de la difference de deux frequences voisines et frequencemetre differentiel comportant application dudit procede |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| NO132659B true NO132659B (xx) | 1975-09-01 |
| NO132659C NO132659C (xx) | 1975-12-10 |
Family
ID=9040388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO4121/69A NO132659C (xx) | 1969-09-22 | 1969-10-16 |
Country Status (19)
| Country | Link |
|---|---|
| US (1) | US3681689A (xx) |
| JP (1) | JPS5429386B1 (xx) |
| AT (1) | AT292841B (xx) |
| BE (1) | BE740386A (xx) |
| CA (1) | CA930025A (xx) |
| CH (1) | CH514847A (xx) |
| CS (1) | CS167264B2 (xx) |
| DE (1) | DE1952235C2 (xx) |
| DK (1) | DK131523B (xx) |
| ES (1) | ES372594A1 (xx) |
| FR (1) | FR2058678A5 (xx) |
| GB (1) | GB1282640A (xx) |
| IL (1) | IL33200A (xx) |
| LU (1) | LU59653A1 (xx) |
| NL (1) | NL164673C (xx) |
| NO (1) | NO132659C (xx) |
| PL (1) | PL80788B1 (xx) |
| SE (1) | SE353965B (xx) |
| YU (1) | YU32121B (xx) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5233558A (en) * | 1975-09-10 | 1977-03-14 | Hiromi Ogasawara | Detector for minute variations |
| AU518265B2 (en) * | 1977-05-16 | 1981-09-24 | Enertec | Ripple control system |
| US4761743A (en) * | 1985-12-02 | 1988-08-02 | The Singer Company | Dynamic system analysis in a vibrating beam accelerometer |
| JP2009509159A (ja) * | 2005-09-22 | 2009-03-05 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | フィルター手段を備えた磁気センサー装置 |
| US20100060275A1 (en) * | 2006-12-18 | 2010-03-11 | Koninklijke Philips Electronics N.V. | Magnetic sensor device with robust signal processing |
| CN111220846B (zh) * | 2020-03-10 | 2022-04-19 | 星汉时空科技(北京)有限公司 | 一种高速采样全数字化频率稳定度的测试设备及方法 |
| US11519858B2 (en) | 2021-01-11 | 2022-12-06 | Ysi, Inc. | Induced crosstalk circuit for improved sensor linearity |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2324077A (en) * | 1941-12-27 | 1943-07-13 | Rca Corp | Measuring circuit |
| GB706298A (en) * | 1951-07-16 | 1954-03-24 | Ebauches Sa | Method for comparing the frequencies of two high-frequency generators and apparatus for carrying out this method |
| BE519917A (xx) * | 1952-05-14 | |||
| DE1265864B (de) * | 1961-07-12 | 1968-04-11 | Commissariat Energie Atomique | Vorrichtung zur Messung der Frequenz der Schwingungen eines Oszillators, insbesondere eines mit magnetischer Resonanz arbeitenden Maser-Oszillators |
| FR1430874A (fr) * | 1963-12-12 | 1966-03-11 | Commissariat Energie Atomique | Magnétomètre à résonances magnétiques |
| GB1150664A (en) * | 1963-12-12 | 1969-04-30 | Commissariat A L En Atomique 6 | A Frequency Meter |
| DE1208402B (de) * | 1964-07-14 | 1966-01-05 | Standard Elektrik Lorenz Ag | Verfahren zur Bestimmung kleiner Abweichungen der Istfrequenz einer Ton- bzw. Hochfrequenz-spannung von einer Sollfrequenz |
| FR1439730A (fr) * | 1965-07-13 | 1966-05-20 | Int Standard Electric Corp | Perfectionnements aux systèmes permettant de mesurer de très faibles différences de fréquences |
| FR1554371A (xx) * | 1967-03-29 | 1969-01-17 | ||
| US3524131A (en) * | 1967-09-25 | 1970-08-11 | John A Mcwaid | High speed frequency computing apparatus |
-
1969
- 1969-09-22 FR FR6932157A patent/FR2058678A5/fr not_active Expired
- 1969-10-14 US US866248A patent/US3681689A/en not_active Expired - Lifetime
- 1969-10-15 DK DK546369AA patent/DK131523B/da unknown
- 1969-10-16 AT AT976769A patent/AT292841B/de not_active IP Right Cessation
- 1969-10-16 NO NO4121/69A patent/NO132659C/no unknown
- 1969-10-16 CA CA065096A patent/CA930025A/en not_active Expired
- 1969-10-16 CS CS6895A patent/CS167264B2/cs unknown
- 1969-10-16 IL IL33200A patent/IL33200A/xx unknown
- 1969-10-16 YU YU2599/69A patent/YU32121B/xx unknown
- 1969-10-16 LU LU59653D patent/LU59653A1/xx unknown
- 1969-10-16 JP JP6982277A patent/JPS5429386B1/ja active Pending
- 1969-10-16 CH CH1550869A patent/CH514847A/fr not_active IP Right Cessation
- 1969-10-16 GB GB50832/69A patent/GB1282640A/en not_active Expired
- 1969-10-16 SE SE14234/69A patent/SE353965B/xx unknown
- 1969-10-16 DE DE1952235A patent/DE1952235C2/de not_active Expired
- 1969-10-16 BE BE740386D patent/BE740386A/xx unknown
- 1969-10-16 PL PL1969136354A patent/PL80788B1/pl unknown
- 1969-10-16 NL NL6915680.A patent/NL164673C/xx not_active IP Right Cessation
- 1969-10-16 ES ES372594A patent/ES372594A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1952235C2 (de) | 1982-06-24 |
| IL33200A (en) | 1973-01-30 |
| BE740386A (xx) | 1970-04-01 |
| CS167264B2 (xx) | 1976-04-29 |
| SE353965B (xx) | 1973-02-19 |
| YU259969A (en) | 1973-10-31 |
| CA930025A (en) | 1973-07-10 |
| DK131523B (da) | 1975-07-28 |
| NL6915680A (xx) | 1971-03-24 |
| CH514847A (fr) | 1971-10-31 |
| LU59653A1 (xx) | 1970-01-12 |
| PL80788B1 (xx) | 1975-08-30 |
| AT292841B (de) | 1971-09-10 |
| GB1282640A (en) | 1972-07-19 |
| US3681689A (en) | 1972-08-01 |
| JPS5429386B1 (xx) | 1979-09-22 |
| NL164673C (nl) | 1981-01-15 |
| NO132659C (xx) | 1975-12-10 |
| ES372594A1 (es) | 1975-08-16 |
| YU32121B (en) | 1974-04-30 |
| FR2058678A5 (fr) | 1971-05-28 |
| DE1952235A1 (de) | 1971-05-06 |
| IL33200A0 (en) | 1969-12-31 |
| DK131523C (xx) | 1975-12-22 |
| NL164673B (nl) | 1980-08-15 |
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