NL8602632A - Verbeteringen bij cryopompen. - Google Patents
Verbeteringen bij cryopompen. Download PDFInfo
- Publication number
- NL8602632A NL8602632A NL8602632A NL8602632A NL8602632A NL 8602632 A NL8602632 A NL 8602632A NL 8602632 A NL8602632 A NL 8602632A NL 8602632 A NL8602632 A NL 8602632A NL 8602632 A NL8602632 A NL 8602632A
- Authority
- NL
- Netherlands
- Prior art keywords
- cryogenerator
- pumping system
- enclosed space
- chamber
- throttle
- Prior art date
Links
- 238000005086 pumping Methods 0.000 claims description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 17
- 230000008021 deposition Effects 0.000 claims description 3
- 238000009987 spinning Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 26
- 150000002500 ions Chemical class 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000009833 condensation Methods 0.000 description 6
- 230000005494 condensation Effects 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000000889 atomisation Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 239000003610 charcoal Substances 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 230000037452 priming Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB8526191 | 1985-10-23 | ||
| GB858526191A GB8526191D0 (en) | 1985-10-23 | 1985-10-23 | Cryopumps |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL8602632A true NL8602632A (nl) | 1987-05-18 |
Family
ID=10587148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL8602632A NL8602632A (nl) | 1985-10-23 | 1986-10-21 | Verbeteringen bij cryopompen. |
Country Status (8)
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4815303A (en) * | 1988-03-21 | 1989-03-28 | Duza Peter J | Vacuum cryopump with improved first stage |
| CH686384A5 (de) * | 1992-07-21 | 1996-03-15 | Marcel Kohler | Kryopumpe. |
| DE19632123A1 (de) * | 1996-08-09 | 1998-02-12 | Leybold Vakuum Gmbh | Kryopumpe |
| US6155059A (en) * | 1999-01-13 | 2000-12-05 | Helix Technology Corporation | High capacity cryopump |
| JP5193786B2 (ja) * | 2008-10-01 | 2013-05-08 | 住友重機械工業株式会社 | クライオポンプ |
| KR102663120B1 (ko) * | 2018-09-06 | 2024-05-07 | 스미도모쥬기가이고교 가부시키가이샤 | 크라이오펌프 |
| GB2621830B (en) * | 2022-08-22 | 2024-08-14 | Atomic Energy Authority Uk | Improvements in and relating to fusion reactor fuel recovery |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3485054A (en) * | 1966-10-27 | 1969-12-23 | Cryogenic Technology Inc | Rapid pump-down vacuum chambers incorporating cryopumps |
| GB1313506A (en) * | 1969-05-07 | 1973-04-11 | Edwards High Vacuum Int Ltd | Vapour vacuum pumps |
| US4150549A (en) * | 1977-05-16 | 1979-04-24 | Air Products And Chemicals, Inc. | Cryopumping method and apparatus |
| US4285710A (en) * | 1978-09-18 | 1981-08-25 | Varian Associates, Inc. | Cryogenic device for restricting the pumping speed of selected gases |
| DE3216591A1 (de) * | 1982-05-04 | 1983-11-10 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe mit jalousieartigem baffle |
| DE3364522D1 (en) * | 1982-08-27 | 1986-08-21 | Comptech Inc | Cryogenic pump having maximum aperture throttled port |
| US4531372A (en) * | 1982-08-27 | 1985-07-30 | Comptech, Incorporated | Cryogenic pump having maximum aperture throttled part |
| GB8400349D0 (en) * | 1984-01-07 | 1984-02-08 | Boc Group Plc | Cryogenic pumps |
| US4593530A (en) * | 1984-04-10 | 1986-06-10 | Air Products And Chemicals, Inc. | Method and apparatus for improving the sensitivity of a leak detector utilizing a cryopump |
| US4611467A (en) * | 1985-06-10 | 1986-09-16 | Helix Technology Corporation | Method and apparatus for throttling gas flow to a cryopump |
-
1985
- 1985-10-23 GB GB858526191A patent/GB8526191D0/en active Pending
-
1986
- 1986-10-17 US US06/920,325 patent/US4736591A/en not_active Expired - Fee Related
- 1986-10-20 GB GB8625065A patent/GB2182101B/en not_active Expired
- 1986-10-21 NL NL8602632A patent/NL8602632A/nl not_active Application Discontinuation
- 1986-10-21 SE SE8604478A patent/SE8604478L/xx not_active Application Discontinuation
- 1986-10-22 FR FR8614661A patent/FR2589525B1/fr not_active Expired
- 1986-10-22 DE DE19863635941 patent/DE3635941A1/de active Granted
- 1986-10-23 IT IT22108/86A patent/IT1224171B/it active
- 1986-10-23 JP JP61252789A patent/JPS62162779A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62162779A (ja) | 1987-07-18 |
| IT1224171B (it) | 1990-09-26 |
| SE8604478D0 (sv) | 1986-10-21 |
| GB8625065D0 (en) | 1986-11-26 |
| DE3635941C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-10-11 |
| IT8622108A0 (it) | 1986-10-23 |
| DE3635941A1 (de) | 1987-06-19 |
| FR2589525A1 (fr) | 1987-05-07 |
| FR2589525B1 (fr) | 1988-10-07 |
| US4736591A (en) | 1988-04-12 |
| GB2182101A (en) | 1987-05-07 |
| GB2182101B (en) | 1989-10-04 |
| GB8526191D0 (en) | 1985-11-27 |
| SE8604478L (sv) | 1987-04-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4449373A (en) | Reduced vacuum cryopump | |
| US4724677A (en) | Continuous cryopump with a device for regenerating the cryosurface | |
| JP2574586B2 (ja) | クライオポンプを再生する方法及びこの方法を実施するのに適したクライオポンプ | |
| JP5552693B2 (ja) | クライオポンプルーバ拡張部 | |
| US7217306B2 (en) | Trap apparatus | |
| US4198829A (en) | Cryopumps | |
| JPH06510348A (ja) | クライオポンプ | |
| US5483803A (en) | High conductance water pump | |
| US5357760A (en) | Hybrid cryogenic vacuum pump apparatus and method of operation | |
| JP2010014066A (ja) | クライオポンプ | |
| KR100576958B1 (ko) | 배출 필터를 구비한 극저온 펌프 | |
| WO1998034029A1 (en) | Cryopump with improved shielding | |
| US6122920A (en) | High specific surface area aerogel cryoadsorber for vacuum pumping applications | |
| NL8602632A (nl) | Verbeteringen bij cryopompen. | |
| WO1992014057A1 (en) | Cryopump with improved second stage passageway | |
| US4611467A (en) | Method and apparatus for throttling gas flow to a cryopump | |
| Bentley | The modern cryopump | |
| US5211022A (en) | Cryopump with differential pumping capability | |
| US4838035A (en) | Continuous cryopump with a method for removal of solidified gases | |
| JP3961050B2 (ja) | 真空排気装置 | |
| JP4751405B2 (ja) | クライオポンプ | |
| JPH0544642A (ja) | 低温トラツプ付クライオポンプ | |
| JPS59218372A (ja) | 低温ポンプならびにそのクロスオーバハングアップを阻止する方法 | |
| JPH0451669B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JP3604228B2 (ja) | 真空排気装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| BV | The patent application has lapsed |