NL8500815A - Lineair gemaakte capacitieve drukoverdrager. - Google Patents
Lineair gemaakte capacitieve drukoverdrager. Download PDFInfo
- Publication number
- NL8500815A NL8500815A NL8500815A NL8500815A NL8500815A NL 8500815 A NL8500815 A NL 8500815A NL 8500815 A NL8500815 A NL 8500815A NL 8500815 A NL8500815 A NL 8500815A NL 8500815 A NL8500815 A NL 8500815A
- Authority
- NL
- Netherlands
- Prior art keywords
- capacitor
- capacitance
- sensing
- pressure
- electrically conductive
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 claims description 54
- 238000000034 method Methods 0.000 claims description 8
- 230000001419 dependent effect Effects 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000009826 distribution Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 210000003056 antler Anatomy 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US59872784 | 1984-04-10 | ||
US06/598,727 US4542436A (en) | 1984-04-10 | 1984-04-10 | Linearized capacitive pressure transducer |
Publications (1)
Publication Number | Publication Date |
---|---|
NL8500815A true NL8500815A (nl) | 1985-11-01 |
Family
ID=24396673
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL8500815A NL8500815A (nl) | 1984-04-10 | 1985-03-20 | Lineair gemaakte capacitieve drukoverdrager. |
Country Status (10)
Country | Link |
---|---|
US (1) | US4542436A (de) |
JP (1) | JPS6140529A (de) |
AU (1) | AU3967485A (de) |
BE (1) | BE902115A (de) |
CA (1) | CA1227354A (de) |
DE (1) | DE3511367A1 (de) |
FR (1) | FR2562663A1 (de) |
GB (1) | GB2157444A (de) |
NL (1) | NL8500815A (de) |
ZA (1) | ZA852233B (de) |
Families Citing this family (70)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI872049A (fi) * | 1987-05-08 | 1988-11-09 | Vaisala Oy | Kondensatorkonstruktion foer anvaendning vid tryckgivare. |
US4875369A (en) * | 1987-09-08 | 1989-10-24 | Panex Corporation | Pressure sensor system |
US5048165A (en) * | 1989-01-30 | 1991-09-17 | Dresser Industries, Inc. | Method for controlling the sensitivity and linearity of capacitive transducer systems |
DE3909185A1 (de) * | 1989-03-21 | 1990-09-27 | Endress Hauser Gmbh Co | Kapazitiver drucksensor und verfahren zu seiner herstellung |
US6314823B1 (en) * | 1991-09-20 | 2001-11-13 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
US5421213A (en) * | 1990-10-12 | 1995-06-06 | Okada; Kazuhiro | Multi-dimensional force detector |
US5445031A (en) * | 1991-11-28 | 1995-08-29 | Endress+Hauser Gmbh+Co. | Pressure-measuring arrangement with high linearity |
DE4142101A1 (de) * | 1991-11-28 | 1993-06-03 | Lueder Ernst Prof Dr Ing | Druckmessanordnung mit hoher linearitaet |
JP2896725B2 (ja) * | 1991-12-26 | 1999-05-31 | 株式会社山武 | 静電容量式圧力センサ |
DE69316536T2 (de) * | 1992-11-06 | 1998-06-04 | Texas Instruments Inc | Verfahren zur Herstellung eines kapazitiven Druckwandlers |
US6282956B1 (en) * | 1994-12-29 | 2001-09-04 | Kazuhiro Okada | Multi-axial angular velocity sensor |
US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
US5637802A (en) * | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
US5665899A (en) * | 1996-02-23 | 1997-09-09 | Rosemount Inc. | Pressure sensor diagnostics in a process transmitter |
US5808205A (en) * | 1997-04-01 | 1998-09-15 | Rosemount Inc. | Eccentric capacitive pressure sensor |
US5965821A (en) * | 1997-07-03 | 1999-10-12 | Mks Instruments, Inc. | Pressure sensor |
US20040099061A1 (en) | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
DE19824778C2 (de) * | 1998-04-09 | 2002-07-18 | Heinz Ploechinger | Druck- oder Kraftsensorstruktur und Verfahren zur Herstellung derselben |
US6675656B1 (en) * | 1998-04-09 | 2004-01-13 | Ploechinger Heinz | Pressure or force sensor structure and method for producing the same |
US6508131B2 (en) | 1999-05-14 | 2003-01-21 | Rosemount Inc. | Process sensor module having a single ungrounded input/output conductor |
US6295875B1 (en) | 1999-05-14 | 2001-10-02 | Rosemount Inc. | Process pressure measurement devices with improved error compensation |
US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
US6508129B1 (en) | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
EP1244900B1 (de) | 2000-01-06 | 2005-01-05 | Rosemount Inc. | Kornwachstumsverfahren zur herstellung einer elektrischen verbindung für mikroelektromechanische systeme (mems) |
US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
US6516672B2 (en) | 2001-05-21 | 2003-02-11 | Rosemount Inc. | Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter |
US6839546B2 (en) | 2002-04-22 | 2005-01-04 | Rosemount Inc. | Process transmitter with wireless communication link |
US6848316B2 (en) | 2002-05-08 | 2005-02-01 | Rosemount Inc. | Pressure sensor assembly |
US6993973B2 (en) * | 2003-05-16 | 2006-02-07 | Mks Instruments, Inc. | Contaminant deposition control baffle for a capacitive pressure transducer |
JP4514509B2 (ja) * | 2004-05-14 | 2010-07-28 | アップサイド株式会社 | 力センサー、力検出システム及び力検出プログラム |
US8145180B2 (en) | 2004-05-21 | 2012-03-27 | Rosemount Inc. | Power generation for process devices |
US7262693B2 (en) | 2004-06-28 | 2007-08-28 | Rosemount Inc. | Process field device with radio frequency communication |
US8160535B2 (en) | 2004-06-28 | 2012-04-17 | Rosemount Inc. | RF adapter for field device |
US7201057B2 (en) | 2004-09-30 | 2007-04-10 | Mks Instruments, Inc. | High-temperature reduced size manometer |
US7141447B2 (en) | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
US7137301B2 (en) | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
US7680460B2 (en) * | 2005-01-03 | 2010-03-16 | Rosemount Inc. | Wireless process field device diagnostics |
US7204150B2 (en) | 2005-01-14 | 2007-04-17 | Mks Instruments, Inc. | Turbo sump for use with capacitive pressure sensor |
US7334484B2 (en) * | 2005-05-27 | 2008-02-26 | Rosemount Inc. | Line pressure measurement using differential pressure sensor |
EP1896910A1 (de) | 2005-06-27 | 2008-03-12 | Rosemount, Inc. | Feldgerät mit hochfrequenzkommunikation mit dynamisch einstellbarem energieverbrauch |
US7379792B2 (en) * | 2005-09-29 | 2008-05-27 | Rosemount Inc. | Pressure transmitter with acoustic pressure sensor |
US7415886B2 (en) * | 2005-12-20 | 2008-08-26 | Rosemount Inc. | Pressure sensor with deflectable diaphragm |
US7308830B2 (en) * | 2006-01-26 | 2007-12-18 | Rosemount Inc. | Pressure sensor fault detection |
WO2008088898A1 (en) * | 2007-01-19 | 2008-07-24 | Sierra Scientific Instruments, Inc. | Micro-remote gastrointestinal physiological measurement device |
US7944008B2 (en) * | 2007-04-23 | 2011-05-17 | Sierra Scientific Instruments, Llc | Suspended membrane pressure sensing array |
US8898036B2 (en) | 2007-08-06 | 2014-11-25 | Rosemount Inc. | Process variable transmitter with acceleration sensor |
US7484416B1 (en) | 2007-10-15 | 2009-02-03 | Rosemount Inc. | Process control transmitter with vibration sensor |
JP5554328B2 (ja) | 2008-06-17 | 2014-07-23 | ローズマウント インコーポレイテッド | 本質安全の低電圧クランプ回路を備えるフィールド装置用rfアダプタ |
US8929948B2 (en) | 2008-06-17 | 2015-01-06 | Rosemount Inc. | Wireless communication adapter for field devices |
CA2726601C (en) | 2008-06-17 | 2016-08-09 | Rosemount Inc. | Rf adapter for field device with variable voltage drop |
US8694060B2 (en) | 2008-06-17 | 2014-04-08 | Rosemount Inc. | Form factor and electromagnetic interference protection for process device wireless adapters |
CA2726534C (en) | 2008-06-17 | 2016-03-22 | Rosemount Inc. | Rf adapter for field device with loop current bypass |
US7954383B2 (en) * | 2008-12-03 | 2011-06-07 | Rosemount Inc. | Method and apparatus for pressure measurement using fill tube |
US7870791B2 (en) * | 2008-12-03 | 2011-01-18 | Rosemount Inc. | Method and apparatus for pressure measurement using quartz crystal |
US8327713B2 (en) | 2008-12-03 | 2012-12-11 | Rosemount Inc. | Method and apparatus for pressure measurement using magnetic property |
US8839683B2 (en) * | 2009-05-01 | 2014-09-23 | The University Of Western Ontario | Photonic crystal pressure sensor |
US8626087B2 (en) | 2009-06-16 | 2014-01-07 | Rosemount Inc. | Wire harness for field devices used in a hazardous locations |
US9674976B2 (en) | 2009-06-16 | 2017-06-06 | Rosemount Inc. | Wireless process communication adapter with improved encapsulation |
US8429978B2 (en) | 2010-03-30 | 2013-04-30 | Rosemount Inc. | Resonant frequency based pressure sensor |
US8234927B2 (en) | 2010-06-08 | 2012-08-07 | Rosemount Inc. | Differential pressure sensor with line pressure measurement |
US8132464B2 (en) | 2010-07-12 | 2012-03-13 | Rosemount Inc. | Differential pressure transmitter with complimentary dual absolute pressure sensors |
US10761524B2 (en) | 2010-08-12 | 2020-09-01 | Rosemount Inc. | Wireless adapter with process diagnostics |
EP2520917A1 (de) * | 2011-05-04 | 2012-11-07 | Nxp B.V. | Kapazitativer MEMS-Drucksensor, Betriebsverfahren und Herstellungsverfahren |
US9310794B2 (en) | 2011-10-27 | 2016-04-12 | Rosemount Inc. | Power supply for industrial process field device |
US8752433B2 (en) | 2012-06-19 | 2014-06-17 | Rosemount Inc. | Differential pressure transmitter with pressure sensor |
US10183857B2 (en) | 2012-08-21 | 2019-01-22 | Robert Bosch Gmbh | MEMS pressure sensor with multiple membrane electrodes |
US9048901B2 (en) | 2013-03-15 | 2015-06-02 | Rosemount Inc. | Wireless interface within transmitter |
JP2020041880A (ja) * | 2018-09-10 | 2020-03-19 | アズビル株式会社 | 圧力センサ |
CN110415983A (zh) * | 2019-07-04 | 2019-11-05 | 广州广华精容能源技术有限公司 | 一种具有传感性能的储能和传感一体化超级电容器 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3858097A (en) * | 1973-12-26 | 1974-12-31 | Bendix Corp | Pressure-sensing capacitor |
GB1450709A (en) * | 1973-12-31 | 1976-09-29 | Birchall D J | Pressure transducers |
US4158217A (en) * | 1976-12-02 | 1979-06-12 | Kaylico Corporation | Capacitive pressure transducer with improved electrode |
NL7905562A (nl) * | 1979-07-17 | 1981-01-20 | Heerens Willem Christiaan | Capacitieve meter. |
US4227419A (en) * | 1979-09-04 | 1980-10-14 | Kavlico Corporation | Capacitive pressure transducer |
CH652823A5 (de) * | 1980-03-26 | 1985-11-29 | Bosch Gmbh Robert | Weg-frequenz-messgroessenwandler. |
US4422335A (en) * | 1981-03-25 | 1983-12-27 | The Bendix Corporation | Pressure transducer |
US4458537A (en) * | 1981-05-11 | 1984-07-10 | Combustion Engineering, Inc. | High accuracy differential pressure capacitive transducer |
US4422125A (en) * | 1982-05-21 | 1983-12-20 | The Bendix Corporation | Pressure transducer with an invariable reference capacitor |
-
1984
- 1984-04-10 US US06/598,727 patent/US4542436A/en not_active Expired - Fee Related
-
1985
- 1985-03-08 AU AU39674/85A patent/AU3967485A/en not_active Abandoned
- 1985-03-20 NL NL8500815A patent/NL8500815A/nl not_active Application Discontinuation
- 1985-03-21 CA CA000477128A patent/CA1227354A/en not_active Expired
- 1985-03-25 ZA ZA852233A patent/ZA852233B/xx unknown
- 1985-03-28 DE DE19853511367 patent/DE3511367A1/de not_active Withdrawn
- 1985-04-03 FR FR8505092A patent/FR2562663A1/fr not_active Withdrawn
- 1985-04-04 GB GB08508859A patent/GB2157444A/en not_active Withdrawn
- 1985-04-04 BE BE0/214788A patent/BE902115A/fr unknown
- 1985-04-09 JP JP7366585A patent/JPS6140529A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US4542436A (en) | 1985-09-17 |
JPS6140529A (ja) | 1986-02-26 |
AU3967485A (en) | 1985-10-17 |
BE902115A (fr) | 1985-10-04 |
CA1227354A (en) | 1987-09-29 |
FR2562663A1 (fr) | 1985-10-11 |
DE3511367A1 (de) | 1985-10-24 |
GB8508859D0 (en) | 1985-05-09 |
GB2157444A (en) | 1985-10-23 |
ZA852233B (en) | 1986-05-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BV | The patent application has lapsed |