NL8201577A - Piezo-electrische motor. - Google Patents
Piezo-electrische motor. Download PDFInfo
- Publication number
- NL8201577A NL8201577A NL8201577A NL8201577A NL8201577A NL 8201577 A NL8201577 A NL 8201577A NL 8201577 A NL8201577 A NL 8201577A NL 8201577 A NL8201577 A NL 8201577A NL 8201577 A NL8201577 A NL 8201577A
- Authority
- NL
- Netherlands
- Prior art keywords
- rotor
- piezoelectric
- motor according
- stator
- oscillator
- Prior art date
Links
- 230000003993 interaction Effects 0.000 claims description 52
- 230000004048 modification Effects 0.000 description 30
- 238000012986 modification Methods 0.000 description 30
- 230000002441 reversible effect Effects 0.000 description 17
- 239000000463 material Substances 0.000 description 14
- 230000010355 oscillation Effects 0.000 description 6
- 230000010358 mechanical oscillation Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000004033 plastic Substances 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229920002313 fluoropolymer Polymers 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000760 Hardened steel Inorganic materials 0.000 description 1
- 229910000805 Pig iron Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- UFGZSIPAQKLCGR-UHFFFAOYSA-N chromium carbide Chemical compound [Cr]#C[Cr]C#[Cr] UFGZSIPAQKLCGR-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005474 detonation Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 229910003470 tongbaite Inorganic materials 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0065—Friction interface
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/369,181 US4400641A (en) | 1982-04-16 | 1982-04-16 | Piezoelectric motor with two part rotor |
US36918182 | 1982-04-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
NL8201577A true NL8201577A (nl) | 1983-11-01 |
Family
ID=23454436
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL8201577A NL8201577A (nl) | 1982-04-16 | 1982-04-15 | Piezo-electrische motor. |
Country Status (10)
Country | Link |
---|---|
US (1) | US4400641A (de) |
JP (1) | JPS58192475A (de) |
AT (1) | AT382262B (de) |
AU (1) | AU551505B2 (de) |
CA (1) | CA1182159A (de) |
DE (1) | DE3213348C2 (de) |
FR (1) | FR2525411A1 (de) |
GB (1) | GB2118373B (de) |
NL (1) | NL8201577A (de) |
SE (1) | SE452933B (de) |
Families Citing this family (63)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1208269A (en) * | 1982-02-25 | 1986-07-22 | Toshiiku Sashida | Motor device utilizing ultrasonic oscillation |
US4513219A (en) * | 1982-11-25 | 1985-04-23 | Canon Kabushiki Kaisha | Vibration wave motor |
US4495432A (en) * | 1982-12-15 | 1985-01-22 | Canon Kabushiki Kaisha | Piezoelectric vibration wave motor with sloped drive surface |
JPS59204477A (ja) * | 1983-05-04 | 1984-11-19 | Nippon Kogaku Kk <Nikon> | 超音波モーターの駆動制御回路 |
USRE34409E (en) * | 1983-05-04 | 1993-10-19 | Nikon Corporation | Drive circuit for surface-wave driven motor utilizing ultrasonic vibration |
JPS6096183A (ja) * | 1983-10-26 | 1985-05-29 | Canon Inc | 振動波モータ |
JPS60170472A (ja) * | 1984-02-10 | 1985-09-03 | Canon Inc | 振動波モ−タ |
US4786836A (en) * | 1984-03-01 | 1988-11-22 | Matsushita Electric Industrail Co., Ltd. | Piezoelectric motor |
JPS61139280A (ja) * | 1984-12-11 | 1986-06-26 | Matsushita Electric Ind Co Ltd | 電歪モ−タ |
JPS61224878A (ja) * | 1985-03-29 | 1986-10-06 | Canon Inc | 振動波モ−タ− |
JPS62152381A (ja) * | 1985-12-25 | 1987-07-07 | Canon Inc | 回転動力装置 |
US4742260A (en) * | 1986-02-06 | 1988-05-03 | Hiroshi Shimizu | Piezoelectrically driving device |
US4794294A (en) * | 1986-06-12 | 1988-12-27 | Canon Kabushiki Kaisha | Vibration wave motor |
JP2632811B2 (ja) * | 1986-08-29 | 1997-07-23 | キヤノン株式会社 | 振動駆動モータ |
US5146129A (en) * | 1986-12-01 | 1992-09-08 | Canon Kabushiki Kaisha | Vibration wave motor |
US4959580A (en) * | 1987-02-28 | 1990-09-25 | Kievsky Politekhnichesky Institut Imeni | Piezoelectric motor |
US4755705A (en) * | 1987-06-15 | 1988-07-05 | Holum Mark J | Piezoelectric motor |
JP2690907B2 (ja) * | 1987-09-25 | 1997-12-17 | 株式会社日立製作所 | 複合型圧電モータ |
DE3735623A1 (de) * | 1987-10-21 | 1989-05-03 | Philips Patentverwaltung | Elektrischer rotations- oder linearmotor, dessen laeufer mittels ultraschallschwingungen angetrieben wird |
JPH01270776A (ja) * | 1988-04-22 | 1989-10-30 | Aisin Seiki Co Ltd | 超音波モータの動体 |
US4831306A (en) * | 1988-05-04 | 1989-05-16 | Micro-Pulse Research And Development | Piezoelectric motor having a pivotally mounted annular shaped housing |
DE68917525T2 (de) * | 1988-05-26 | 1995-01-12 | Toda Koji | Antriebsanordnung vom Schwingungstyp. |
DE3920726A1 (de) * | 1988-06-29 | 1990-01-04 | Olympus Optical Co | Ultraschalloszillator |
US4928030A (en) * | 1988-09-30 | 1990-05-22 | Rockwell International Corporation | Piezoelectric actuator |
US5043621A (en) * | 1988-09-30 | 1991-08-27 | Rockwell International Corporation | Piezoelectric actuator |
GB2235820A (en) * | 1989-06-21 | 1991-03-13 | Brother Ind Ltd | A drive system for a mechanical part of an image forming apparatus |
JPH05503834A (ja) * | 1990-12-04 | 1993-06-17 | スカンソブ トランスポート アクチボラゲット | 圧電モータ |
DE4233256C1 (de) * | 1992-10-02 | 1993-12-02 | Endress Hauser Gmbh Co | Schall- oder Ultraschallwandler |
US5466979A (en) * | 1993-03-03 | 1995-11-14 | Board Of Regents, The University Of | Methods and apparatus to reduce wear on sliding surfaces |
US5616980A (en) * | 1993-07-09 | 1997-04-01 | Nanomotion Ltd. | Ceramic motor |
US5682076A (en) * | 1993-08-03 | 1997-10-28 | Nanomotion Ltd. | Ceramic disc-drive actuator |
KR100341871B1 (ko) * | 1993-09-08 | 2002-11-29 | 아스라브 쏘시에떼 아노님 | 회전자위치탐지기를갖는압전모터및그압전모터고정자제조방법 |
CH686854B5 (de) * | 1994-12-29 | 1997-01-31 | Ebauchesfabrik Eta Ag | Piezoelektrischer Motor mit Einrichtung, die Informationen bezueglich der Rotorposition und/oder -drehzahl liefert. |
DE19535481C1 (de) * | 1995-09-23 | 1997-07-03 | Univ Magdeburg Tech | Piezoelektrische Antriebseinheit zur Erzeugung rotatorischer oder translatorischer Abtriebsbewegungen mittels längsschwingender piezoelektrischer Aktoren |
DE19538978C1 (de) * | 1995-10-19 | 1996-11-21 | Univ Magdeburg Tech | Antriebseinheit zur Erzeugung vorzugsweise rotatorischer Abtriebsbewegungen, insbesondere mittels piezoelektrischer Aktoren |
GB9617076D0 (en) * | 1996-08-14 | 1996-09-25 | Intelligent Manufacturing Syst | Bearings and supports |
AU9642698A (en) * | 1998-10-26 | 2000-05-15 | Nanomotion Ltd. | Multidirectional motors |
US6242850B1 (en) | 1999-07-28 | 2001-06-05 | Technology Commercialization Corp. | Piezoelectric motor and a disk drive using same |
US6373170B1 (en) | 2000-03-10 | 2002-04-16 | Edo Electro-Ceramic Products | Piezo-electric motor |
US6690101B2 (en) | 2000-03-23 | 2004-02-10 | Elliptec Resonant Actuator Ag | Vibratory motors and methods of making and using same |
CA2315013C (en) * | 2000-08-03 | 2005-02-08 | Eontech Group, Inc. | Piezoelectric motor |
CA2320011A1 (en) * | 2000-09-18 | 2002-03-18 | Eontech Group, Inc. | Piezoelectric motor |
US20050127789A1 (en) * | 2001-03-08 | 2005-06-16 | Magnussen Bjoern B. | Piezoelectric motors and methods for the production and operation thereof |
DE10113660A1 (de) * | 2001-03-21 | 2002-09-26 | Koninkl Philips Electronics Nv | Piezoelektrischer Antrieb |
US20030095739A1 (en) * | 2001-08-09 | 2003-05-22 | Bainbridge Networks, Inc. | Fiber optic switch |
DE10146703A1 (de) * | 2001-09-21 | 2003-04-10 | Elliptec Resonant Actuator Ag | Piezomotor mit Führung |
AU2003209048C1 (en) * | 2002-02-06 | 2006-10-05 | Elliptec Resonant Actuator Aktiengesellschaft | Piezoelectric motor control |
US7368853B2 (en) * | 2002-04-22 | 2008-05-06 | Elliptec Resonant Actuator Aktiengesellschaft | Piezoelectric motors and methods for the production and operation thereof |
UA71044C2 (uk) * | 2002-06-13 | 2004-11-15 | Сергій Федорович Петренко | Мікроманіпулятор |
US20040113519A1 (en) * | 2002-12-12 | 2004-06-17 | Charles Mentesana | Micro-beam friction liner and method of transferring energy |
JP4483275B2 (ja) * | 2003-02-05 | 2010-06-16 | 株式会社デンソー | 積層型圧電素子及びその製造方法 |
KR100501196B1 (ko) * | 2003-07-09 | 2005-07-18 | 삼성전기주식회사 | 렌즈 이송장치 |
US6867532B2 (en) * | 2003-07-17 | 2005-03-15 | The Brady Group Inc. | Long life piezoelectric drive and components |
DE102004020329A1 (de) * | 2004-04-26 | 2005-11-10 | Epcos Ag | Elektrische Funktionseinheit und Verfahren zu deren Herstellung |
US7436101B1 (en) * | 2004-11-04 | 2008-10-14 | Elliptec Resonant Actuator Ag | Multistage piezoelectric drive |
DE102005017108A1 (de) * | 2005-01-26 | 2006-07-27 | Epcos Ag | Piezoelektrisches Bauelement |
US7545076B1 (en) | 2005-07-11 | 2009-06-09 | Itt Manufacturing Enterprises, Inc. | System and method for tracking drive frequency of piezoelectric motor |
JP4780770B2 (ja) * | 2006-04-10 | 2011-09-28 | 株式会社豊田自動織機 | 振動アクチュエータ |
UA84065C2 (ru) * | 2006-11-09 | 2008-09-10 | Сергей Федорович Петренко | Пьезоэлектрический генератор механических колебаний и пьезоелектрический двигатель на его основе (варианты) |
CN101743157A (zh) * | 2007-04-13 | 2010-06-16 | 泰克尼恩研究和发展基金有限公司 | 振动机器人蠕动器 |
DE102008023478A1 (de) * | 2007-11-08 | 2009-05-14 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschalllinearantrieb mit hohlzylindrischem Oszillator |
JP5794142B2 (ja) | 2011-12-27 | 2015-10-14 | 日立金属株式会社 | 接続構造、接続方法及び差動信号伝送用ケーブル |
US9941774B2 (en) * | 2012-08-08 | 2018-04-10 | Marvell World Trade Ltd. | Controlling fan motors using capacitive sensing |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2439499A (en) * | 1942-08-20 | 1948-04-13 | Brush Dev Co | Piezoelectric motor |
SU1278994A1 (ru) * | 1974-07-05 | 1986-12-23 | Киевский Ордена Ленина Политехнический Институт Им.50-Летия Великой Октябрьской Социалистической Революции | Пьезоэлектрический двигатель |
SE436675B (sv) * | 1975-08-12 | 1985-01-14 | Ki Politekhnichsky I Im 50 Let | Elektrisk motor driven genom piezoelektriska krafter |
AU505959B2 (en) * | 1975-08-13 | 1979-12-06 | Kievsky P I T 5ol V O S R | Piezoelectric motor |
JPS5832518B2 (ja) * | 1975-09-01 | 1983-07-13 | キエフスキ−.ポリチエフニチエスキ−.Inst.イメニ.50−レチア.ベリコイ.オクチヤブルスコイ.ソシイアリスチチエスコイ.レボリユツイ− | 圧電モ−タ |
SU625273A1 (ru) * | 1976-07-09 | 1978-09-25 | Каунасский Политехнический Институт Имени Антанаса Снечкуса | Вибродвигатель |
SU636760A1 (ru) * | 1977-01-03 | 1978-12-05 | Киевский Ордена Ленина Политехнический Институт Им.50-Летия Великой Октябрьской Социалистической Революции | Пьезоэлектрический привод |
SU651435A1 (ru) * | 1977-02-07 | 1979-03-05 | Каунасский Политехнический Институт Им. Антанаса Снечкуса | Двухфазный вибродвигатель |
SU632014A1 (ru) * | 1977-03-28 | 1978-11-05 | Каунасский Политехнический Институт Им.А.Снечкуса | Вибродвигатель |
SU642802A1 (ru) * | 1977-07-18 | 1979-01-15 | Киевский Ордена Ленина Политехнический Институт Им. 50-Летия Великой Октябрьской Социалистической Революции | Пьезоэлектрический реверсивный двигатель |
SU661661A1 (ru) * | 1977-11-24 | 1979-05-05 | Киевский Ордена Ленина Политехнический Институт Им. 50-Летия Великой Октябрьской Социалистической Революции | Пьезоэлектрический реверсивный двигатель |
SU805476A1 (ru) * | 1978-05-12 | 1981-02-15 | Специальное Проектно-Конструкторское Итехнологическое Бюро Малых Электричес-Ких Машин Производственного Объедине-Ния "Эльфа" | Вибродвигатель |
DD143682A1 (de) * | 1979-03-22 | 1980-09-03 | Roland Baudisch | Piezoelektrischer vibrationsantrieb |
-
1982
- 1982-04-01 AT AT0130482A patent/AT382262B/de not_active IP Right Cessation
- 1982-04-05 SE SE8202161A patent/SE452933B/sv not_active IP Right Cessation
- 1982-04-07 CA CA000400628A patent/CA1182159A/en not_active Expired
- 1982-04-07 GB GB08210268A patent/GB2118373B/en not_active Expired
- 1982-04-08 AU AU82498/82A patent/AU551505B2/en not_active Ceased
- 1982-04-08 DE DE3213348A patent/DE3213348C2/de not_active Expired
- 1982-04-15 NL NL8201577A patent/NL8201577A/nl not_active Application Discontinuation
- 1982-04-16 US US06/369,181 patent/US4400641A/en not_active Expired - Fee Related
- 1982-04-16 FR FR8206614A patent/FR2525411A1/fr active Granted
- 1982-04-28 JP JP57072516A patent/JPS58192475A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2525411A1 (fr) | 1983-10-21 |
ATA130482A (de) | 1986-06-15 |
JPS58192475A (ja) | 1983-11-09 |
GB2118373A (en) | 1983-10-26 |
US4400641A (en) | 1983-08-23 |
DE3213348A1 (de) | 1983-10-20 |
CA1182159A (en) | 1985-02-05 |
FR2525411B1 (de) | 1984-07-20 |
SE8202161L (sv) | 1983-10-06 |
AU551505B2 (en) | 1986-05-01 |
DE3213348C2 (de) | 1985-05-09 |
GB2118373B (en) | 1986-04-16 |
AT382262B (de) | 1987-02-10 |
SE452933B (sv) | 1987-12-21 |
AU8249882A (en) | 1983-10-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
NL8201577A (nl) | Piezo-electrische motor. | |
JP4201407B2 (ja) | 圧電駆動要素を有する駆動装置 | |
NL8201578A (nl) | Piezo-electrische motor. | |
US6242850B1 (en) | Piezoelectric motor and a disk drive using same | |
JP4669222B2 (ja) | 圧電駆動装置 | |
JP2006094591A (ja) | 超音波モータとその運転方法 | |
US4399386A (en) | Rotative motor using plural arrays of piezoelectric elements | |
JPH099656A (ja) | 超音波振動子および超音波モータ | |
JP4918122B2 (ja) | 超音波モータ及び超音波モータ付き電子機器 | |
US4399385A (en) | Rotative motor using a triangular piezoelectric element | |
JP2004304963A (ja) | 圧電アクチュエータ | |
JP3477304B2 (ja) | 超音波モータ駆動装置 | |
JPS59185180A (ja) | 超音波モ−タ | |
JPH07107756A (ja) | 超音波モータ | |
JP2769151B2 (ja) | 超音波モータ | |
Tani et al. | Development of a new type piezoelectric micromotor | |
JP4634174B2 (ja) | 超音波モータ及びそれを用いた電子機器 | |
JPH03273878A (ja) | 超音波モータ | |
JPH06261565A (ja) | 振動アクチュエータ | |
JP3194647B2 (ja) | 超音波リニアアクチュエータ | |
Tomikawa et al. | Some reformative trials of piezo-motors using longitudinal and flexural vibrations | |
JPH07337044A (ja) | 超音波アクチュエータ | |
JPS60162487A (ja) | 圧電駆動装置 | |
JP4388273B2 (ja) | 超音波モータ及び超音波モータ付き電子機器 | |
JPH07178370A (ja) | 振動子及び振動アクチュエータ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A1B | A search report has been drawn up | ||
BC | A request for examination has been filed | ||
A85 | Still pending on 85-01-01 | ||
BV | The patent application has lapsed |