NL8002160A - Werkwijze en inrichting voor het waarnemen van fouten in een op een voorwerp aanwezig patroon. - Google Patents

Werkwijze en inrichting voor het waarnemen van fouten in een op een voorwerp aanwezig patroon. Download PDF

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Publication number
NL8002160A
NL8002160A NL8002160A NL8002160A NL8002160A NL 8002160 A NL8002160 A NL 8002160A NL 8002160 A NL8002160 A NL 8002160A NL 8002160 A NL8002160 A NL 8002160A NL 8002160 A NL8002160 A NL 8002160A
Authority
NL
Netherlands
Prior art keywords
pattern
image
value
data
defect
Prior art date
Application number
NL8002160A
Other languages
English (en)
Dutch (nl)
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10314179A external-priority patent/JPS5627532A/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of NL8002160A publication Critical patent/NL8002160A/nl

Links

Classifications

    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
    • G07C3/00—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles
    • G07C3/14—Quality control systems
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/74—Image or video pattern matching; Proximity measures in feature spaces
    • G06V10/75—Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries
    • G06V10/751—Comparing pixel values or logical combinations thereof, or feature values having positional relevance, e.g. template matching
    • G06V10/7515—Shifting the patterns to accommodate for positional errors

Landscapes

  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computing Systems (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Databases & Information Systems (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Multimedia (AREA)
  • Automation & Control Theory (AREA)
  • Quality & Reliability (AREA)
  • Image Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Analysis (AREA)
NL8002160A 1979-04-13 1980-04-14 Werkwijze en inrichting voor het waarnemen van fouten in een op een voorwerp aanwezig patroon. NL8002160A (nl)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP4814179 1979-04-13
JP4814179 1979-04-13
JP10314179 1979-08-15
JP10314179A JPS5627532A (en) 1979-08-15 1979-08-15 Counter circuit

Publications (1)

Publication Number Publication Date
NL8002160A true NL8002160A (nl) 1980-10-15

Family

ID=26388365

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8002160A NL8002160A (nl) 1979-04-13 1980-04-14 Werkwijze en inrichting voor het waarnemen van fouten in een op een voorwerp aanwezig patroon.

Country Status (3)

Country Link
US (1) US4345312A (de)
DE (1) DE3013833C2 (de)
NL (1) NL8002160A (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0054598B1 (de) * 1980-12-18 1985-04-03 International Business Machines Corporation Verfahren zum Untersuchen und automatischen Sortieren von Objekten bestimmter Gestalt mit festen dimensionalen Toleranzen und Einrichtung zur Durchführung des Verfahrens
US4414566A (en) * 1981-04-03 1983-11-08 Industrial Automation Corporation Sorting and inspection apparatus and method
US4441207A (en) * 1982-01-19 1984-04-03 Environmental Research Institute Of Michigan Design rule checking using serial neighborhood processors
US4510616A (en) * 1982-01-19 1985-04-09 The Environmental Research Institute Of Michigan Design rule checking using serial neighborhood processors
JPS58201185A (ja) * 1982-05-19 1983-11-22 Toshiba Corp 位置検出装置
DE3267548D1 (en) * 1982-05-28 1986-01-02 Ibm Deutschland Process and device for an automatic optical inspection
GB2129547B (en) * 1982-11-02 1986-05-21 Cambridge Instr Ltd Reticle inspection
GB2129546B (en) * 1982-11-02 1985-09-25 Cambridge Instr Ltd Image comparison
JPS59157505A (ja) * 1983-02-28 1984-09-06 Hitachi Ltd パタ−ン検査装置
US4589140A (en) * 1983-03-21 1986-05-13 Beltronics, Inc. Method of and apparatus for real-time high-speed inspection of objects for identifying or recognizing known and unknown portions thereof, including defects and the like
US4579455A (en) * 1983-05-09 1986-04-01 Kla Instruments Corporation Photomask inspection apparatus and method with improved defect detection
JPS6063405A (ja) * 1983-09-16 1985-04-11 Fujitsu Ltd パタ−ン検査方法及びその装置
DE3406694A1 (de) * 1984-02-24 1985-09-05 Kleindienst GmbH, 8900 Augsburg Verfahren und vorrichtung zum maschinellen lesen von schriftzeichen
US4853967A (en) * 1984-06-29 1989-08-01 International Business Machines Corporation Method for automatic optical inspection analysis of integrated circuits
JPH0616013B2 (ja) * 1984-11-22 1994-03-02 肇産業株式会社 自動検査装置
US4794647A (en) * 1985-04-08 1988-12-27 Northern Telecom Limited Automatic optical inspection system
US4745562A (en) * 1985-08-16 1988-05-17 Schlumberger, Limited Signal processing disparity resolution
DE3604111A1 (de) * 1986-02-10 1987-10-15 Nukem Gmbh Verfahren und vorrichtung zum erkennen von fehlerstellen in einem gegenstand
US4760607A (en) * 1986-07-31 1988-07-26 Machine Vision International Corporation Apparatus and method for implementing transformations in grayscale image processing
US5093797A (en) * 1987-01-13 1992-03-03 Omron Tateisi Electronics Co. Apparatus for inspecting packaged electronic device
US4949390A (en) * 1987-04-16 1990-08-14 Applied Vision Systems, Inc. Interconnect verification using serial neighborhood processors
JPH0782542B2 (ja) * 1988-01-29 1995-09-06 株式会社スキャンテクノロジー 印字検査方法、印字検査装置および印刷物自動振分けシステム
DE3825582A1 (de) * 1988-07-28 1990-02-01 Ralf A Sood Verfahren und anordnung zum erkennen von zeichen und/oder objekten
US5073952A (en) * 1988-09-07 1991-12-17 Sigmax Kabushiki Kaisha Pattern recognition device
IL102659A (en) * 1992-07-27 1997-07-13 Orbot Instr Ltd Apparatus and method for comparing and aligning two digital representations of an image
US5365596A (en) * 1992-12-17 1994-11-15 Philip Morris Incorporated Methods and apparatus for automatic image inspection of continuously moving objects
US5911003A (en) * 1996-04-26 1999-06-08 Pressco Technology Inc. Color pattern evaluation system for randomly oriented articles
US6366690B1 (en) * 1998-07-07 2002-04-02 Applied Materials, Inc. Pixel based machine for patterned wafers
US6888958B1 (en) * 1999-03-30 2005-05-03 Kabushiki Kaisha Toshiba Method and apparatus for inspecting patterns
EP1245118A2 (de) * 1999-12-03 2002-10-02 MTI Film LLC System und verfahren zur identifizierung von unbeständigkeiten in duplizierten digitalen videos
US20030072481A1 (en) * 2001-10-11 2003-04-17 Advanced Micro Devices, Inc. Method for evaluating anomalies in a semiconductor manufacturing process
CN101180549A (zh) * 2005-04-11 2008-05-14 株式会社爱德万测试 电子器件的处理设备
US20070139703A1 (en) * 2005-12-19 2007-06-21 Glory Ltd. Print inspecting apparatus
CN101809454A (zh) * 2007-10-31 2010-08-18 株式会社爱德万测试 检测接触臂的接触部异常的异常检测装置
KR100863700B1 (ko) * 2008-02-18 2008-10-15 에스엔유 프리시젼 주식회사 비전 검사 시스템 및 이것을 이용한 피검사체의 검사 방법
CN110363756A (zh) * 2019-07-18 2019-10-22 佛山市高明金石建材有限公司 一种用于磨头的磨损检测系统及检测方法
CN112669296B (zh) * 2020-12-31 2023-09-26 江苏南高智能装备创新中心有限公司 基于大数据的数控冲床模具的缺陷检测方法、装置及设备

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3492646A (en) * 1965-04-26 1970-01-27 Ibm Cross correlation and decision making apparatus
US3492647A (en) * 1966-12-23 1970-01-27 Ncr Co Optical character reader employing gated amplifiers
USB618016I5 (de) * 1968-11-29
US3576534A (en) * 1969-08-11 1971-04-27 Compuscan Inc Image cross correlator
US3717848A (en) * 1970-06-02 1973-02-20 Recognition Equipment Inc Stored reference code character reader method and system
JPS4934385A (de) * 1972-07-28 1974-03-29
JPS4891935A (de) * 1972-03-08 1973-11-29
JPS5214112B2 (de) * 1973-02-22 1977-04-19
US3930231A (en) * 1974-06-10 1975-12-30 Xicon Data Entry Corp Method and system for optical character recognition
JPS51118333A (en) * 1975-04-11 1976-10-18 Hitachi Ltd Pattern recognition system
US4110737A (en) * 1977-08-22 1978-08-29 The Singer Company Character recognition apparatus for serially comparing an unknown character with a plurality of reference characters
JPS55110904A (en) * 1979-02-20 1980-08-27 Hajime Sangyo Kk Defect detecting device

Also Published As

Publication number Publication date
DE3013833C2 (de) 1986-07-03
US4345312A (en) 1982-08-17
DE3013833A1 (de) 1980-10-16

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Legal Events

Date Code Title Description
A1A A request for search or an international-type search has been filed
BB A search report has been drawn up
A85 Still pending on 85-01-01
BC A request for examination has been filed
BV The patent application has lapsed