NL7804706A - Cryopomp. - Google Patents
Cryopomp.Info
- Publication number
- NL7804706A NL7804706A NL7804706A NL7804706A NL7804706A NL 7804706 A NL7804706 A NL 7804706A NL 7804706 A NL7804706 A NL 7804706A NL 7804706 A NL7804706 A NL 7804706A NL 7804706 A NL7804706 A NL 7804706A
- Authority
- NL
- Netherlands
- Prior art keywords
- cryopump
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH411478A CH628959A5 (en) | 1978-04-18 | 1978-04-18 | Cryopump with a fitted refrigerating machine |
Publications (1)
Publication Number | Publication Date |
---|---|
NL7804706A true NL7804706A (nl) | 1979-10-22 |
Family
ID=4270072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7804706A NL7804706A (nl) | 1978-04-18 | 1978-05-02 | Cryopomp. |
Country Status (3)
Country | Link |
---|---|
CH (1) | CH628959A5 (de) |
DE (1) | DE2912856A1 (de) |
NL (1) | NL7804706A (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4295338A (en) * | 1979-10-18 | 1981-10-20 | Varian Associates, Inc. | Cryogenic pumping apparatus with replaceable pumping surface elements |
US4277951A (en) * | 1980-04-10 | 1981-07-14 | Air Products And Chemicals, Inc. | Cryopumping apparatus |
DE3046458A1 (de) * | 1980-12-10 | 1982-07-15 | Leybold-Heraeus GmbH, 5000 Köln | Refrigerator-kryostat |
DE3232324C2 (de) * | 1982-08-31 | 1986-08-28 | Leybold-Heraeus GmbH, 5000 Köln | Refrigerator-betriebene Kryopumpe |
US4530213A (en) * | 1983-06-28 | 1985-07-23 | Air Products And Chemicals, Inc. | Economical and thermally efficient cryopump panel and panel array |
EP0384922B1 (de) * | 1989-02-28 | 1993-07-14 | Leybold Aktiengesellschaft | Mit einem zweistufigen Refrigerator betriebene Kryopumpe |
US7313922B2 (en) * | 2004-09-24 | 2008-01-01 | Brooks Automation, Inc. | High conductance cryopump for type III gas pumping |
CH703216A1 (de) * | 2010-05-27 | 2011-11-30 | Hsr Ag | Vorrichtung zur Verhinderung des Memory-Effekts bei Kryopumpen. |
-
1978
- 1978-04-18 CH CH411478A patent/CH628959A5/de not_active IP Right Cessation
- 1978-05-02 NL NL7804706A patent/NL7804706A/xx not_active Application Discontinuation
-
1979
- 1979-03-30 DE DE19792912856 patent/DE2912856A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
DE2912856A1 (de) | 1979-10-31 |
CH628959A5 (en) | 1982-03-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A1B | A search report has been drawn up | ||
BC | A request for examination has been filed | ||
DNT | Communications of changes of names of applicants whose applications have been laid open to public inspection |
Free format text: BALZERS AKTIENGESELLSCHAFT |
|
A85 | Still pending on 85-01-01 | ||
BV | The patent application has lapsed |