NL7804706A - Cryopomp. - Google Patents

Cryopomp.

Info

Publication number
NL7804706A
NL7804706A NL7804706A NL7804706A NL7804706A NL 7804706 A NL7804706 A NL 7804706A NL 7804706 A NL7804706 A NL 7804706A NL 7804706 A NL7804706 A NL 7804706A NL 7804706 A NL7804706 A NL 7804706A
Authority
NL
Netherlands
Prior art keywords
cryopump
Prior art date
Application number
NL7804706A
Other languages
English (en)
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Publication of NL7804706A publication Critical patent/NL7804706A/nl

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
NL7804706A 1978-04-18 1978-05-02 Cryopomp. NL7804706A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH411478A CH628959A5 (en) 1978-04-18 1978-04-18 Cryopump with a fitted refrigerating machine

Publications (1)

Publication Number Publication Date
NL7804706A true NL7804706A (nl) 1979-10-22

Family

ID=4270072

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7804706A NL7804706A (nl) 1978-04-18 1978-05-02 Cryopomp.

Country Status (3)

Country Link
CH (1) CH628959A5 (nl)
DE (1) DE2912856A1 (nl)
NL (1) NL7804706A (nl)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4295338A (en) * 1979-10-18 1981-10-20 Varian Associates, Inc. Cryogenic pumping apparatus with replaceable pumping surface elements
US4277951A (en) * 1980-04-10 1981-07-14 Air Products And Chemicals, Inc. Cryopumping apparatus
DE3046458A1 (de) * 1980-12-10 1982-07-15 Leybold-Heraeus GmbH, 5000 Köln Refrigerator-kryostat
DE3232324C2 (de) * 1982-08-31 1986-08-28 Leybold-Heraeus GmbH, 5000 Köln Refrigerator-betriebene Kryopumpe
US4530213A (en) * 1983-06-28 1985-07-23 Air Products And Chemicals, Inc. Economical and thermally efficient cryopump panel and panel array
ATE91531T1 (de) * 1989-02-28 1993-07-15 Leybold Ag Mit einem zweistufigen refrigerator betriebene kryopumpe.
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
CH703216A1 (de) 2010-05-27 2011-11-30 Hsr Ag Vorrichtung zur Verhinderung des Memory-Effekts bei Kryopumpen.

Also Published As

Publication number Publication date
CH628959A5 (en) 1982-03-31
DE2912856A1 (de) 1979-10-31

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Legal Events

Date Code Title Description
A1B A search report has been drawn up
BC A request for examination has been filed
DNT Communications of changes of names of applicants whose applications have been laid open to public inspection

Free format text: BALZERS AKTIENGESELLSCHAFT

A85 Still pending on 85-01-01
BV The patent application has lapsed