NL7800612A - Elektronenstraalverdampingsinrichting voor vacuumopdampinstallaties. - Google Patents

Elektronenstraalverdampingsinrichting voor vacuumopdampinstallaties.

Info

Publication number
NL7800612A
NL7800612A NL7800612A NL7800612A NL7800612A NL 7800612 A NL7800612 A NL 7800612A NL 7800612 A NL7800612 A NL 7800612A NL 7800612 A NL7800612 A NL 7800612A NL 7800612 A NL7800612 A NL 7800612A
Authority
NL
Netherlands
Prior art keywords
vaporization
installations
vacuum
electronic
vaporization device
Prior art date
Application number
NL7800612A
Other languages
English (en)
Dutch (nl)
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Publication of NL7800612A publication Critical patent/NL7800612A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/023—Means for mechanically adjusting components not otherwise provided for
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S159/00—Concentrating evaporators
    • Y10S159/26—Electric field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
NL7800612A 1977-11-22 1978-01-18 Elektronenstraalverdampingsinrichting voor vacuumopdampinstallaties. NL7800612A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1423577A CH624435A5 (it) 1977-11-22 1977-11-22

Publications (1)

Publication Number Publication Date
NL7800612A true NL7800612A (nl) 1979-05-25

Family

ID=4399104

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7800612A NL7800612A (nl) 1977-11-22 1978-01-18 Elektronenstraalverdampingsinrichting voor vacuumopdampinstallaties.

Country Status (8)

Country Link
US (1) US4221629A (it)
JP (1) JPS5499562A (it)
CH (1) CH624435A5 (it)
DE (1) DE2849933C2 (it)
FR (1) FR2409596A1 (it)
GB (1) GB2008849B (it)
IT (1) IT1101171B (it)
NL (1) NL7800612A (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH663037A5 (de) * 1985-02-05 1987-11-13 Balzers Hochvakuum Dampfquelle fuer vakuumbeschichtungsanlagen.
US20050020368A1 (en) * 1998-04-15 2005-01-27 Burkholder Roy A. Bowling lane advertising and method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE553562A (it) * 1955-12-20 1900-01-01
US3202794A (en) * 1963-02-18 1965-08-24 Thermionics Lab Inc Permanent magnet transverse electron beam evaporation source
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3389210A (en) * 1965-03-29 1968-06-18 Everette M. Whitson Multiple crucible for a permanent magnet transverse electron beam evaporation source
DE1521252B2 (de) * 1966-05-03 1969-10-30 Farbenfabriken Bayer Aktiengesellschaft, 5090 Leverkusen Vorrichtung zum Verdampfen von hochschmelzenden Materialien wie Quarz od. dgl., insbesondere zum Aufdampfen von Schichten
BE754553A (fr) * 1969-08-13 1971-01-18 Leybold Heraeus Verwaltung Procede et dispositif d'evaporation sous vide de corps non metalliques a point de fusion eleve
US3582529A (en) * 1969-09-24 1971-06-01 Air Reduction Electron beam heating apparatus and control system therein
GB1340701A (en) * 1971-04-19 1973-12-12 Craswell K B Apparatus for use in coating a body with an evaporant

Also Published As

Publication number Publication date
GB2008849A (en) 1979-06-06
US4221629A (en) 1980-09-09
FR2409596A1 (fr) 1979-06-15
FR2409596B1 (it) 1983-12-09
DE2849933C2 (de) 1983-01-20
JPS5499562A (en) 1979-08-06
GB2008849B (en) 1982-03-10
CH624435A5 (it) 1981-07-31
IT1101171B (it) 1985-09-28
DE2849933A1 (de) 1979-05-23
IT7829838A0 (it) 1978-11-16

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Legal Events

Date Code Title Description
A1B A search report has been drawn up
A85 Still pending on 85-01-01
BC A request for examination has been filed
BV The patent application has lapsed