NL7703610A - Automatische scherpstellingsinrichting. - Google Patents

Automatische scherpstellingsinrichting.

Info

Publication number
NL7703610A
NL7703610A NL7703610A NL7703610A NL7703610A NL 7703610 A NL7703610 A NL 7703610A NL 7703610 A NL7703610 A NL 7703610A NL 7703610 A NL7703610 A NL 7703610A NL 7703610 A NL7703610 A NL 7703610A
Authority
NL
Netherlands
Prior art keywords
automatic focus
focus device
automatic
focus
Prior art date
Application number
NL7703610A
Other languages
English (en)
Other versions
NL170462B (nl
NL170462C (nl
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of NL7703610A publication Critical patent/NL7703610A/nl
Publication of NL170462B publication Critical patent/NL170462B/nl
Application granted granted Critical
Publication of NL170462C publication Critical patent/NL170462C/nl

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/09—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B7/0908—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only
    • G11B7/0914—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only by non-optical methods, e.g. capacitive
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Automatic Focus Adjustment (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Focusing (AREA)
  • Variable Magnification In Projection-Type Copying Machines (AREA)
  • Microscoopes, Condenser (AREA)
NLAANVRAGE7703610,A 1976-04-02 1977-04-01 Optische inrichting met automatische scherptehandhaving. NL170462C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3600276A JPS52119927A (en) 1976-04-02 1976-04-02 Device for automatic focus control

Publications (3)

Publication Number Publication Date
NL7703610A true NL7703610A (nl) 1977-10-04
NL170462B NL170462B (nl) 1982-06-01
NL170462C NL170462C (nl) 1982-11-01

Family

ID=12457566

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7703610,A NL170462C (nl) 1976-04-02 1977-04-01 Optische inrichting met automatische scherptehandhaving.

Country Status (3)

Country Link
US (1) US4153341A (nl)
JP (1) JPS52119927A (nl)
NL (1) NL170462C (nl)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853523Y2 (ja) * 1979-11-06 1983-12-06 オリンパス光学工業株式会社 顕微鏡の自動焦点装置
US4344160A (en) * 1980-05-02 1982-08-10 The Perkin-Elmer Corporation Automatic wafer focusing and flattening system
JPS5885338U (ja) * 1981-12-07 1983-06-09 株式会社日立製作所 自動焦点装置
US4594702A (en) * 1982-11-12 1986-06-10 Discovision Associates Fluid bearing for axially movable head
US5012463A (en) * 1988-03-14 1991-04-30 Bernoulli Optical Systems Company Optical read/write storage system for flexible media having bernoulli stabilization at the optical head
JPH02185602A (ja) * 1989-01-11 1990-07-20 Mitsubishi Heavy Ind Ltd 動翼先端すき間計測装置
JP2006113414A (ja) * 2004-10-18 2006-04-27 Canon Inc 光学素子保持装置、鏡筒、露光装置及びマイクロデバイスの製造方法
US7242454B1 (en) * 2005-12-28 2007-07-10 Asml Netherlands B.V. Lithographic apparatus, and apparatus and method for measuring an object position in a medium
CN102231051A (zh) * 2011-05-20 2011-11-02 合肥芯硕半导体有限公司 一种光刻机气动自动对焦装置及对焦方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1472298A1 (de) * 1966-09-29 1969-03-13 Leitz Ernst Gmbh Anordnung zur Fuehrung des Objektivs eines optischen Geraetes
CH461149A (de) * 1967-05-09 1968-08-15 Conradi G Ag Einrichtung an einer Zeichenmaschine oder einem Koordinatographen zur mindestens angenähert fehlerfreien Auftragung von Punkten, Linien und Symbolen auf eine zur Führungsebene des Arbeitswagens nicht parallele und/oder nicht plane photographische Schicht
US3704657A (en) * 1971-05-05 1972-12-05 Computervision Corp Adaptive optical focusing system
US3984678A (en) * 1974-04-05 1976-10-05 Nippon Jido Seigyo Ltd. Apparatus for automatically adjusting a microscope in focus
JPS54182B2 (nl) * 1974-04-05 1979-01-08

Also Published As

Publication number Publication date
NL170462B (nl) 1982-06-01
JPS52119927A (en) 1977-10-07
US4153341A (en) 1979-05-08
NL170462C (nl) 1982-11-01
JPS5634844B2 (nl) 1981-08-13

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Legal Events

Date Code Title Description
V4 Discontinued because of reaching the maximum lifetime of a patent

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