NL7611919A - Werkwijze ter vervaardiging van weerstandspatro- nen en ter vervaardiging van ionenabsorberende maskers die daarbij gebruikt kunnen worden. - Google Patents

Werkwijze ter vervaardiging van weerstandspatro- nen en ter vervaardiging van ionenabsorberende maskers die daarbij gebruikt kunnen worden.

Info

Publication number
NL7611919A
NL7611919A NL7611919A NL7611919A NL7611919A NL 7611919 A NL7611919 A NL 7611919A NL 7611919 A NL7611919 A NL 7611919A NL 7611919 A NL7611919 A NL 7611919A NL 7611919 A NL7611919 A NL 7611919A
Authority
NL
Netherlands
Prior art keywords
manufacture
procedure
resistance patterns
ion absorbent
masks
Prior art date
Application number
NL7611919A
Other languages
English (en)
Other versions
NL170189C (nl
NL170189B (nl
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of NL7611919A publication Critical patent/NL7611919A/nl
Publication of NL170189B publication Critical patent/NL170189B/nl
Application granted granted Critical
Publication of NL170189C publication Critical patent/NL170189C/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electron Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
NLAANVRAGE7611919,A 1975-10-28 1976-10-27 Werkwijze voor het volgens een vooraf bepaald patroon bestralen van een op een substraat aangebrachte voor de straling gevoelige polymeerlaag. NL170189C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US62642575A 1975-10-28 1975-10-28

Publications (3)

Publication Number Publication Date
NL7611919A true NL7611919A (nl) 1977-05-02
NL170189B NL170189B (nl) 1982-05-03
NL170189C NL170189C (nl) 1982-10-01

Family

ID=24510336

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7611919,A NL170189C (nl) 1975-10-28 1976-10-27 Werkwijze voor het volgens een vooraf bepaald patroon bestralen van een op een substraat aangebrachte voor de straling gevoelige polymeerlaag.

Country Status (7)

Country Link
US (1) US4101782A (nl)
JP (1) JPS5255382A (nl)
CH (1) CH621890A5 (nl)
DE (1) DE2643811C2 (nl)
FR (1) FR2330036A1 (nl)
GB (1) GB1554420A (nl)
NL (1) NL170189C (nl)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4383026A (en) * 1979-05-31 1983-05-10 Bell Telephone Laboratories, Incorporated Accelerated particle lithographic processing and articles so produced
AT371947B (de) * 1979-12-27 1983-08-10 Rudolf Sacher Ges M B H Freitragende maske, verfahren zur herstellung derselben und verfahren zum maskieren von substraten
AT383438B (de) * 1981-12-04 1987-07-10 Rudolf Sacher Ges M B H Freitragende maske
JPS58207988A (ja) * 1982-05-28 1983-12-03 日本鋼管株式会社 水圧試験機のパイプ洗浄装置
AT382040B (de) * 1983-03-01 1986-12-29 Guenther Stangl Verfahren zur herstellung von optisch strukturierten filtern fuer elektromagnetische strahlung und optisch strukturierter filter
US5112707A (en) * 1983-09-26 1992-05-12 Canon Kabushiki Kaisha Mask structure for lithography
DE3435177A1 (de) * 1983-09-26 1985-04-11 Canon K.K., Tokio/Tokyo Maske fuer lithographische zwecke
IL88837A (en) * 1988-12-30 1993-08-18 Technion Res & Dev Foundation Method for the preparation of mask for x-ray lithography
US5567551A (en) * 1994-04-04 1996-10-22 The United States Of America As Represented By The Secretary Of The Navy Method for preparation of mask for ion beam lithography
DE10230532B4 (de) * 2002-07-05 2007-03-08 Infineon Technologies Ag Verfahren zum Bestimmen des Aufbaus einer Maske zum Mikrostrukturieren von Halbleitersubstraten mittels Fotolithographie
US8105499B2 (en) * 2008-07-14 2012-01-31 International Business Macines Corporation Transmission electron microscopy sample etching fixture

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3529960A (en) * 1967-01-24 1970-09-22 Hilbert Sloan Methods of treating resist coatings
US3659510A (en) * 1969-05-01 1972-05-02 Hughes Aircraft Co Apparatus and method utilizable in forming metal grids
US3815978A (en) * 1972-06-20 1974-06-11 Ibm Durable see-through photoresist mask
US3742230A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask support substrate
US3873824A (en) * 1973-10-01 1975-03-25 Texas Instruments Inc X-ray lithography mask
JPS5086336A (nl) * 1973-11-29 1975-07-11
JPS521634A (en) * 1975-06-24 1977-01-07 Nippon Furnace Kogyo Kaisha Ltd Valve for fuel supply pipe

Also Published As

Publication number Publication date
JPS5255382A (en) 1977-05-06
NL170189C (nl) 1982-10-01
JPS5428267B2 (nl) 1979-09-14
CH621890A5 (nl) 1981-02-27
NL170189B (nl) 1982-05-03
DE2643811A1 (de) 1977-05-05
FR2330036B1 (nl) 1980-05-09
GB1554420A (en) 1979-10-17
FR2330036A1 (fr) 1977-05-27
DE2643811C2 (de) 1981-10-15
US4101782A (en) 1978-07-18

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Legal Events

Date Code Title Description
BC A request for examination has been filed
V1 Lapsed because of non-payment of the annual fee