NL7408601A - - Google Patents

Info

Publication number
NL7408601A
NL7408601A NL7408601A NL7408601A NL7408601A NL 7408601 A NL7408601 A NL 7408601A NL 7408601 A NL7408601 A NL 7408601A NL 7408601 A NL7408601 A NL 7408601A NL 7408601 A NL7408601 A NL 7408601A
Authority
NL
Netherlands
Application number
NL7408601A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7408601A publication Critical patent/NL7408601A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL7408601A 1973-06-28 1974-06-26 NL7408601A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3076473A GB1420803A (en) 1973-06-28 1973-06-28 Electron microscopes

Publications (1)

Publication Number Publication Date
NL7408601A true NL7408601A (enrdf_load_stackoverflow) 1974-12-31

Family

ID=10312780

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7408601A NL7408601A (enrdf_load_stackoverflow) 1973-06-28 1974-06-26

Country Status (5)

Country Link
US (1) US3924126A (enrdf_load_stackoverflow)
JP (1) JPS5034462A (enrdf_load_stackoverflow)
DE (1) DE2430696A1 (enrdf_load_stackoverflow)
GB (1) GB1420803A (enrdf_load_stackoverflow)
NL (1) NL7408601A (enrdf_load_stackoverflow)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2541915A1 (de) * 1975-09-19 1977-03-31 Max Planck Gesellschaft Korpuskularstrahlenmikroskop mit ringzonensegmentabbildung
GB1594465A (en) * 1977-03-23 1981-07-30 Nat Res Dev Electron beam apparatus
US4475044A (en) * 1979-04-23 1984-10-02 Hitachi, Ltd. Apparatus for focus-deflecting a charged particle beam
JPS57118357A (en) * 1981-01-14 1982-07-23 Jeol Ltd Objective lens for scan type electron microscope
NL8100449A (nl) * 1981-01-30 1982-08-16 Philips Nv Elektronenmikroskoop met roentgendetektor.
JPS58161235A (ja) * 1982-03-19 1983-09-24 Internatl Precision Inc 走査型電子線装置
JPS60220541A (ja) * 1984-04-17 1985-11-05 Jeol Ltd 透過電子顕微鏡
JP2582114B2 (ja) * 1988-04-01 1997-02-19 日本電子株式会社 電子顕微鏡におけるｘ線分析装置
DE3825103A1 (de) * 1988-07-23 1990-01-25 Zeiss Carl Fa Verfahren zum beleuchten eines objektes in einem transmissions-elektronenmikroskop
US5079428A (en) * 1989-08-31 1992-01-07 Bell Communications Research, Inc. Electron microscope with an asymmetrical immersion lens
JP2744823B2 (ja) * 1989-11-16 1998-04-28 日本電子株式会社 電子レンズ
US4962306A (en) * 1989-12-04 1990-10-09 Intenational Business Machines Corporation Magnetically filtered low loss scanning electron microscopy
ATE545147T1 (de) * 2005-09-06 2012-02-15 Zeiss Carl Smt Gmbh Untersuchungsverfahren und system für geladene teilchen
TWI275118B (en) * 2005-12-09 2007-03-01 Li Bing Huan Sample box of electron microscope for observing a general sample/live cell
US8080791B2 (en) * 2008-12-12 2011-12-20 Fei Company X-ray detector for electron microscope
US8314386B2 (en) * 2010-03-26 2012-11-20 Uchicago Argonne, Llc High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes
DE102010056321B9 (de) * 2010-12-27 2018-03-22 Carl Zeiss Microscopy Gmbh Partikelstrahlmikroskop
US9520263B2 (en) * 2013-02-11 2016-12-13 Novaray Medical Inc. Method and apparatus for generation of a uniform-profile particle beam

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2323328A (en) * 1940-10-31 1943-07-06 Rca Corp Projection lens for electron microscopes
US2418349A (en) * 1945-12-13 1947-04-01 Rca Corp Method of and means for correcting for distortion in electron lens systems
DE1614126B1 (de) * 1967-02-27 1970-11-19 Max Planck Gesellschaft Korpuskularstrahlmikroskop,insbesondere Elektronenmikroskop,mit einer durch das Vorfeld einer Objektivlinse gebildeten Kondensorlinse und einer Bereichsblende
US3514600A (en) * 1967-11-20 1970-05-26 Parke Davis & Co Flexible conduit means for connecting an electron microscope to a vacuum pump
JPS5213713B2 (enrdf_load_stackoverflow) * 1971-12-15 1977-04-16

Also Published As

Publication number Publication date
GB1420803A (en) 1976-01-14
US3924126A (en) 1975-12-02
JPS5034462A (enrdf_load_stackoverflow) 1975-04-02
DE2430696A1 (de) 1975-01-16

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Legal Events

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