US4056975A
(en)
*
|
1976-02-09 |
1977-11-08 |
Tylan Corporation |
Mass flow sensor system
|
US4276243A
(en)
*
|
1978-12-08 |
1981-06-30 |
Western Electric Company, Inc. |
Vapor delivery control system and method
|
US4306453A
(en)
*
|
1979-01-04 |
1981-12-22 |
Wolfshoerndl Egon |
Apparatuses for measuring the flow rate of a flowing medium
|
US4220460A
(en)
*
|
1979-02-05 |
1980-09-02 |
Western Electric Company, Inc. |
Vapor delivery system and method
|
US4314837A
(en)
*
|
1979-03-01 |
1982-02-09 |
Corning Glass Works |
Reactant delivery system method
|
US4440021A
(en)
*
|
1980-07-29 |
1984-04-03 |
Abouchar John W |
Mass flow meter with reduced attitude sensitivity
|
US4658855A
(en)
*
|
1980-10-03 |
1987-04-21 |
Silicon Valley Group |
Mass flow controller
|
CH649843A5
(de)
*
|
1981-04-08 |
1985-06-14 |
Landis & Gyr Ag |
Anordnung zur waermemengenmessung an den einzelnen heizgruppen einer gemeinsamen heizzentrale.
|
US4696188A
(en)
*
|
1981-10-09 |
1987-09-29 |
Honeywell Inc. |
Semiconductor device microstructure
|
US4519246A
(en)
*
|
1981-12-21 |
1985-05-28 |
Advanced Semiconductor Materials International, N.V. |
Improved flow meter
|
US4464932A
(en)
*
|
1982-07-12 |
1984-08-14 |
Mks Instruments, Inc. |
Thermal mass flowmetering
|
US4487213A
(en)
*
|
1982-09-09 |
1984-12-11 |
Omicron Technology Corporation |
Mass flow controller apparatus
|
JPS5988622A
(ja)
*
|
1982-11-12 |
1984-05-22 |
Ohkura Electric Co Ltd |
熱式質量流量計
|
US4487062A
(en)
*
|
1983-03-30 |
1984-12-11 |
Sierra Instruments, Inc. |
Mass flowmeter
|
US4522058A
(en)
*
|
1983-06-15 |
1985-06-11 |
Mks Instruments, Inc. |
Laminar-flow channeling in thermal flowmeters and the like
|
JPS6013220A
(ja)
*
|
1983-07-04 |
1985-01-23 |
Esutetsuku:Kk |
ガス流量センサ−及びその製造方法
|
US4548075A
(en)
*
|
1984-02-02 |
1985-10-22 |
Dresser Industries, Inc. |
Fast responsive flowmeter transducer
|
US4648270A
(en)
*
|
1984-02-22 |
1987-03-10 |
Sirris Flow Technology, Inc. |
Mass flowmeter
|
US5191793A
(en)
*
|
1984-03-12 |
1993-03-09 |
Tylan Corporation |
Fluid mass flow meter device with reduced attitude sensitivity
|
US4672997A
(en)
*
|
1984-10-29 |
1987-06-16 |
Btu Engineering Corporation |
Modular, self-diagnostic mass-flow controller and system
|
JPS61182821U
(de)
*
|
1986-05-01 |
1986-11-14 |
|
|
US4762010A
(en)
*
|
1987-04-02 |
1988-08-09 |
Mobil Oil Corporation |
Apparatus and method for adsorption and desorption studies, particularly for characterization of catalysts
|
JP2814379B2
(ja)
*
|
1988-06-20 |
1998-10-22 |
忠弘 大見 |
マスフローコントローラ
|
DE3842579A1
(de)
*
|
1988-12-17 |
1990-06-28 |
Holstein & Kappert Maschf |
Fuellmaschine zum abfuellen von fluessigkeiten in gefaesse
|
DE3842578A1
(de)
*
|
1988-12-17 |
1990-06-21 |
Holstein & Kappert Maschf |
Fuellmaschine zum abfuellen von fluessigkeiten in gefaesse
|
JPH02138827A
(ja)
*
|
1989-04-22 |
1990-05-28 |
Stec Kk |
マスフロー流量計
|
US5216918A
(en)
*
|
1990-01-18 |
1993-06-08 |
Integrated Control Concepts, Inc. |
Fluid mass flow detecting
|
DE4219551C2
(de)
*
|
1991-06-13 |
1996-04-18 |
Mks Japan Inc |
Massenströmungssensor
|
JP2666163B2
(ja)
*
|
1991-12-04 |
1997-10-22 |
山武ハネウエル株式会社 |
流速センサの温度特性補正方法
|
US5311762A
(en)
*
|
1991-12-16 |
1994-05-17 |
Dxl Usa |
Flow sensor calibration
|
JPH05215583A
(ja)
*
|
1992-02-04 |
1993-08-24 |
Mitsubishi Electric Corp |
感熱式流量センサ
|
US5576498A
(en)
*
|
1995-11-01 |
1996-11-19 |
The Rosaen Company |
Laminar flow element for a flowmeter
|
US5763791A
(en)
*
|
1995-11-01 |
1998-06-09 |
The Rosaen Company |
Flowmeter
|
US5804717A
(en)
*
|
1996-04-05 |
1998-09-08 |
Mks Instruments, Inc. |
Mass flow transducer having extended flow rate measurement range
|
US5792952A
(en)
*
|
1996-05-23 |
1998-08-11 |
Varian Associates, Inc. |
Fluid thermal mass flow sensor
|
US5693880A
(en)
*
|
1996-06-14 |
1997-12-02 |
Mks Instruments, Inc. |
Heater with tapered heater density function for use with mass flowmeter
|
US5763774A
(en)
*
|
1996-08-01 |
1998-06-09 |
Millipore Corporation |
Fluid flow meter with reduced orientation sensitivity
|
EP0927875B1
(de)
*
|
1997-12-30 |
2002-08-14 |
Qualiflow S.A. |
Verfahren zu Herstellung von einem Sensor für einen thermischen Massendurchflussmesser
|
US6269692B1
(en)
*
|
1999-02-01 |
2001-08-07 |
Dxl Usa Inc. |
Mass flow measuring assembly having low pressure drop and fast response time
|
US6677517B2
(en)
*
|
2001-05-15 |
2004-01-13 |
William J. Fowler |
Lightning suppression system for power lines
|
US6668641B2
(en)
|
2001-12-21 |
2003-12-30 |
Mks Instruments, Inc. |
Apparatus and method for thermal dissipation in a thermal mass flow sensor
|
US6668642B2
(en)
|
2001-12-21 |
2003-12-30 |
Mks Instruments, Inc. |
Apparatus and method for thermal isolation of thermal mass flow sensor
|
US6779394B2
(en)
|
2001-12-21 |
2004-08-24 |
Mks Instruments, Inc. |
Apparatus and method for thermal management of a mass flow controller
|
US7000465B1
(en)
|
2004-09-17 |
2006-02-21 |
Mks Instruments, Inc. |
Attitude error self-correction for thermal sensors of mass flow meters and controllers
|
US7107834B2
(en)
*
|
2004-11-12 |
2006-09-19 |
Mks Instruments, Inc. |
Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effects
|
US20060203886A1
(en)
*
|
2005-03-10 |
2006-09-14 |
Aai Corporation |
Simplified thermal isolator for temperature sensor
|
US20070084280A1
(en)
*
|
2005-08-26 |
2007-04-19 |
Gill Rajinder S |
Semi-constant temperature excitation method for fluid flow sensors
|
US7467027B2
(en)
*
|
2006-01-26 |
2008-12-16 |
Mks Instruments, Inc. |
Compensation for thermal siphoning in mass flow controllers
|
US7469583B2
(en)
*
|
2007-02-21 |
2008-12-30 |
Mks Japan, Inc. |
Flow sensor
|
US7874208B2
(en)
*
|
2007-10-10 |
2011-01-25 |
Brooks Instrument, Llc |
System for and method of providing a wide-range flow controller
|
DE102007062977B4
(de)
|
2007-12-21 |
2018-07-19 |
Schott Ag |
Verfahren zur Herstellung von Prozessgasen für die Dampfphasenabscheidung
|
US8316695B2
(en)
*
|
2009-05-08 |
2012-11-27 |
Delaware Capital Formation, Inc. |
Line leak detector and method of using same
|
US8850872B2
(en)
|
2009-05-08 |
2014-10-07 |
Opw Fuel Management Systems, Inc. |
Line leak detector and method of using same
|
NL2011975C2
(nl)
*
|
2013-12-17 |
2015-06-18 |
Berkin Bv |
Stromingsmeetapparaat van het thermische type.
|
GB2533936B
(en)
|
2015-01-07 |
2017-10-25 |
Homeserve Plc |
Flow detection device
|
GB201501935D0
(en)
|
2015-02-05 |
2015-03-25 |
Tooms Moore Consulting Ltd And Trow Consulting Ltd |
Water flow analysis
|
US10845226B2
(en)
*
|
2017-04-21 |
2020-11-24 |
Trane International Inc. |
Adhesive flow meter
|
US11262226B2
(en)
|
2020-02-17 |
2022-03-01 |
GWU Design |
Hybrid mass flow sensor including a thermal and coriolis principle measurement arrangements
|