NL7301953A - - Google Patents

Info

Publication number
NL7301953A
NL7301953A NL7301953A NL7301953A NL7301953A NL 7301953 A NL7301953 A NL 7301953A NL 7301953 A NL7301953 A NL 7301953A NL 7301953 A NL7301953 A NL 7301953A NL 7301953 A NL7301953 A NL 7301953A
Authority
NL
Netherlands
Application number
NL7301953A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7301953A publication Critical patent/NL7301953A/xx

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6704Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6706Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing leakage current 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6758Thin-film transistors [TFT] characterised by the insulating substrates
    • H10D30/6759Silicon-on-sapphire [SOS] substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01Manufacture or treatment
    • H10D86/03Manufacture or treatment wherein the substrate comprises sapphire, e.g. silicon-on-sapphire [SOS]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/053Field effect transistors fets
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/909Controlled atmosphere
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/91Controlling charging state at semiconductor-insulator interface
NL7301953A 1972-02-21 1973-02-12 NL7301953A (cs)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2208083A DE2208083A1 (de) 1972-02-21 1972-02-21 Verfahren zur herstellung von p-kanalfeldeffekt-transistoren

Publications (1)

Publication Number Publication Date
NL7301953A true NL7301953A (cs) 1973-08-23

Family

ID=5836606

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7301953A NL7301953A (cs) 1972-02-21 1973-02-12

Country Status (13)

Country Link
US (1) US3885993A (cs)
JP (1) JPS4897482A (cs)
AT (1) AT339373B (cs)
BE (1) BE795737A (cs)
CA (1) CA980015A (cs)
CH (1) CH557090A (cs)
DE (1) DE2208083A1 (cs)
FR (1) FR2173036B1 (cs)
GB (1) GB1377030A (cs)
IT (1) IT979276B (cs)
LU (1) LU67059A1 (cs)
NL (1) NL7301953A (cs)
SE (1) SE382889B (cs)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4091527A (en) * 1977-03-07 1978-05-30 Rca Corporation Method for adjusting the leakage current of silicon-on-sapphire insulated gate field effect transistors
DE3028718C2 (de) * 1979-07-31 1982-08-19 Sharp K.K., Osaka Dünnfilmtransistor in Verbindung mit einer Anzeigevorrichtung
EP0051940B1 (en) * 1980-11-06 1985-05-02 National Research Development Corporation Annealing process for a thin-film semiconductor device and obtained devices
US4525221A (en) * 1984-05-16 1985-06-25 Rca Corporation Alloying of aluminum metallization
JP3516596B2 (ja) 1998-10-19 2004-04-05 松下電器産業株式会社 半導体装置の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1544261C3 (de) * 1965-03-30 1975-12-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum epitaktischen Abscheiden einer einkristallinen Schicht eines nach dem Diamant- oder nach Zinkblendegitter kristallisierenden Halbleitermaterials
US3413145A (en) * 1965-11-29 1968-11-26 Rca Corp Method of forming a crystalline semiconductor layer on an alumina substrate
FR1493348A (fr) * 1965-12-27 1967-08-25 Rca Corp Dispositif semi-conducteur métla-oxyde

Also Published As

Publication number Publication date
SE382889B (sv) 1976-02-16
JPS4897482A (cs) 1973-12-12
BE795737A (fr) 1973-06-18
FR2173036A1 (cs) 1973-10-05
AT339373B (de) 1977-10-10
GB1377030A (en) 1974-12-11
IT979276B (it) 1974-09-30
CH557090A (de) 1974-12-13
LU67059A1 (cs) 1973-04-19
DE2208083A1 (de) 1973-08-30
ATA1039872A (de) 1977-02-15
CA980015A (en) 1975-12-16
US3885993A (en) 1975-05-27
FR2173036B1 (cs) 1978-10-20

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