NL7215491A - - Google Patents

Info

Publication number
NL7215491A
NL7215491A NL7215491A NL7215491A NL7215491A NL 7215491 A NL7215491 A NL 7215491A NL 7215491 A NL7215491 A NL 7215491A NL 7215491 A NL7215491 A NL 7215491A NL 7215491 A NL7215491 A NL 7215491A
Authority
NL
Netherlands
Application number
NL7215491A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7215491A publication Critical patent/NL7215491A/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/08—Rigid support of bearing units; Housings, e.g. caps, covers for spindles
    • F16C35/10—Rigid support of bearing units; Housings, e.g. caps, covers for spindles with sliding-contact bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
NL7215491A 1971-11-16 1972-11-16 NL7215491A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7140995A FR2161180A5 (enrdf_load_stackoverflow) 1971-11-16 1971-11-16

Publications (1)

Publication Number Publication Date
NL7215491A true NL7215491A (enrdf_load_stackoverflow) 1973-05-18

Family

ID=9085846

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7215491A NL7215491A (enrdf_load_stackoverflow) 1971-11-16 1972-11-16

Country Status (8)

Country Link
US (1) US3832084A (enrdf_load_stackoverflow)
BE (1) BE790969A (enrdf_load_stackoverflow)
CH (1) CH564691A5 (enrdf_load_stackoverflow)
DE (1) DE2255618C2 (enrdf_load_stackoverflow)
FR (1) FR2161180A5 (enrdf_load_stackoverflow)
GB (1) GB1359920A (enrdf_load_stackoverflow)
IT (1) IT970919B (enrdf_load_stackoverflow)
NL (1) NL7215491A (enrdf_load_stackoverflow)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (enrdf_load_stackoverflow) * 1973-03-30 1974-10-25 Cit Alcatel
DE2359456A1 (de) * 1973-11-29 1975-06-05 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit gasgelagertem rotor
DE2512828C3 (de) * 1975-03-22 1978-11-16 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Turbomolekularpumpe
FR2446934A1 (fr) * 1979-01-19 1980-08-14 Cit Alcatel Pompe rotative a vide eleve
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
FR2521650A1 (fr) * 1982-02-16 1983-08-19 Cit Alcatel Pompe rotative a vide eleve
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
FR2567208B1 (fr) * 1984-07-05 1988-12-09 Cit Alcatel Pompe rotative a vide eleve
DE3600124A1 (de) * 1986-01-04 1987-07-16 Fortuna Werke Maschf Ag Geblaese zum umwaelzen grosser gasmengen, insbesondere fuer hochleistungs-laser
DE3705912A1 (de) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh Hochvakuumpumpe mit einem glockenfoermigen rotor
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
GB2232205B (en) * 1987-12-25 1991-11-13 Sholokhov Valery B Molecular vacuum pump
FI894157A0 (fi) * 1988-01-05 1989-09-04 Demikhov Konstantin E Molekylvakuumpump.
WO1989008192A1 (fr) * 1988-02-26 1989-09-08 Nikolai Mikhailovich Novikov Pompe a vide turbomoleculaire
DE3891280T1 (de) * 1988-03-30 1990-04-05 Vladimir Pavlovic Sergeev Turbomolekular-vakuumpumpe
US5049168A (en) * 1988-09-12 1991-09-17 Philip Danielson Helium leak detection method and system
US6318093B2 (en) * 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
US6022195A (en) * 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
US6902378B2 (en) * 1993-07-16 2005-06-07 Helix Technology Corporation Electronically controlled vacuum pump
RU2105905C1 (ru) * 1995-07-05 1998-02-27 Центральный научно-исследовательский институт "Дельфин" Комбинированный турбомолекулярный насос
AU9797298A (en) * 1997-10-21 1999-05-10 Multilevel Metals, Inc. Gas bearing turbo pump and gas bearing feedthrough
DE19915983A1 (de) 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
GB0208556D0 (en) * 2002-04-12 2002-05-22 Advanced Fluid Systems Ltd Magnetic seal and bearing arrangement
ATE362589T1 (de) * 2004-01-29 2007-06-15 Pfeiffer Vacuum Gmbh Gasreibungspumpe
GB2467168B (en) * 2009-01-26 2011-03-16 Air Bearings Ltd Gas bearing and method of manufacturing the same
DE102010001538A1 (de) 2010-02-03 2011-08-04 Trumpf Maschinen Ag Gaslaser mit Radial- und Axialgaslager
DE102010021015A1 (de) 2010-05-19 2011-11-24 O3-innovation Ursula Bürger e.Kfr. Wärmepumpe mit gewendelten Kolben gleichen Profilquerschnitts für die Erzeugung von Kälte und Wärme
CN103016531B (zh) * 2012-12-31 2015-02-25 浙江工业大学 无摩擦旋转供气气浮装置
JP6287475B2 (ja) * 2014-03-28 2018-03-07 株式会社島津製作所 真空ポンプ
JP2020186687A (ja) * 2019-05-15 2020-11-19 エドワーズ株式会社 真空ポンプとそのネジ溝ポンプ部の固定部品
CN112302990A (zh) * 2019-07-30 2021-02-02 青岛海尔智能技术研发有限公司 静压轴承供气系统、制冷设备
CN111692340B (zh) * 2020-06-12 2022-03-22 东台市岳东橡胶密封件厂 一种内藏浮动式伸缩密封件

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE1023679B (de) * 1956-06-08 1958-01-30 Messerschmitt Boelkow Blohm Vorrichtung zum Regeln von Kennfeldern mit aehnlichen bzw. praktisch aehnlichen Niveaulinien
FR1203718A (fr) * 1958-03-28 1960-01-20 Jansen Gmbh Th Dépoussiéreur à brosses
FR1284111A (fr) * 1961-01-23 1962-02-09 Bristol Siddeley Engines Ltd Perfectionnements aux compresseurs
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
FR81075E (fr) * 1962-01-23 1963-07-26 Snecma Pompe à vide turbomoléculaire perfectionnée
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
US3999827A (en) * 1975-10-10 1976-12-28 Burroughs Corporation Electrical connector for semiconductor device package

Also Published As

Publication number Publication date
GB1359920A (en) 1974-07-17
IT970919B (it) 1974-04-20
DE2255618A1 (de) 1973-05-24
DE2255618C2 (de) 1982-12-23
FR2161180A5 (enrdf_load_stackoverflow) 1973-07-06
CH564691A5 (enrdf_load_stackoverflow) 1975-07-31
US3832084A (en) 1974-08-27
BE790969A (fr) 1973-05-07

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Legal Events

Date Code Title Description
BB A search report has been drawn up
BC A request for examination has been filed
BV The patent application has lapsed