NL7211495A - - Google Patents
Info
- Publication number
- NL7211495A NL7211495A NL7211495A NL7211495A NL7211495A NL 7211495 A NL7211495 A NL 7211495A NL 7211495 A NL7211495 A NL 7211495A NL 7211495 A NL7211495 A NL 7211495A NL 7211495 A NL7211495 A NL 7211495A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Details Of Measuring And Other Instruments (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46064441A JPS4830860A (https=) | 1971-08-25 | 1971-08-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7211495A true NL7211495A (https=) | 1973-02-27 |
Family
ID=13258355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7211495A NL7211495A (https=) | 1971-08-25 | 1972-08-23 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US3745341A (https=) |
| JP (1) | JPS4830860A (https=) |
| NL (1) | NL7211495A (https=) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2542360C2 (de) * | 1975-09-19 | 1977-11-17 | Siemens AG, 1000 Berlin und 8000 München | Korpuskularstrahlgerät mit einem Goniometer |
| DE2825417C2 (de) * | 1978-06-09 | 1980-08-07 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen | Verfahren und Objekteinstellvorrichtung zum Einstellen eines Objektträgers bezüglich der Geräteachse eines Korpuskularstrahlgerätes |
| JPS55104057A (en) * | 1979-02-02 | 1980-08-09 | Hitachi Ltd | Ion implantation device |
| JP2561699B2 (ja) * | 1988-04-28 | 1996-12-11 | 日本電子株式会社 | 電子顕微鏡用試料装置 |
| US4954712A (en) * | 1989-10-16 | 1990-09-04 | Wilcox Harry P | Specimen retaining ring system for an electron microscope |
| NL8902568A (nl) * | 1989-10-17 | 1991-05-16 | Philips Nv | Vacuuem systeem voorzien van een evacueerbaar huis, een objecthouder en een losneembaar daarmee gekoppelde objectdrager. |
| DE69128104T2 (de) * | 1990-05-18 | 1998-04-09 | Hitachi Ltd | Elektronenmikroskop, Probenstellglied für ein Elektronenmikroskop und Verfahren zum Beobachten von mikroskopischen Bildern |
| US5323012A (en) * | 1991-08-16 | 1994-06-21 | The Regents Of The University Of California | Apparatus for positioning a stage |
| US5289005A (en) * | 1992-05-29 | 1994-02-22 | Jeol Ltd. | Electron microscope |
| US6252705B1 (en) * | 1999-05-25 | 2001-06-26 | Schlumberger Technologies, Inc. | Stage for charged particle microscopy system |
| JP4534273B2 (ja) * | 1999-08-31 | 2010-09-01 | 株式会社日立製作所 | 試料作成装置 |
| WO2005124467A1 (ja) * | 2004-06-21 | 2005-12-29 | Pioneer Corporation | 電子ビーム描画装置 |
| JP5403560B2 (ja) | 2010-11-17 | 2014-01-29 | コリア ベイシック サイエンス インスティテュート | 透過電子顕微鏡の、３方向以上から試片を観察し分析するための３軸駆動が可能な試片ホルダー |
| JP2015195123A (ja) * | 2014-03-31 | 2015-11-05 | 株式会社メルビル | 試料ホルダー |
-
1971
- 1971-08-25 JP JP46064441A patent/JPS4830860A/ja active Pending
-
1972
- 1972-08-23 NL NL7211495A patent/NL7211495A/xx unknown
- 1972-08-24 US US00283294A patent/US3745341A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3745341A (en) | 1973-07-10 |
| JPS4830860A (https=) | 1973-04-23 |