JPS4830860A - - Google Patents

Info

Publication number
JPS4830860A
JPS4830860A JP46064441A JP6444171A JPS4830860A JP S4830860 A JPS4830860 A JP S4830860A JP 46064441 A JP46064441 A JP 46064441A JP 6444171 A JP6444171 A JP 6444171A JP S4830860 A JPS4830860 A JP S4830860A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP46064441A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46064441A priority Critical patent/JPS4830860A/ja
Priority to NL7211495A priority patent/NL7211495A/xx
Priority to US00283294A priority patent/US3745341A/en
Publication of JPS4830860A publication Critical patent/JPS4830860A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP46064441A 1971-08-25 1971-08-25 Pending JPS4830860A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP46064441A JPS4830860A (ja) 1971-08-25 1971-08-25
NL7211495A NL7211495A (ja) 1971-08-25 1972-08-23
US00283294A US3745341A (en) 1971-08-25 1972-08-24 Specimen positioning device for electron microscope and the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46064441A JPS4830860A (ja) 1971-08-25 1971-08-25

Publications (1)

Publication Number Publication Date
JPS4830860A true JPS4830860A (ja) 1973-04-23

Family

ID=13258355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46064441A Pending JPS4830860A (ja) 1971-08-25 1971-08-25

Country Status (3)

Country Link
US (1) US3745341A (ja)
JP (1) JPS4830860A (ja)
NL (1) NL7211495A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001066231A (ja) * 1999-08-31 2001-03-16 Hitachi Ltd 試料作成装置および試料作成方法
JP2012109115A (ja) * 2010-11-17 2012-06-07 Korea Basic Science Institute 透過電子顕微鏡の３次元分析のための３軸駆動が可能な試片ホルダー
JP2015195123A (ja) * 2014-03-31 2015-11-05 株式会社メルビル 試料ホルダー

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2542360C2 (de) * 1975-09-19 1977-11-17 Siemens AG, 1000 Berlin und 8000 München Korpuskularstrahlgerät mit einem Goniometer
DE2825417C2 (de) * 1978-06-09 1980-08-07 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Verfahren und Objekteinstellvorrichtung zum Einstellen eines Objektträgers bezüglich der Geräteachse eines Korpuskularstrahlgerätes
JPS55104057A (en) * 1979-02-02 1980-08-09 Hitachi Ltd Ion implantation device
JP2561699B2 (ja) * 1988-04-28 1996-12-11 日本電子株式会社 電子顕微鏡用試料装置
US4954712A (en) * 1989-10-16 1990-09-04 Wilcox Harry P Specimen retaining ring system for an electron microscope
NL8902568A (nl) * 1989-10-17 1991-05-16 Philips Nv Vacuuem systeem voorzien van een evacueerbaar huis, een objecthouder en een losneembaar daarmee gekoppelde objectdrager.
US5153434A (en) * 1990-05-18 1992-10-06 Hitachi, Ltd. Electron microscope and method for observing microscopic image
US5323012A (en) * 1991-08-16 1994-06-21 The Regents Of The University Of California Apparatus for positioning a stage
US5289005A (en) * 1992-05-29 1994-02-22 Jeol Ltd. Electron microscope
US6252705B1 (en) * 1999-05-25 2001-06-26 Schlumberger Technologies, Inc. Stage for charged particle microscopy system
CN1981243A (zh) * 2004-06-21 2007-06-13 日本先锋公司 电子束绘制装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001066231A (ja) * 1999-08-31 2001-03-16 Hitachi Ltd 試料作成装置および試料作成方法
JP4534273B2 (ja) * 1999-08-31 2010-09-01 株式会社日立製作所 試料作成装置
JP2012109115A (ja) * 2010-11-17 2012-06-07 Korea Basic Science Institute 透過電子顕微鏡の３次元分析のための３軸駆動が可能な試片ホルダー
JP2015195123A (ja) * 2014-03-31 2015-11-05 株式会社メルビル 試料ホルダー

Also Published As

Publication number Publication date
NL7211495A (ja) 1973-02-27
US3745341A (en) 1973-07-10

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