NL7012387A - - Google Patents

Info

Publication number
NL7012387A
NL7012387A NL7012387A NL7012387A NL7012387A NL 7012387 A NL7012387 A NL 7012387A NL 7012387 A NL7012387 A NL 7012387A NL 7012387 A NL7012387 A NL 7012387A NL 7012387 A NL7012387 A NL 7012387A
Authority
NL
Netherlands
Application number
NL7012387A
Inventor
Poole J B Le
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL7012387A priority Critical patent/NL7012387A/xx
Priority to DE19712138892 priority patent/DE2138892C3/de
Priority to GB3875271A priority patent/GB1367360A/en
Priority to CH1212671A priority patent/CH536026A/de
Priority to CA120801A priority patent/CA937340A/en
Priority to SE7110502A priority patent/SE377001B/xx
Priority to BE771537A priority patent/BE771537A/xx
Priority to US00173045A priority patent/US3731094A/en
Priority to FR7130436A priority patent/FR2104603A5/fr
Publication of NL7012387A publication Critical patent/NL7012387A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/56—Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/145—Combinations of electrostatic and magnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL7012387A 1970-08-21 1970-08-21 NL7012387A (en:Method)

Priority Applications (9)

Application Number Priority Date Filing Date Title
NL7012387A NL7012387A (en:Method) 1970-08-21 1970-08-21
DE19712138892 DE2138892C3 (de) 1970-08-21 1971-08-04 Magnetische Elektronenlinse mit Raumladung und ihre Verwendung
GB3875271A GB1367360A (en) 1970-08-21 1971-08-18 Electron-optical apparatus
CH1212671A CH536026A (de) 1970-08-21 1971-08-18 Elektronenstrahlgerät
CA120801A CA937340A (en) 1970-08-21 1971-08-18 Electron beam apparatus with means for generating a rotation-symmetrical magnetic field
SE7110502A SE377001B (en:Method) 1970-08-21 1971-08-18
BE771537A BE771537A (fr) 1970-08-21 1971-08-19 Appareil a faisceau electronique
US00173045A US3731094A (en) 1970-08-21 1971-08-19 Electron beam apparatus with means for generating a rotation-symmetrical magnetic field
FR7130436A FR2104603A5 (en:Method) 1970-08-21 1971-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7012387A NL7012387A (en:Method) 1970-08-21 1970-08-21

Publications (1)

Publication Number Publication Date
NL7012387A true NL7012387A (en:Method) 1972-02-23

Family

ID=19810827

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7012387A NL7012387A (en:Method) 1970-08-21 1970-08-21

Country Status (8)

Country Link
US (1) US3731094A (en:Method)
BE (1) BE771537A (en:Method)
CA (1) CA937340A (en:Method)
CH (1) CH536026A (en:Method)
FR (1) FR2104603A5 (en:Method)
GB (1) GB1367360A (en:Method)
NL (1) NL7012387A (en:Method)
SE (1) SE377001B (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3912930A (en) * 1973-09-26 1975-10-14 Physics Int Co Electron beam focusing system
EP0417354A1 (en) * 1989-09-15 1991-03-20 Koninklijke Philips Electronics N.V. Electron beam apparatus with charge-up compensation
ATA4694A (de) * 1994-01-13 1994-11-15 Ims Ionen Mikrofab Syst Projektionssystem fuer geladene teilchen

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2233264A (en) * 1938-12-27 1941-02-25 Rca Corp Electron lens
GB578273A (en) * 1943-03-03 1946-06-21 British Thomson Houston Co Ltd Improvements in electron optical systems
BE477488A (en:Method) * 1945-08-28
US2890342A (en) * 1954-09-29 1959-06-09 Gen Electric System for charge neutralization
NL285301A (en:Method) * 1961-11-15
US3209147A (en) * 1963-03-05 1965-09-28 Centre Nat Rech Scient Electron lens spherical aberration correcting device comprising a current carrying wire section on the lens axis

Also Published As

Publication number Publication date
SE377001B (en:Method) 1975-06-16
CA937340A (en) 1973-11-20
GB1367360A (en) 1974-09-18
BE771537A (fr) 1972-02-21
DE2138892A1 (de) 1972-02-24
US3731094A (en) 1973-05-01
DE2138892B2 (de) 1977-03-24
FR2104603A5 (en:Method) 1972-04-14
CH536026A (de) 1973-04-15

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