NL7008966A - - Google Patents
Info
- Publication number
- NL7008966A NL7008966A NL7008966A NL7008966A NL7008966A NL 7008966 A NL7008966 A NL 7008966A NL 7008966 A NL7008966 A NL 7008966A NL 7008966 A NL7008966 A NL 7008966A NL 7008966 A NL7008966 A NL 7008966A
- Authority
- NL
- Netherlands
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/32—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
- B24C3/322—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks for electrical components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Dicing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19691931335 DE1931335C3 (de) | 1969-06-20 | Verfahren zum Abtrennen eines Körpers von einem scheibenförmigen Kristall und Vorrichtung zur Durchführung dieses Verfahrens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7008966A true NL7008966A (https=) | 1970-12-22 |
Family
ID=5737534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7008966A NL7008966A (https=) | 1969-06-20 | 1970-06-18 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3694972A (https=) |
| JP (1) | JPS5013510B1 (https=) |
| AT (1) | AT315241B (https=) |
| CH (1) | CH504783A (https=) |
| FR (1) | FR2046967B1 (https=) |
| GB (1) | GB1259249A (https=) |
| NL (1) | NL7008966A (https=) |
| SE (1) | SE351523B (https=) |
| ZA (1) | ZA704234B (https=) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3778935A (en) * | 1972-01-26 | 1973-12-18 | Pennwalt Corp | Abrading apparatus with rotary index table |
| CH566643A5 (https=) * | 1973-10-11 | 1975-09-15 | Bbc Brown Boveri & Cie | |
| US3888054A (en) * | 1973-11-16 | 1975-06-10 | Western Electric Co | Method for abrasive cutting in a liquid |
| US3866357A (en) * | 1974-06-06 | 1975-02-18 | Pennwalt Corp | Abrading apparatus |
| DE2522346C3 (de) * | 1975-05-20 | 1978-10-26 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen von Halbleiterbauelementen |
| US4702042A (en) * | 1984-09-27 | 1987-10-27 | Libbey-Owens-Ford Co. | Cutting strengthened glass |
| CA1252711A (en) * | 1984-09-27 | 1989-04-18 | Richard A. Herrington | Ultra-high pressure abrasive jet cutting of glass |
| US4656791A (en) * | 1984-09-27 | 1987-04-14 | Libbey-Owens-Ford Company | Abrasive fluid jet cutting support |
| JPS61159371A (ja) * | 1984-12-28 | 1986-07-19 | Fuji Seiki Seizosho:Kk | Ｉｃの基板用シリコンウェーハのブラスト装置 |
| US5052155A (en) * | 1989-08-10 | 1991-10-01 | Emc Technology, Inc. | Apparatus for the treatment of articles by high velocity impacting thereof with a particulate abrasive material |
| DE4235091C2 (de) * | 1992-10-17 | 2001-09-06 | Trumpf Sachsen Gmbh | Flüssigkeits- und Abrasivmittelzuführung für eine Fluidstrahlschneidanlage |
| US6705925B1 (en) * | 2000-10-20 | 2004-03-16 | Lightwave Microsystems | Apparatus and method to dice integrated circuits from a wafer using a pressurized jet |
| US7153186B2 (en) * | 2002-09-13 | 2006-12-26 | Towa Intercon Technology, Inc. | Jet singulation |
| EP1873824B1 (en) * | 2002-09-13 | 2009-03-11 | Towa-Intercon Technology, Inc. | Jet singulation of a substrate |
| CN1703774A (zh) * | 2002-09-13 | 2005-11-30 | 东和－英特康科技公司 | 基片的喷射分割 |
| DE10337920B4 (de) * | 2003-08-18 | 2008-08-28 | Schott Ag | Verfahren zur Herstellung einer Mehrzahl von Bauteilen und Zwischenprodukt in Form eines Schichtverbundes |
| US20060180579A1 (en) * | 2005-02-11 | 2006-08-17 | Towa Intercon Technology, Inc. | Multidirectional cutting chuck |
| JP4791787B2 (ja) * | 2005-09-22 | 2011-10-12 | Ｔｏｗａ株式会社 | アブレイシブウォータジェットを使用した切断装置 |
| JP2008284635A (ja) * | 2007-05-16 | 2008-11-27 | Disco Abrasive Syst Ltd | ウォータジェット加工方法 |
| JP2008307639A (ja) * | 2007-06-14 | 2008-12-25 | Disco Abrasive Syst Ltd | ウォータジェット加工方法 |
| JP6022862B2 (ja) * | 2012-05-08 | 2016-11-09 | 株式会社不二製作所 | 硬質脆性基板の切り出し方法及び切り出し装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US587892A (en) * | 1897-08-10 | M a t iiia s w a l t e k | ||
| US1664159A (en) * | 1926-04-23 | 1928-03-27 | Elroy A Chase | Apparatus for producing ornamental background on stone |
| GB794528A (en) * | 1955-10-07 | 1958-05-07 | William Howard Mead | Improvements in receivers for particulate material |
| US3205104A (en) * | 1961-07-10 | 1965-09-07 | Litton Industries Inc | Fabrication of interdigital delay lines |
| US3187412A (en) * | 1963-04-26 | 1965-06-08 | Gen Electric | Method of mounting and aligning transducers on delay lines |
| US3262234A (en) * | 1963-10-04 | 1966-07-26 | Int Rectifier Corp | Method of forming a semiconductor rim by sandblasting |
| US3453781A (en) * | 1966-03-30 | 1969-07-08 | Ibm | Tailoring microminiature components |
| US3516204A (en) * | 1967-08-21 | 1970-06-23 | Pennwalt Corp | Abrading apparatus |
-
1970
- 1970-06-15 CH CH897770A patent/CH504783A/de not_active IP Right Cessation
- 1970-06-17 AT AT546470A patent/AT315241B/de not_active IP Right Cessation
- 1970-06-18 NL NL7008966A patent/NL7008966A/xx unknown
- 1970-06-19 GB GB1259249D patent/GB1259249A/en not_active Expired
- 1970-06-19 FR FR7022770A patent/FR2046967B1/fr not_active Expired
- 1970-06-20 JP JP5399070A patent/JPS5013510B1/ja active Pending
- 1970-06-22 ZA ZA704234A patent/ZA704234B/xx unknown
- 1970-06-22 SE SE08611/70A patent/SE351523B/xx unknown
- 1970-06-26 US US50181A patent/US3694972A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| GB1259249A (https=) | 1972-01-05 |
| ZA704234B (en) | 1971-03-31 |
| JPS5013510B1 (https=) | 1975-05-20 |
| FR2046967A1 (https=) | 1971-03-12 |
| AT315241B (de) | 1974-05-10 |
| US3694972A (en) | 1972-10-03 |
| CH504783A (de) | 1971-03-15 |
| DE1931335A1 (de) | 1970-12-23 |
| SE351523B (https=) | 1972-11-27 |
| DE1931335B2 (de) | 1976-03-11 |
| FR2046967B1 (https=) | 1974-09-20 |