NL6917012A - - Google Patents

Info

Publication number
NL6917012A
NL6917012A NL6917012A NL6917012A NL6917012A NL 6917012 A NL6917012 A NL 6917012A NL 6917012 A NL6917012 A NL 6917012A NL 6917012 A NL6917012 A NL 6917012A NL 6917012 A NL6917012 A NL 6917012A
Authority
NL
Netherlands
Application number
NL6917012A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6917012A publication Critical patent/NL6917012A/xx

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/40Encapsulations, e.g. protective coatings characterised by their materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/01Manufacture or treatment
    • H10D64/025Manufacture or treatment forming recessed gates, e.g. by using local oxidation
    • H10D64/027Manufacture or treatment forming recessed gates, e.g. by using local oxidation by etching at gate locations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00Etching of wafers, substrates or parts of devices
    • H10P50/20Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/03Diffusion
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/141Self-alignment coat gate
NL6917012A 1968-12-30 1969-11-12 NL6917012A (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US78776968A 1968-12-30 1968-12-30

Publications (1)

Publication Number Publication Date
NL6917012A true NL6917012A (https=) 1970-07-02

Family

ID=25142467

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6917012A NL6917012A (https=) 1968-12-30 1969-11-12

Country Status (6)

Country Link
US (1) US3574010A (https=)
JP (1) JPS4811511B1 (https=)
DE (1) DE1961634B2 (https=)
FR (1) FR2027308B1 (https=)
GB (1) GB1266243A (https=)
NL (1) NL6917012A (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2021923B2 (de) * 1970-05-05 1976-07-22 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum herstellen eines feldeffekttransistors mit isolierter gateelektrode
JPS4926747B1 (https=) * 1970-10-09 1974-07-11
US3841926A (en) * 1973-01-02 1974-10-15 Ibm Integrated circuit fabrication process
CA1008564A (en) * 1974-04-18 1977-04-12 Robert L. Luce Method of mos circuit fabrication
US4003126A (en) * 1974-09-12 1977-01-18 Canadian Patents And Development Limited Method of making metal oxide semiconductor devices
FR2294544A1 (fr) * 1974-12-13 1976-07-09 Thomson Csf Procede de fabrication, en circuit integre, de transistors a effet de champ destines a fonctionner en tres haute frequence, et structure ou dispositifs obtenus
US4043025A (en) * 1975-05-08 1977-08-23 National Semiconductor Corporation Self-aligned CMOS process for bulk silicon and insulating substrate device
US3975220A (en) * 1975-09-05 1976-08-17 International Business Machines Corporation Diffusion control for controlling parasitic capacitor effects in single FET structure arrays
JPS5326017U (https=) * 1976-08-13 1978-03-06
US4190466A (en) * 1977-12-22 1980-02-26 International Business Machines Corporation Method for making a bipolar transistor structure utilizing self-passivating diffusion sources
US4222164A (en) * 1978-12-29 1980-09-16 International Business Machines Corporation Method of fabrication of self-aligned metal-semiconductor field effect transistors
DE2926874A1 (de) * 1979-07-03 1981-01-22 Siemens Ag Verfahren zum herstellen von niederohmigen, diffundierten bereichen bei der silizium-gate-technologie
US4263066A (en) * 1980-06-09 1981-04-21 Varian Associates, Inc. Process for concurrent formation of base diffusion and p+ profile from single source predeposition
US4317276A (en) * 1980-06-12 1982-03-02 Teletype Corporation Method of manufacturing an insulated gate field-effect transistor therefore in a silicon wafer
US4389768A (en) * 1981-04-17 1983-06-28 International Business Machines Corporation Self-aligned process for fabricating gallium arsenide metal-semiconductor field effect transistors
JPS5825788U (ja) * 1981-08-17 1983-02-18 三菱自動車工業株式会社 トラツクの車体構造
DE102006030261B4 (de) * 2006-06-30 2011-01-20 Advanced Micro Devices, Inc., Sunnyvale Verfahren zur Herstellung einer Drain/Source-Erweiterungsstruktur eines Feldeffekttransistors mit reduzierter Bordiffusion und Transistor

Also Published As

Publication number Publication date
DE1961634B2 (de) 1972-01-13
FR2027308B1 (https=) 1973-10-19
DE1961634A1 (de) 1970-07-09
JPS4811511B1 (https=) 1973-04-13
GB1266243A (https=) 1972-03-08
FR2027308A1 (https=) 1970-09-25
US3574010A (en) 1971-04-06

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