NL6615541A - - Google Patents
Info
- Publication number
- NL6615541A NL6615541A NL6615541A NL6615541A NL6615541A NL 6615541 A NL6615541 A NL 6615541A NL 6615541 A NL6615541 A NL 6615541A NL 6615541 A NL6615541 A NL 6615541A NL 6615541 A NL6615541 A NL 6615541A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US507103A US3397672A (en) | 1965-11-10 | 1965-11-10 | Control system for vapor-deposition coating apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
NL6615541A true NL6615541A (de) | 1967-05-11 |
Family
ID=24017264
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL6615541A NL6615541A (de) | 1965-11-10 | 1966-11-03 |
Country Status (7)
Country | Link |
---|---|
US (1) | US3397672A (de) |
BE (1) | BE689369A (de) |
DE (1) | DE1521573A1 (de) |
ES (1) | ES333150A1 (de) |
FR (1) | FR1498949A (de) |
GB (1) | GB1168813A (de) |
NL (1) | NL6615541A (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3636916A (en) * | 1966-03-14 | 1972-01-25 | Optical Coating Laboratory Inc | Coating apparatus and system |
GB1168641A (en) * | 1966-05-19 | 1969-10-29 | British Iron Steel Research | Formation of Polymer Coatings on Substrates. |
BE705239A (de) * | 1966-06-15 | 1968-03-01 | ||
GB1173978A (en) * | 1967-11-14 | 1969-12-10 | Edwards High Vaccum Internat L | Vacuum Deposition Apparatus |
GB1281572A (en) * | 1968-11-22 | 1972-07-12 | Vepa Ag | Device and method for treating a material length |
US3907607A (en) * | 1969-07-14 | 1975-09-23 | Corning Glass Works | Continuous processing of ribbon material |
US3853093A (en) * | 1970-01-14 | 1974-12-10 | Optical Coating Laboratory Inc | Optical thickness rate monitor |
US3709192A (en) * | 1970-06-01 | 1973-01-09 | Sierracin Corp | Coating control system |
DE2345157C2 (de) * | 1973-09-07 | 1975-09-18 | August Thyssen-Huette Ag, 4100 Duisburg | Vorrichtung zum Abstreifen von Metall beim Feuermetallisieren von Metallbändern |
DE3330092A1 (de) * | 1983-08-20 | 1985-03-07 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zum einstellen der oertlichen verdampfungsleistung an verdampfern in vakuumaufdampfprozessen |
DE3706495A1 (de) * | 1987-04-29 | 1988-09-15 | Vtu Angel Kancev | Stromversorgungsschaltung fuer elektronenstrahl-verdampfer |
US6652654B1 (en) * | 2000-09-27 | 2003-11-25 | Bechtel Bwxt Idaho, Llc | System configured for applying multiple modifying agents to a substrate |
US6623686B1 (en) | 2000-09-28 | 2003-09-23 | Bechtel Bwxt Idaho, Llc | System configured for applying a modifying agent to a non-equidimensional substrate |
US20050244580A1 (en) * | 2004-04-30 | 2005-11-03 | Eastman Kodak Company | Deposition apparatus for temperature sensitive materials |
KR20160035053A (ko) * | 2013-12-20 | 2016-03-30 | 가부시키가이샤 아루박 | 전자총 장치 및 진공 증착 장치 |
DE102020200366A1 (de) | 2019-04-23 | 2020-10-29 | Sms Group Gmbh | PVD Dickenregelung |
CN115491663B (zh) * | 2022-11-21 | 2023-03-24 | 常州翊迈新材料科技有限公司 | 燃料电池金属极板涂层厚度在线监控装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2860075A (en) * | 1951-01-27 | 1958-11-11 | Continental Can Co | Method of making a heater for vacuum deposition |
CH311812A (de) * | 1951-11-05 | 1955-12-15 | Zeiss Carl Fa | Aufdampfeinrichtung. |
US2872341A (en) * | 1954-09-10 | 1959-02-03 | Int Resistance Co | Method of providing an adherent metal coating on a fluorocarbon resin |
US2903547A (en) * | 1957-08-21 | 1959-09-08 | Continental Can Co | Vaporizing element connector and method |
US2930879A (en) * | 1957-12-16 | 1960-03-29 | New York Air Brake Co | Vaporization of metals |
DE1156521B (de) * | 1961-09-05 | 1963-10-31 | Heraeus Gmbh W C | Elektronenstrahlkanone zum Erhitzen von Metallen |
US3146335A (en) * | 1962-03-29 | 1964-08-25 | United Aircraft Corp | Focusing device for electron beams |
DE1199097B (de) * | 1962-09-25 | 1965-08-19 | Heraeus Gmbh W C | Vorrichtung zum Vakuumbedampfen breiter Baender, insbesondere mit Metallen, durch Erhitzen des Verdampfungsgutes mittels Elektronenstrahlen |
DE1261971B (de) * | 1963-02-13 | 1968-02-29 | United Aircraft Corp | Einrichtung zum Schweissen, Schneiden oder zur Materialbearbeitung mittels eines Ladungstraegerstrahls |
US3235480A (en) * | 1963-04-08 | 1966-02-15 | Electra Mfg Company | Thermionic evaporation rate controller |
GB1065060A (en) * | 1963-04-19 | 1967-04-12 | United Aircraft Corp | Improvements in and relating to apparatus for working articles with energised beams |
US3235647A (en) * | 1963-06-06 | 1966-02-15 | Temescal Metallurgical Corp | Electron bombardment heating with adjustable impact pattern |
US3244855A (en) * | 1963-07-19 | 1966-04-05 | United States Steel Corp | System for correcting the shift of an electron-gun beam from the desired region of impingement |
US3281265A (en) * | 1963-09-17 | 1966-10-25 | United States Steel Corp | Method and apparatus for controlling coating thickness by electron beam evaporation |
US3276902A (en) * | 1963-10-01 | 1966-10-04 | Itt | Method of vapor deposition employing an electron beam |
-
1965
- 1965-11-10 US US507103A patent/US3397672A/en not_active Expired - Lifetime
-
1966
- 1966-11-01 GB GB48945/66A patent/GB1168813A/en not_active Expired
- 1966-11-03 NL NL6615541A patent/NL6615541A/xx unknown
- 1966-11-07 BE BE689369D patent/BE689369A/xx unknown
- 1966-11-08 ES ES0333150A patent/ES333150A1/es not_active Expired
- 1966-11-09 FR FR83081A patent/FR1498949A/fr not_active Expired
- 1966-11-10 DE DE19661521573 patent/DE1521573A1/de active Pending
Also Published As
Publication number | Publication date |
---|---|
DE1521573A1 (de) | 1969-11-06 |
ES333150A1 (es) | 1967-07-16 |
BE689369A (de) | 1967-05-08 |
FR1498949A (fr) | 1967-10-20 |
GB1168813A (en) | 1969-10-29 |
US3397672A (en) | 1968-08-20 |