NL6600952A - - Google Patents
Info
- Publication number
- NL6600952A NL6600952A NL6600952A NL6600952A NL6600952A NL 6600952 A NL6600952 A NL 6600952A NL 6600952 A NL6600952 A NL 6600952A NL 6600952 A NL6600952 A NL 6600952A NL 6600952 A NL6600952 A NL 6600952A
- Authority
- NL
- Netherlands
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1750165A CH452313A (de) | 1965-12-18 | 1965-12-18 | Vorrichtung zur Verdampfung von Stoffen im Vakuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6600952A true NL6600952A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1967-06-19 |
Family
ID=4425902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6600952A NL6600952A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1965-12-18 | 1966-01-25 |
Country Status (6)
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4094269A (en) * | 1974-06-14 | 1978-06-13 | Zlafop Pri Ban | Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances |
| BG20711A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1974-06-14 | 1975-12-20 | ||
| US3996469A (en) * | 1975-01-06 | 1976-12-07 | Jersey Nuclear-Avco Isotopes, Inc. | Floating convection barrier for evaporation source |
| US4048462A (en) * | 1975-01-17 | 1977-09-13 | Airco, Inc. | Compact rotary evaporation source |
| DE2628765C3 (de) * | 1976-06-26 | 1979-01-11 | Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln | Vorrichtung zum Aufdampfen insbesondere sublimierbarer Stoffe im Vakuum mittels einer Elektronenstrahlquelle |
| FR2623819A1 (fr) * | 1987-11-26 | 1989-06-02 | Thomson Csf | Four a bombardement electronique pour evaporation sous vide |
| DE4016225C2 (de) * | 1990-05-19 | 1997-08-14 | Leybold Ag | Reihenverdampfer für Vakuumbedampfungsanlagen |
| DE4100541C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1991-01-10 | 1992-01-16 | Plasco Dr. Ehrich Plasma-Coating Gmbh, 6501 Heidesheim, De |
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1965
- 1965-12-18 CH CH1750165A patent/CH452313A/de unknown
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1966
- 1966-01-25 NL NL6600952A patent/NL6600952A/xx unknown
- 1966-11-16 DE DE19661521175 patent/DE1521175B2/de active Pending
- 1966-11-30 GB GB53526/66A patent/GB1105989A/en not_active Expired
- 1966-12-16 US US602399A patent/US3544763A/en not_active Expired - Lifetime
- 1966-12-19 FR FR87908A patent/FR1505169A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US3544763A (en) | 1970-12-01 |
| CH452313A (de) | 1968-05-31 |
| FR1505169A (fr) | 1967-12-08 |
| DE1521175A1 (de) | 1969-07-31 |
| GB1105989A (en) | 1968-03-13 |
| DE1521175B2 (de) | 1973-04-26 |