NL2024542B1 - Electroforming process - Google Patents

Electroforming process Download PDF

Info

Publication number
NL2024542B1
NL2024542B1 NL2024542A NL2024542A NL2024542B1 NL 2024542 B1 NL2024542 B1 NL 2024542B1 NL 2024542 A NL2024542 A NL 2024542A NL 2024542 A NL2024542 A NL 2024542A NL 2024542 B1 NL2024542 B1 NL 2024542B1
Authority
NL
Netherlands
Prior art keywords
layer
substrate
photoresist
layers
nickel
Prior art date
Application number
NL2024542A
Other languages
English (en)
Dutch (nl)
Inventor
Hildenbrand Nicolas
Gerardus Johannes Joseph Alberts Roy
Herman Laurens Hubert Kusters Marco
Gerrit Knol Harm
Hendrikus Maria Berenschot Johannes
Antonius Wilhelmus Münninghoff Joris
Original Assignee
Veco B V
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Veco B V filed Critical Veco B V
Priority to NL2024542A priority Critical patent/NL2024542B1/en
Priority to TW109143741A priority patent/TW202132626A/zh
Priority to CN202080087142.XA priority patent/CN114929942A/zh
Priority to EP20829037.9A priority patent/EP4077768A1/de
Priority to US17/757,606 priority patent/US20230035647A1/en
Priority to JP2022537159A priority patent/JP2023507177A/ja
Priority to PCT/NL2020/050804 priority patent/WO2021125959A1/en
Priority to KR1020227023083A priority patent/KR20220118447A/ko
Application granted granted Critical
Publication of NL2024542B1 publication Critical patent/NL2024542B1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/003—3D structures, e.g. superposed patterned layers
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/04—Wires; Strips; Foils
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/10—Moulds; Masks; Masterforms
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/12—Electroplating: Baths therefor from solutions of nickel or cobalt
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/50—Electroplating: Baths therefor from solutions of platinum group metals
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C25D5/022—Electroplating of selected surface areas using masking means
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10—Electroplating with more than one layer of the same or of different metals
    • C25D5/12—Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
NL2024542A 2019-12-20 2019-12-20 Electroforming process NL2024542B1 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
NL2024542A NL2024542B1 (en) 2019-12-20 2019-12-20 Electroforming process
TW109143741A TW202132626A (zh) 2019-12-20 2020-12-11 電鑄製程
CN202080087142.XA CN114929942A (zh) 2019-12-20 2020-12-18 电铸工艺
EP20829037.9A EP4077768A1 (de) 2019-12-20 2020-12-18 Elektroformungsverfahren
US17/757,606 US20230035647A1 (en) 2019-12-20 2020-12-18 Electroforming process
JP2022537159A JP2023507177A (ja) 2019-12-20 2020-12-18 電鋳方法
PCT/NL2020/050804 WO2021125959A1 (en) 2019-12-20 2020-12-18 Electroforming process
KR1020227023083A KR20220118447A (ko) 2019-12-20 2020-12-18 전주 공정

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2024542A NL2024542B1 (en) 2019-12-20 2019-12-20 Electroforming process

Publications (1)

Publication Number Publication Date
NL2024542B1 true NL2024542B1 (en) 2021-09-02

Family

ID=69156478

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2024542A NL2024542B1 (en) 2019-12-20 2019-12-20 Electroforming process

Country Status (8)

Country Link
US (1) US20230035647A1 (de)
EP (1) EP4077768A1 (de)
JP (1) JP2023507177A (de)
KR (1) KR20220118447A (de)
CN (1) CN114929942A (de)
NL (1) NL2024542B1 (de)
TW (1) TW202132626A (de)
WO (1) WO2021125959A1 (de)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050253606A1 (en) 2003-02-04 2005-11-17 Microfabrica Inc. Microprobe tips and methods for making
NL1031259C2 (nl) 2006-03-01 2007-09-04 Stork Veco Bv Elektroformeringswerkwijze.

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050253606A1 (en) 2003-02-04 2005-11-17 Microfabrica Inc. Microprobe tips and methods for making
NL1031259C2 (nl) 2006-03-01 2007-09-04 Stork Veco Bv Elektroformeringswerkwijze.

Also Published As

Publication number Publication date
WO2021125959A1 (en) 2021-06-24
US20230035647A1 (en) 2023-02-02
TW202132626A (zh) 2021-09-01
CN114929942A (zh) 2022-08-19
KR20220118447A (ko) 2022-08-25
EP4077768A1 (de) 2022-10-26
JP2023507177A (ja) 2023-02-21

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