NL2021804A - Determining significant relationships between parameters describing operation of an apparatus - Google Patents
Determining significant relationships between parameters describing operation of an apparatus Download PDFInfo
- Publication number
- NL2021804A NL2021804A NL2021804A NL2021804A NL2021804A NL 2021804 A NL2021804 A NL 2021804A NL 2021804 A NL2021804 A NL 2021804A NL 2021804 A NL2021804 A NL 2021804A NL 2021804 A NL2021804 A NL 2021804A
- Authority
- NL
- Netherlands
- Prior art keywords
- data
- parameters
- relationships
- subset
- parameter
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims description 58
- 230000005855 radiation Effects 0.000 claims description 30
- 238000000059 patterning Methods 0.000 claims description 23
- 238000005286 illumination Methods 0.000 claims description 6
- 238000001459 lithography Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 abstract description 93
- 238000005259 measurement Methods 0.000 abstract description 44
- 230000001364 causal effect Effects 0.000 description 47
- 239000011159 matrix material Substances 0.000 description 43
- 238000004519 manufacturing process Methods 0.000 description 42
- 239000004065 semiconductor Substances 0.000 description 39
- 238000012546 transfer Methods 0.000 description 35
- 238000013461 design Methods 0.000 description 33
- 230000008569 process Effects 0.000 description 23
- 238000004458 analytical method Methods 0.000 description 18
- 238000007689 inspection Methods 0.000 description 15
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- 238000004590 computer program Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 230000006399 behavior Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 230000003750 conditioning effect Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000007405 data analysis Methods 0.000 description 2
- 238000003745 diagnosis Methods 0.000 description 2
- 230000005670 electromagnetic radiation Effects 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 206010000117 Abnormal behaviour Diseases 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000000671 immersion lithography Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004393 prognosis Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/70508—Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/70533—Controlling abnormal operating mode, e.g. taking account of waiting time, decision to rework or rework flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
- G05B13/042—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a parameter or coefficient is automatically adjusted to optimise the performance
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
- G05B23/02—Electric testing or monitoring
- G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
- G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
- G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
- G05B23/024—Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Evolutionary Computation (AREA)
- Artificial Intelligence (AREA)
- Health & Medical Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Medical Informatics (AREA)
- Software Systems (AREA)
- Mathematical Physics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing And Monitoring For Control Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP18177970.3A EP3582007A1 (en) | 2018-06-15 | 2018-06-15 | Determining significant relationships between parameters describing operation of an apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL2021804A true NL2021804A (en) | 2018-11-06 |
Family
ID=62684681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL2021804A NL2021804A (en) | 2018-06-15 | 2018-10-12 | Determining significant relationships between parameters describing operation of an apparatus |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11526084B2 (https=) |
| EP (1) | EP3582007A1 (https=) |
| JP (1) | JP7177183B2 (https=) |
| CN (1) | CN112334835A (https=) |
| NL (1) | NL2021804A (https=) |
| WO (1) | WO2019238348A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12189303B2 (en) | 2020-05-08 | 2025-01-07 | Asml Netherlands B.V. | Methods and apparatus for diagnosing unobserved operational parameters |
| JP7643422B2 (ja) * | 2022-09-14 | 2025-03-11 | トヨタ自動車株式会社 | 作業状況監視システム、作業状況監視方法、及び、作業状況監視プログラム |
| KR20250117398A (ko) * | 2022-11-29 | 2025-08-04 | 도쿄엘렉트론가부시키가이샤 | 컴퓨터 프로그램, 정보 처리 장치 및 정보 처리 방법 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6458610B1 (en) * | 2001-05-31 | 2002-10-01 | Advanced Micro Devices, Inc. | Method and apparatus for optical film stack fault detection |
| SG135052A1 (en) | 2002-11-12 | 2007-09-28 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
| US7650200B2 (en) * | 2007-03-30 | 2010-01-19 | Tokyo Electron Limited | Method and apparatus for creating a site-dependent evaluation library |
| US7460237B1 (en) | 2007-08-02 | 2008-12-02 | Asml Netherlands B.V. | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
| NL2009345A (en) | 2011-09-28 | 2013-04-02 | Asml Netherlands Bv | Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods. |
| EP2952964A1 (en) | 2014-06-03 | 2015-12-09 | Aselta Nanographics | Method for determining the parameters of an ic manufacturing process by a differential procedure |
| WO2017055073A1 (en) | 2015-09-29 | 2017-04-06 | Asml Netherlands B.V. | Methods of modelling systems or performing predictive maintenance of lithographic systems |
| KR102189686B1 (ko) | 2016-04-20 | 2020-12-14 | 에이에스엠엘 네델란즈 비.브이. | 레코드 매칭 방법, 유지보수 스케줄링 방법, 및 장치 |
-
2018
- 2018-06-15 EP EP18177970.3A patent/EP3582007A1/en not_active Withdrawn
- 2018-10-12 NL NL2021804A patent/NL2021804A/en unknown
-
2019
- 2019-05-15 CN CN201980040054.1A patent/CN112334835A/zh active Pending
- 2019-05-15 JP JP2020569728A patent/JP7177183B2/ja active Active
- 2019-05-15 WO PCT/EP2019/062512 patent/WO2019238348A1/en not_active Ceased
- 2019-05-15 US US17/251,568 patent/US11526084B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20210325789A1 (en) | 2021-10-21 |
| JP2021527953A (ja) | 2021-10-14 |
| JP7177183B2 (ja) | 2022-11-22 |
| US11526084B2 (en) | 2022-12-13 |
| EP3582007A1 (en) | 2019-12-18 |
| CN112334835A (zh) | 2021-02-05 |
| WO2019238348A1 (en) | 2019-12-19 |
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