NL184985B - Elektronenlensuitrusting. - Google Patents

Elektronenlensuitrusting.

Info

Publication number
NL184985B
NL184985B NLAANVRAGE8100375,A NL8100375A NL184985B NL 184985 B NL184985 B NL 184985B NL 8100375 A NL8100375 A NL 8100375A NL 184985 B NL184985 B NL 184985B
Authority
NL
Netherlands
Prior art keywords
electron lens
lens equipment
equipment
electron
lens
Prior art date
Application number
NLAANVRAGE8100375,A
Other languages
English (en)
Other versions
NL184985C (nl
NL8100375A (nl
Original Assignee
Hitachi Ltd En Nippon Telegrap
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd En Nippon Telegrap filed Critical Hitachi Ltd En Nippon Telegrap
Publication of NL8100375A publication Critical patent/NL8100375A/nl
Publication of NL184985B publication Critical patent/NL184985B/nl
Application granted granted Critical
Publication of NL184985C publication Critical patent/NL184985C/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
NLAANVRAGE8100375,A 1980-01-30 1981-01-27 Elektronenlensuitrusting. NL184985C (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP879780 1980-01-30
JP55008797A JPS5953658B2 (ja) 1980-01-30 1980-01-30 電子レンズ

Publications (3)

Publication Number Publication Date
NL8100375A NL8100375A (nl) 1981-09-01
NL184985B true NL184985B (nl) 1989-07-17
NL184985C NL184985C (nl) 1989-12-18

Family

ID=11702849

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE8100375,A NL184985C (nl) 1980-01-30 1981-01-27 Elektronenlensuitrusting.

Country Status (3)

Country Link
US (1) US4400622A (nl)
JP (1) JPS5953658B2 (nl)
NL (1) NL184985C (nl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4544847A (en) * 1983-07-28 1985-10-01 Varian Associates, Inc. Multi-gap magnetic imaging lens for charged particle beams
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
JPH08138602A (ja) * 1994-11-08 1996-05-31 Hitachi Ltd 電子線装置
US5663568A (en) * 1995-10-20 1997-09-02 Lucent Technologies Inc. Apparatus for controlling a charged particle beam and a lithographic process in which the apparatus is used
JPH10106471A (ja) * 1996-09-30 1998-04-24 Nikon Corp 荷電粒子線装置及び該装置の使用方法
US7078994B2 (en) * 2003-02-18 2006-07-18 Glenn Henry Martin Constant power and temperature coil

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2323328A (en) * 1940-10-31 1943-07-06 Rca Corp Projection lens for electron microscopes
DE1804199C3 (de) * 1968-03-26 1975-12-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen Korpuskularstrahlgerät zur wahlweisen Abbildung eines Präparates oder seines Beugungsdiagrammes
NL7203264A (nl) * 1972-03-10 1973-09-12
JPS551186A (en) * 1979-04-23 1980-01-07 Toshiba Corp Electron beam exposure apparatus
JPS551187A (en) * 1979-04-23 1980-01-07 Toshiba Corp Electron beam exposure apparatus

Also Published As

Publication number Publication date
US4400622A (en) 1983-08-23
JPS5953658B2 (ja) 1984-12-26
JPS56107460A (en) 1981-08-26
NL184985C (nl) 1989-12-18
NL8100375A (nl) 1981-09-01

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Legal Events

Date Code Title Description
A1A A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
A85 Still pending on 85-01-01
CNR Transfer of rights (patent application after its laying open for public inspection)

Free format text: HITACHI LTD. EN NIPPON TELEGRAPH AND TELEPHONE

BK Erratum

Free format text: CORRECTION TO PAMPHLET

V1 Lapsed because of non-payment of the annual fee

Effective date: 19980801