NL177057C - ELECTRON GUN OF THE FIELD EMISSION TYPE. - Google Patents
ELECTRON GUN OF THE FIELD EMISSION TYPE.Info
- Publication number
- NL177057C NL177057C NL7402296A NL7402296A NL177057C NL 177057 C NL177057 C NL 177057C NL 7402296 A NL7402296 A NL 7402296A NL 7402296 A NL7402296 A NL 7402296A NL 177057 C NL177057 C NL 177057C
- Authority
- NL
- Netherlands
- Prior art keywords
- field emission
- electron gun
- emission type
- type
- gun
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2545273A JPS5212055B2 (en) | 1973-03-03 | 1973-03-03 |
Publications (3)
Publication Number | Publication Date |
---|---|
NL7402296A NL7402296A (en) | 1974-09-05 |
NL177057B NL177057B (en) | 1985-02-18 |
NL177057C true NL177057C (en) | 1985-07-16 |
Family
ID=12166404
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7402296A NL177057C (en) | 1973-03-03 | 1974-02-20 | ELECTRON GUN OF THE FIELD EMISSION TYPE. |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5212055B2 (en) |
FR (1) | FR2220089B1 (en) |
GB (1) | GB1417361A (en) |
NL (1) | NL177057C (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5366151A (en) * | 1976-11-26 | 1978-06-13 | Hitachi Ltd | Electron gun unit of electron microscope and equivalent unit |
JPS58141554U (en) * | 1982-03-17 | 1983-09-24 | 日本電子株式会社 | electron gun |
-
1973
- 1973-03-03 JP JP2545273A patent/JPS5212055B2/ja not_active Expired
-
1974
- 1974-02-20 NL NL7402296A patent/NL177057C/en not_active IP Right Cessation
- 1974-02-22 FR FR7406180A patent/FR2220089B1/fr not_active Expired
- 1974-03-01 GB GB945174A patent/GB1417361A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5212055B2 (en) | 1977-04-04 |
DE2408719B2 (en) | 1977-06-02 |
NL7402296A (en) | 1974-09-05 |
JPS49115467A (en) | 1974-11-05 |
FR2220089A1 (en) | 1974-09-27 |
NL177057B (en) | 1985-02-18 |
FR2220089B1 (en) | 1979-03-02 |
DE2408719A1 (en) | 1974-09-12 |
GB1417361A (en) | 1975-12-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BC | A request for examination has been filed | ||
A85 | Still pending on 85-01-01 | ||
V1 | Lapsed because of non-payment of the annual fee |