NL177057C - ELECTRON GUN OF THE FIELD EMISSION TYPE. - Google Patents

ELECTRON GUN OF THE FIELD EMISSION TYPE.

Info

Publication number
NL177057C
NL177057C NL7402296A NL7402296A NL177057C NL 177057 C NL177057 C NL 177057C NL 7402296 A NL7402296 A NL 7402296A NL 7402296 A NL7402296 A NL 7402296A NL 177057 C NL177057 C NL 177057C
Authority
NL
Netherlands
Prior art keywords
field emission
electron gun
emission type
type
gun
Prior art date
Application number
NL7402296A
Other languages
Dutch (nl)
Other versions
NL7402296A (en
NL177057B (en
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Publication of NL7402296A publication Critical patent/NL7402296A/xx
Publication of NL177057B publication Critical patent/NL177057B/en
Application granted granted Critical
Publication of NL177057C publication Critical patent/NL177057C/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/073Electron guns using field emission, photo emission, or secondary emission electron sources
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/248Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
NL7402296A 1973-03-03 1974-02-20 ELECTRON GUN OF THE FIELD EMISSION TYPE. NL177057C (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2545273A JPS5212055B2 (en) 1973-03-03 1973-03-03

Publications (3)

Publication Number Publication Date
NL7402296A NL7402296A (en) 1974-09-05
NL177057B NL177057B (en) 1985-02-18
NL177057C true NL177057C (en) 1985-07-16

Family

ID=12166404

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7402296A NL177057C (en) 1973-03-03 1974-02-20 ELECTRON GUN OF THE FIELD EMISSION TYPE.

Country Status (4)

Country Link
JP (1) JPS5212055B2 (en)
FR (1) FR2220089B1 (en)
GB (1) GB1417361A (en)
NL (1) NL177057C (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366151A (en) * 1976-11-26 1978-06-13 Hitachi Ltd Electron gun unit of electron microscope and equivalent unit
JPS58141554U (en) * 1982-03-17 1983-09-24 日本電子株式会社 electron gun

Also Published As

Publication number Publication date
JPS5212055B2 (en) 1977-04-04
DE2408719B2 (en) 1977-06-02
NL7402296A (en) 1974-09-05
JPS49115467A (en) 1974-11-05
FR2220089A1 (en) 1974-09-27
NL177057B (en) 1985-02-18
FR2220089B1 (en) 1979-03-02
DE2408719A1 (en) 1974-09-12
GB1417361A (en) 1975-12-10

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Legal Events

Date Code Title Description
BC A request for examination has been filed
A85 Still pending on 85-01-01
V1 Lapsed because of non-payment of the annual fee