NL163368C - Halfgeleiderinrichting met een polyimideharslaag. - Google Patents

Halfgeleiderinrichting met een polyimideharslaag.

Info

Publication number
NL163368C
NL163368C NL7314375.A NL7314375A NL163368C NL 163368 C NL163368 C NL 163368C NL 7314375 A NL7314375 A NL 7314375A NL 163368 C NL163368 C NL 163368C
Authority
NL
Netherlands
Prior art keywords
semiconductor device
polyimide resin
resin coat
coat
polyimide
Prior art date
Application number
NL7314375.A
Other languages
English (en)
Dutch (nl)
Other versions
NL163368B (nl
NL7314375A (ja
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of NL7314375A publication Critical patent/NL7314375A/xx
Publication of NL163368B publication Critical patent/NL163368B/xx
Application granted granted Critical
Publication of NL163368C publication Critical patent/NL163368C/xx

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    • H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
NL7314375.A 1972-10-18 1973-10-18 Halfgeleiderinrichting met een polyimideharslaag. NL163368C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47103588A JPS5131185B2 (ja) 1972-10-18 1972-10-18

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NL7314375A NL7314375A (ja) 1974-04-22
NL163368B NL163368B (nl) 1980-03-17
NL163368C true NL163368C (nl) 1980-08-15

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NL7314375.A NL163368C (nl) 1972-10-18 1973-10-18 Halfgeleiderinrichting met een polyimideharslaag.

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JP (1) JPS5131185B2 (ja)
FR (1) FR2209218B1 (ja)
GB (1) GB1414245A (ja)
HK (1) HK29979A (ja)
MY (1) MY7900031A (ja)
NL (1) NL163368C (ja)

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Publication number Priority date Publication date Assignee Title
US4017886A (en) 1972-10-18 1977-04-12 Hitachi, Ltd. Discrete semiconductor device having polymer resin as insulator and method for making the same
JPS5421073B2 (ja) * 1974-04-15 1979-07-27
JPS516474A (en) * 1974-07-05 1976-01-20 Hitachi Ltd Pureenakozono handotaisochi
JPS51102569A (ja) * 1975-03-07 1976-09-10 Hitachi Ltd Handotaisochi
JPS57115834A (en) * 1981-01-10 1982-07-19 Nec Corp Manufacture of semiconductor device
JPS57160833A (en) * 1981-03-27 1982-10-04 Showa Aircraft Ind Co Ltd Method of handling air cargo containers and pallets, conveyors and dollies for use in this method
US4758476A (en) * 1984-12-12 1988-07-19 Hitachi Chemical Company, Ltd. Polyimide precursor resin composition and semiconductor device using the same
US6294799B1 (en) 1995-11-27 2001-09-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of fabricating same
US5940732A (en) 1995-11-27 1999-08-17 Semiconductor Energy Laboratory Co., Method of fabricating semiconductor device
US5883422A (en) * 1996-06-28 1999-03-16 The Whitaker Corporation Reduced parasitic capacitance semiconductor devices
JP2003151981A (ja) * 2001-11-16 2003-05-23 Shinko Electric Ind Co Ltd 半導体装置およびその製造方法

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GB1230421A (ja) * 1967-09-15 1971-05-05

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GB1414245A (en) 1975-11-19
FR2209218B1 (ja) 1978-05-26
JPS4962081A (ja) 1974-06-15
HK29979A (en) 1979-05-18
JPS5131185B2 (ja) 1976-09-04
FR2209218A1 (ja) 1974-06-28
DE2352329B2 (de) 1977-02-24
DE2352329A1 (de) 1974-05-02
NL163368B (nl) 1980-03-17
NL7314375A (ja) 1974-04-22
MY7900031A (en) 1979-12-31

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V4 Discontinued because of reaching the maximum lifetime of a patent