NL155979B - Elektronenkanon van het veldemissie-type. - Google Patents

Elektronenkanon van het veldemissie-type.

Info

Publication number
NL155979B
NL155979B NL7204863.A NL7204863A NL155979B NL 155979 B NL155979 B NL 155979B NL 7204863 A NL7204863 A NL 7204863A NL 155979 B NL155979 B NL 155979B
Authority
NL
Netherlands
Prior art keywords
field emission
emission type
electronic gun
gun
electronic
Prior art date
Application number
NL7204863.A
Other languages
English (en)
Dutch (nl)
Other versions
NL7204863A (enExample
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of NL7204863A publication Critical patent/NL7204863A/xx
Publication of NL155979B publication Critical patent/NL155979B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
NL7204863.A 1971-04-12 1972-04-12 Elektronenkanon van het veldemissie-type. NL155979B (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2233871A JPS5323663B1 (enExample) 1971-04-12 1971-04-12

Publications (2)

Publication Number Publication Date
NL7204863A NL7204863A (enExample) 1972-10-16
NL155979B true NL155979B (nl) 1978-02-15

Family

ID=12079897

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7204863.A NL155979B (nl) 1971-04-12 1972-04-12 Elektronenkanon van het veldemissie-type.

Country Status (4)

Country Link
US (1) US3786268A (enExample)
JP (1) JPS5323663B1 (enExample)
DE (1) DE2217660A1 (enExample)
NL (1) NL155979B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5420828B2 (enExample) * 1972-06-09 1979-07-25
DE2851743C2 (de) * 1978-11-30 1980-08-28 Kernforschungsanlage Juelich Gmbh, 5170 Juelich ElektronenstoBspektrometer
JPS57191950A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Charged-particle source
WO1987004846A1 (en) * 1986-02-03 1987-08-13 Crewe Albert V Electron beam memory system with ultra-compact, high current density electron gun
US4740705A (en) * 1986-08-11 1988-04-26 Electron Beam Memories Axially compact field emission cathode assembly
US4760567A (en) * 1986-08-11 1988-07-26 Electron Beam Memories Electron beam memory system with ultra-compact, high current density electron gun
JP3131339B2 (ja) * 1993-12-22 2001-01-31 三菱電機株式会社 陰極、陰極線管および陰極線管の作動方法
US5848118A (en) * 1997-06-19 1998-12-08 Lear Corporation Method and apparatus for detecting inhomogeneities in seat assemblies
FR2792770A1 (fr) * 1999-04-22 2000-10-27 Cit Alcatel Fonctionnement a haute pression d'une cathode froide a emission de champ
EP1760761B1 (en) * 2005-09-05 2017-10-18 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam emitting device and method for operating a charged particle beam emitting device
JP5203456B2 (ja) 2008-06-20 2013-06-05 株式会社日立ハイテクノロジーズ 荷電粒子線装置、及びその制御方法
US8188451B1 (en) * 2008-09-24 2012-05-29 Kla-Tencor Corporation Electron generation and delivery system for contamination sensitive emitters
EP2365511B1 (en) * 2010-03-10 2013-05-08 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Feedback loop for emitter flash cleaning
JP6345273B2 (ja) 2014-12-26 2018-06-20 株式会社日立ハイテクノロジーズ 複合荷電粒子線装置およびその制御方法
JP6762635B1 (ja) * 2020-04-16 2020-09-30 株式会社Ｐｈｏｔｏ ｅｌｅｃｔｒｏｎ Ｓｏｕｌ 電子銃、電子線適用装置、および、電子ビームの射出方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1246744A (en) * 1969-01-02 1971-09-15 Graham Stuart Plows Electron beam apparatus

Also Published As

Publication number Publication date
NL7204863A (enExample) 1972-10-16
DE2217660A1 (de) 1972-11-16
JPS5323663B1 (enExample) 1978-07-15
US3786268A (en) 1974-01-15

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Legal Events

Date Code Title Description
NL80 Information provided on patent owner name for an already discontinued patent

Owner name: HITACHI

V4 Discontinued because of reaching the maximum lifetime of a patent