NL148360B - PROCESS FOR THE MANUFACTURE OF A SEMICONDUCTOR DEVICE, AS WELL AS SEMI-CONDUCTOR DEVICE, MANUFACTURED ACCORDING TO THIS PROCESS. - Google Patents

PROCESS FOR THE MANUFACTURE OF A SEMICONDUCTOR DEVICE, AS WELL AS SEMI-CONDUCTOR DEVICE, MANUFACTURED ACCORDING TO THIS PROCESS.

Info

Publication number
NL148360B
NL148360B NL6704404A NL6704404A NL148360B NL 148360 B NL148360 B NL 148360B NL 6704404 A NL6704404 A NL 6704404A NL 6704404 A NL6704404 A NL 6704404A NL 148360 B NL148360 B NL 148360B
Authority
NL
Netherlands
Prior art keywords
semi
manufacture
well
manufactured according
semiconductor device
Prior art date
Application number
NL6704404A
Other languages
Dutch (nl)
Other versions
NL6704404A (en
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Publication of NL6704404A publication Critical patent/NL6704404A/xx
Publication of NL148360B publication Critical patent/NL148360B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/16—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal carbonyl compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrodes Of Semiconductors (AREA)
NL6704404A 1966-03-29 1967-03-28 PROCESS FOR THE MANUFACTURE OF A SEMICONDUCTOR DEVICE, AS WELL AS SEMI-CONDUCTOR DEVICE, MANUFACTURED ACCORDING TO THIS PROCESS. NL148360B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020966 1966-03-29

Publications (2)

Publication Number Publication Date
NL6704404A NL6704404A (en) 1967-10-02
NL148360B true NL148360B (en) 1976-01-15

Family

ID=12020759

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6704404A NL148360B (en) 1966-03-29 1967-03-28 PROCESS FOR THE MANUFACTURE OF A SEMICONDUCTOR DEVICE, AS WELL AS SEMI-CONDUCTOR DEVICE, MANUFACTURED ACCORDING TO THIS PROCESS.

Country Status (7)

Country Link
BE (1) BE696171A (en)
CH (1) CH474854A (en)
DE (1) DE1614136B1 (en)
FR (1) FR1515732A (en)
GB (1) GB1107620A (en)
NL (1) NL148360B (en)
SE (1) SE325338B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3562606A (en) * 1969-08-13 1971-02-09 Varian Associates Subsurface gallium arsenide schottky-type diode and method of fabricating same
KR102355507B1 (en) * 2018-11-14 2022-01-27 (주)디엔에프 Method of manufacturing a molybdenum-containing thin film and molybdenum-containing thin film manufactured thereby

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE624959A (en) * 1961-11-20
GB1064290A (en) * 1963-01-14 1967-04-05 Motorola Inc Method of making semiconductor devices

Also Published As

Publication number Publication date
DE1614136B1 (en) 1971-08-12
SE325338B (en) 1970-06-29
GB1107620A (en) 1968-03-27
CH474854A (en) 1969-06-30
NL6704404A (en) 1967-10-02
FR1515732A (en) 1968-03-01
BE696171A (en) 1967-09-01

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