GB1107620A - Method of manufacturing semiconductor devices - Google Patents
Method of manufacturing semiconductor devicesInfo
- Publication number
- GB1107620A GB1107620A GB1169867A GB1169867A GB1107620A GB 1107620 A GB1107620 A GB 1107620A GB 1169867 A GB1169867 A GB 1169867A GB 1169867 A GB1169867 A GB 1169867A GB 1107620 A GB1107620 A GB 1107620A
- Authority
- GB
- United Kingdom
- Prior art keywords
- hydrogen
- semiconductor devices
- manufacturing semiconductor
- contact
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract 2
- 238000000151 deposition Methods 0.000 abstract 2
- 229910052739 hydrogen Inorganic materials 0.000 abstract 2
- 239000001257 hydrogen Substances 0.000 abstract 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 150000001728 carbonyl compounds Chemical class 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 229910052732 germanium Inorganic materials 0.000 abstract 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 abstract 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 239000011733 molybdenum Substances 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 238000005979 thermal decomposition reaction Methods 0.000 abstract 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/16—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal carbonyl compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
Abstract
A rectifying Schottky contact is formed on a body of silicon, germanium or gallium arsenide by heating the body to 250-500 DEG C. and depositing molybdenum or tungsten on it by the thermal decomposition or hydrogen reduction of a carbonyl compound thereof e.g. a hexacarbonyl compound or cyclopentadienyl derivative thereof. Typically the semi-conductor surface is etched in hydrogen chloride prior to the deposition which is effected in vacuum or under a small partial pressure of hydrogen. The contact may be plated with nickel and then reduced to the required area by photo-resist and etching steps.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020966 | 1966-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1107620A true GB1107620A (en) | 1968-03-27 |
Family
ID=12020759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1169867A Expired GB1107620A (en) | 1966-03-29 | 1967-03-13 | Method of manufacturing semiconductor devices |
Country Status (7)
| Country | Link |
|---|---|
| BE (1) | BE696171A (en) |
| CH (1) | CH474854A (en) |
| DE (1) | DE1614136B1 (en) |
| FR (1) | FR1515732A (en) |
| GB (1) | GB1107620A (en) |
| NL (1) | NL148360B (en) |
| SE (1) | SE325338B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112969814A (en) * | 2018-11-14 | 2021-06-15 | Dnf有限公司 | Method for producing molybdenum-containing thin film and molybdenum-containing thin film produced by the method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3562606A (en) * | 1969-08-13 | 1971-02-09 | Varian Associates | Subsurface gallium arsenide schottky-type diode and method of fabricating same |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE624959A (en) * | 1961-11-20 | |||
| GB1064290A (en) * | 1963-01-14 | 1967-04-05 | Motorola Inc | Method of making semiconductor devices |
-
1967
- 1967-03-13 GB GB1169867A patent/GB1107620A/en not_active Expired
- 1967-03-17 DE DE1967M0073229 patent/DE1614136B1/en not_active Withdrawn
- 1967-03-23 CH CH420567A patent/CH474854A/en not_active IP Right Cessation
- 1967-03-28 NL NL6704404A patent/NL148360B/en unknown
- 1967-03-28 BE BE696171D patent/BE696171A/xx unknown
- 1967-03-29 SE SE426867A patent/SE325338B/xx unknown
- 1967-03-29 FR FR100631A patent/FR1515732A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112969814A (en) * | 2018-11-14 | 2021-06-15 | Dnf有限公司 | Method for producing molybdenum-containing thin film and molybdenum-containing thin film produced by the method |
Also Published As
| Publication number | Publication date |
|---|---|
| NL6704404A (en) | 1967-10-02 |
| FR1515732A (en) | 1968-03-01 |
| DE1614136B1 (en) | 1971-08-12 |
| BE696171A (en) | 1967-09-01 |
| CH474854A (en) | 1969-06-30 |
| SE325338B (en) | 1970-06-29 |
| NL148360B (en) | 1976-01-15 |
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