NL1032007C2 - Stromingssensor van het thermische type. - Google Patents

Stromingssensor van het thermische type. Download PDF

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Publication number
NL1032007C2
NL1032007C2 NL1032007A NL1032007A NL1032007C2 NL 1032007 C2 NL1032007 C2 NL 1032007C2 NL 1032007 A NL1032007 A NL 1032007A NL 1032007 A NL1032007 A NL 1032007A NL 1032007 C2 NL1032007 C2 NL 1032007C2
Authority
NL
Netherlands
Prior art keywords
housing
tube
sensor
sensor tube
flow
Prior art date
Application number
NL1032007A
Other languages
English (en)
Dutch (nl)
Inventor
Johannes Henricus Besseling
Jeroen Wouter Bos
Ronald Wilhelmus Johan Hoitink
Joost Conrad Loetters
Original Assignee
Berkin Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berkin Bv filed Critical Berkin Bv
Priority to NL1032007A priority Critical patent/NL1032007C2/nl
Priority to DE602007005306T priority patent/DE602007005306D1/de
Priority to ES07075369T priority patent/ES2340724T3/es
Priority to EP07075369A priority patent/EP1867962B1/en
Priority to DK07075369.4T priority patent/DK1867962T3/da
Priority to AT07075369T priority patent/ATE461432T1/de
Priority to US11/798,983 priority patent/US7437928B2/en
Priority to JP2007145880A priority patent/JP2007333735A/ja
Application granted granted Critical
Publication of NL1032007C2 publication Critical patent/NL1032007C2/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/14—Casings, e.g. of special material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/18—Supports or connecting means for meters

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Control Of Combustion (AREA)
NL1032007A 2006-06-14 2006-06-14 Stromingssensor van het thermische type. NL1032007C2 (nl)

Priority Applications (8)

Application Number Priority Date Filing Date Title
NL1032007A NL1032007C2 (nl) 2006-06-14 2006-06-14 Stromingssensor van het thermische type.
DE602007005306T DE602007005306D1 (de) 2006-06-14 2007-05-15 Thermischer Durchflusssensor
ES07075369T ES2340724T3 (es) 2006-06-14 2007-05-15 Sensor de flujo del tipo termico.
EP07075369A EP1867962B1 (en) 2006-06-14 2007-05-15 Flow sensor of the thermal type
DK07075369.4T DK1867962T3 (da) 2006-06-14 2007-05-15 Flowsensor af den termiske type
AT07075369T ATE461432T1 (de) 2006-06-14 2007-05-15 Thermischer durchflusssensor
US11/798,983 US7437928B2 (en) 2006-06-14 2007-05-18 Flow sensor of the thermal type
JP2007145880A JP2007333735A (ja) 2006-06-14 2007-05-31 熱型流量センサ装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1032007A NL1032007C2 (nl) 2006-06-14 2006-06-14 Stromingssensor van het thermische type.
NL1032007 2006-06-14

Publications (1)

Publication Number Publication Date
NL1032007C2 true NL1032007C2 (nl) 2007-12-17

Family

ID=37685940

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1032007A NL1032007C2 (nl) 2006-06-14 2006-06-14 Stromingssensor van het thermische type.

Country Status (8)

Country Link
US (1) US7437928B2 (enExample)
EP (1) EP1867962B1 (enExample)
JP (1) JP2007333735A (enExample)
AT (1) ATE461432T1 (enExample)
DE (1) DE602007005306D1 (enExample)
DK (1) DK1867962T3 (enExample)
ES (1) ES2340724T3 (enExample)
NL (1) NL1032007C2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7971480B2 (en) * 2008-10-13 2011-07-05 Hitachi Metals, Ltd. Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements
NL2011975C2 (nl) * 2013-12-17 2015-06-18 Berkin Bv Stromingsmeetapparaat van het thermische type.
NL2012126C2 (en) 2014-01-23 2015-07-29 Berkin Bv Flow measurement system and method for determining at least one property of a medium.
US9791307B2 (en) * 2015-03-06 2017-10-17 Alicat Scientific, Inc. Systems and methods for detecting flow of a fluid
JP2017101955A (ja) * 2015-11-30 2017-06-08 アズビル株式会社 測定装置及び測定装置の製造方法
JP6769478B2 (ja) * 2016-03-11 2020-10-14 日立金属株式会社 熱式質量流量センサ、当該熱式質量流量センサの製造方法、及び当該熱式質量流量センサを用いる熱式質量流量計
CN106768113B (zh) * 2016-12-09 2019-10-25 北京七星华创流量计有限公司 一种流体输送测量装置
WO2018180387A1 (ja) * 2017-03-30 2018-10-04 株式会社フジキン 質量流量センサ、その質量流量センサを備えるマスフローメータ及びその質量流量センサを備えるマスフローコントローラ
NL2021082B1 (en) 2018-06-08 2019-12-11 Berkin Bv Pressure-insensitive thermal type flow meter
FR3096452B1 (fr) 2019-05-22 2022-02-11 Buerkert Werke Gmbh & Co Kg Ensemble de capteur de débit massique et procédé de fabrication d’un ensemble de capteur de débit massique
JP7467887B2 (ja) * 2019-11-01 2024-04-16 オムロン株式会社 植物生体センサ
NL2026167B1 (en) 2020-07-30 2022-04-08 Berkin Bv Thermal-type flow sensor with a thermally conductive frame element in the form of a printed circuit board (PCB)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4815280A (en) * 1986-05-27 1989-03-28 Stec Inc. Thermal flow meter
EP0809090A1 (en) * 1996-05-23 1997-11-26 Varian Associates, Inc. Fluid thermal mass flow sensor
WO2003058180A1 (en) * 2001-12-21 2003-07-17 Mks Instruments, Inc. Apparatus and method for thermal management of a mass flow controller

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5988622A (ja) * 1982-11-12 1984-05-22 Ohkura Electric Co Ltd 熱式質量流量計
US5191793A (en) 1984-03-12 1993-03-09 Tylan Corporation Fluid mass flow meter device with reduced attitude sensitivity
JP3047184B2 (ja) * 1989-11-27 2000-05-29 株式会社エステック 質量流量計
WO1991019959A1 (en) * 1990-06-14 1991-12-26 Unit Instruments, Inc. Thermal mass flow sensor
NL1023405C2 (nl) 2003-05-13 2004-11-18 Berkin Bv Massadebietmeter.

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4815280A (en) * 1986-05-27 1989-03-28 Stec Inc. Thermal flow meter
EP0809090A1 (en) * 1996-05-23 1997-11-26 Varian Associates, Inc. Fluid thermal mass flow sensor
WO2003058180A1 (en) * 2001-12-21 2003-07-17 Mks Instruments, Inc. Apparatus and method for thermal management of a mass flow controller

Also Published As

Publication number Publication date
DE602007005306D1 (de) 2010-04-29
US20070295079A1 (en) 2007-12-27
EP1867962B1 (en) 2010-03-17
DK1867962T3 (da) 2010-06-28
ES2340724T3 (es) 2010-06-08
EP1867962A1 (en) 2007-12-19
US7437928B2 (en) 2008-10-21
JP2007333735A (ja) 2007-12-27
ATE461432T1 (de) 2010-04-15

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Legal Events

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PD2B A search report has been drawn up
V1 Lapsed because of non-payment of the annual fee

Effective date: 20120101