DE602007005306D1 - Thermischer Durchflusssensor - Google Patents

Thermischer Durchflusssensor

Info

Publication number
DE602007005306D1
DE602007005306D1 DE602007005306T DE602007005306T DE602007005306D1 DE 602007005306 D1 DE602007005306 D1 DE 602007005306D1 DE 602007005306 T DE602007005306 T DE 602007005306T DE 602007005306 T DE602007005306 T DE 602007005306T DE 602007005306 D1 DE602007005306 D1 DE 602007005306D1
Authority
DE
Germany
Prior art keywords
sensor tube
housing
housing parts
legs
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007005306T
Other languages
English (en)
Inventor
Jeroen Wouter Bos
Ronald Wilhelmus Johannes Hoitink
Johannes Henricus Besseling
Joost Conrad Loetters
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Berkin BV
Original Assignee
Berkin BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berkin BV filed Critical Berkin BV
Publication of DE602007005306D1 publication Critical patent/DE602007005306D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/14—Casings, e.g. of special material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/18—Supports or connecting means for meters

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Control Of Combustion (AREA)
DE602007005306T 2006-06-14 2007-05-15 Thermischer Durchflusssensor Active DE602007005306D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL1032007A NL1032007C2 (nl) 2006-06-14 2006-06-14 Stromingssensor van het thermische type.

Publications (1)

Publication Number Publication Date
DE602007005306D1 true DE602007005306D1 (de) 2010-04-29

Family

ID=37685940

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007005306T Active DE602007005306D1 (de) 2006-06-14 2007-05-15 Thermischer Durchflusssensor

Country Status (8)

Country Link
US (1) US7437928B2 (de)
EP (1) EP1867962B1 (de)
JP (1) JP2007333735A (de)
AT (1) ATE461432T1 (de)
DE (1) DE602007005306D1 (de)
DK (1) DK1867962T3 (de)
ES (1) ES2340724T3 (de)
NL (1) NL1032007C2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7971480B2 (en) 2008-10-13 2011-07-05 Hitachi Metals, Ltd. Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements
NL2011975C2 (nl) * 2013-12-17 2015-06-18 Berkin Bv Stromingsmeetapparaat van het thermische type.
NL2012126C2 (en) 2014-01-23 2015-07-29 Berkin Bv Flow measurement system and method for determining at least one property of a medium.
WO2016144717A1 (en) * 2015-03-06 2016-09-15 Alicat Scientific, Inc. Systems and methods for detecting flow of a fluid
JP2017101955A (ja) * 2015-11-30 2017-06-08 アズビル株式会社 測定装置及び測定装置の製造方法
CN108779996B (zh) * 2016-03-11 2020-09-04 日立金属株式会社 热式质量流量传感器及其制造方法以及热式质量流量计
CN106768113B (zh) * 2016-12-09 2019-10-25 北京七星华创流量计有限公司 一种流体输送测量装置
WO2018180387A1 (ja) * 2017-03-30 2018-10-04 株式会社フジキン 質量流量センサ、その質量流量センサを備えるマスフローメータ及びその質量流量センサを備えるマスフローコントローラ
NL2021082B1 (en) 2018-06-08 2019-12-11 Berkin Bv Pressure-insensitive thermal type flow meter
FR3096452B1 (fr) 2019-05-22 2022-02-11 Buerkert Werke Gmbh & Co Kg Ensemble de capteur de débit massique et procédé de fabrication d’un ensemble de capteur de débit massique
NL2026167B1 (en) 2020-07-30 2022-04-08 Berkin Bv Thermal-type flow sensor with a thermally conductive frame element in the form of a printed circuit board (PCB)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5988622A (ja) * 1982-11-12 1984-05-22 Ohkura Electric Co Ltd 熱式質量流量計
US5191793A (en) 1984-03-12 1993-03-09 Tylan Corporation Fluid mass flow meter device with reduced attitude sensitivity
JPH0676897B2 (ja) * 1986-05-27 1994-09-28 株式会社エステツク 熱式流量計
JP3047184B2 (ja) * 1989-11-27 2000-05-29 株式会社エステック 質量流量計
WO1991019959A1 (en) * 1990-06-14 1991-12-26 Unit Instruments, Inc. Thermal mass flow sensor
US5792952A (en) * 1996-05-23 1998-08-11 Varian Associates, Inc. Fluid thermal mass flow sensor
US6779394B2 (en) * 2001-12-21 2004-08-24 Mks Instruments, Inc. Apparatus and method for thermal management of a mass flow controller
NL1023405C2 (nl) 2003-05-13 2004-11-18 Berkin Bv Massadebietmeter.

Also Published As

Publication number Publication date
US20070295079A1 (en) 2007-12-27
ATE461432T1 (de) 2010-04-15
NL1032007C2 (nl) 2007-12-17
DK1867962T3 (da) 2010-06-28
EP1867962A1 (de) 2007-12-19
JP2007333735A (ja) 2007-12-27
ES2340724T3 (es) 2010-06-08
EP1867962B1 (de) 2010-03-17
US7437928B2 (en) 2008-10-21

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Legal Events

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8364 No opposition during term of opposition