MY144163A - Polishing composition - Google Patents

Polishing composition

Info

Publication number
MY144163A
MY144163A MYPI20055484A MYPI20055484A MY144163A MY 144163 A MY144163 A MY 144163A MY PI20055484 A MYPI20055484 A MY PI20055484A MY PI20055484 A MYPI20055484 A MY PI20055484A MY 144163 A MY144163 A MY 144163A
Authority
MY
Malaysia
Prior art keywords
polishing composition
substrate
compound
hard disk
amino groups
Prior art date
Application number
MYPI20055484A
Inventor
Shigeo Fujii
Kenichi Suenaga
Original Assignee
Kao Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kao Corp filed Critical Kao Corp
Publication of MY144163A publication Critical patent/MY144163A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)

Abstract

25 ABSTP4CF POLISHING COMPOSITION THE PRESENT INVENTION PROVIDES A POLISHING COMPOSITION CONTAINING AN OIAANIC NITROCEN-COMAINING COMPOUND, AN ORGANIC POLYBASIC ACID, AN ABRASIVE. AND WATER. WHEREIN THE ORGANIC NIIIOGGEN-CONTAININO COMPOUND HAS IN THE 5 MOLECULE TWO OR MORE AMINO GROUPS, TWO OF MORE IMINO GROUPS, OR ONE OF MORE AMINO GROUPS AND ONE OR MORE IMINO GROUPS- A METHOD FOR MANUFACTURING A .TL 7 - SUBSTRATE WITH THE POLISHING COMPOSITION-, AND A METHOD FOR REDUCING SURFACE STAINS OF A SUBSTRATE WITH THE POLISHING COMPOSITION. THE POLISHING COMPOSITION CAN BE SUITABLY USED, FOR EXAMPLE, IN THE MANUFACTURING STEP FOR A SUBSTRATE FOR A 10 HARD DISK SUCH AS A MEMORV HARD DISK.
MYPI20055484A 2004-11-30 2005-11-24 Polishing composition MY144163A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004347212A JP4836441B2 (en) 2004-11-30 2004-11-30 Polishing liquid composition

Publications (1)

Publication Number Publication Date
MY144163A true MY144163A (en) 2011-08-15

Family

ID=35580228

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20055484A MY144163A (en) 2004-11-30 2005-11-24 Polishing composition

Country Status (6)

Country Link
US (2) US20060112647A1 (en)
JP (1) JP4836441B2 (en)
CN (1) CN1781971B (en)
GB (1) GB2421244B (en)
MY (1) MY144163A (en)
TW (1) TWI370844B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4577296B2 (en) * 2006-10-27 2010-11-10 富士電機デバイステクノロジー株式会社 Reproduction method of non-metallic substrate for magnetic recording medium
JP2009013046A (en) * 2007-06-05 2009-01-22 Asahi Glass Co Ltd Method of processing glass substrate
JP2008307676A (en) * 2007-06-18 2008-12-25 Kao Corp Polishing liquid composition for hard disk substrate
JP5063339B2 (en) * 2007-12-28 2012-10-31 花王株式会社 Polishing liquid composition for hard disk substrate, polishing method using the same, and manufacturing method of hard disk substrate
JP5576634B2 (en) * 2008-11-05 2014-08-20 山口精研工業株式会社 Abrasive composition and method for polishing magnetic disk substrate
JP5657247B2 (en) * 2009-12-25 2015-01-21 花王株式会社 Polishing liquid composition
JP5940278B2 (en) * 2010-10-27 2016-06-29 花王株式会社 Manufacturing method of glass hard disk substrate
JP5925454B2 (en) 2010-12-16 2016-05-25 花王株式会社 Polishing liquid composition for magnetic disk substrate
JP5979872B2 (en) * 2011-01-31 2016-08-31 花王株式会社 Manufacturing method of magnetic disk substrate
CN103403109B (en) * 2011-02-23 2015-12-23 大日精化工业株式会社 Water-based fluid composition, water-based coating fluid, functional coated film and matrix material
JP5933950B2 (en) * 2011-09-30 2016-06-15 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド Etching solution for copper or copper alloy
WO2014030208A1 (en) 2012-08-21 2014-02-27 大日精化工業株式会社 Aqueous liquid composition, aqueous coating liquid, funtional coating film and composite material
KR20150065757A (en) * 2012-10-03 2015-06-15 가부시키가이샤 후지미인코퍼레이티드 Polishing method and method for producing alloy material
JP6286566B2 (en) * 2014-09-17 2018-02-28 Hoya株式会社 Manufacturing method of magnetic disk substrate
JP6659449B2 (en) * 2016-05-09 2020-03-04 山口精研工業株式会社 Abrasive composition for electroless nickel-phosphorus plated aluminum magnetic disk substrate
JP6734146B2 (en) * 2016-08-23 2020-08-05 山口精研工業株式会社 Abrasive composition for magnetic disk substrate
CN108148507B (en) * 2017-12-18 2020-12-04 清华大学 Polishing composition for fused quartz

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US4639394A (en) * 1985-04-01 1987-01-27 Ppg Industries, Inc. Non-aqueous dispersions prepared with styrene polymer dispersion stabilizers
US5209816A (en) * 1992-06-04 1993-05-11 Micron Technology, Inc. Method of chemical mechanical polishing aluminum containing metal layers and slurry for chemical mechanical polishing
US5350788A (en) * 1993-03-11 1994-09-27 E. I. Du Pont De Nemours And Company Method for reducing odors in recycled plastics and compositions relating thereto
US5391258A (en) * 1993-05-26 1995-02-21 Rodel, Inc. Compositions and methods for polishing
US5362784A (en) * 1993-05-28 1994-11-08 E. I. Du Pont De Nemours And Company Aldehyde scavenging compositions and methods relating thereto
DE60034474T2 (en) * 1999-08-13 2008-01-10 Cabot Microelectronics Corp., Aurora POLISHING SYSTEM AND METHOD FOR ITS USE
US6855266B1 (en) * 1999-08-13 2005-02-15 Cabot Microelectronics Corporation Polishing system with stopping compound and method of its use
JP4264781B2 (en) * 1999-09-20 2009-05-20 株式会社フジミインコーポレーテッド Polishing composition and polishing method
JP3575750B2 (en) * 2000-05-12 2004-10-13 花王株式会社 Polishing liquid composition
JP3768401B2 (en) * 2000-11-24 2006-04-19 Ｎｅｃエレクトロニクス株式会社 Chemical mechanical polishing slurry
JP2002164307A (en) * 2000-11-24 2002-06-07 Fujimi Inc Composition for polishing, and polishing method using the composition
US7323416B2 (en) * 2001-03-14 2008-01-29 Applied Materials, Inc. Method and composition for polishing a substrate
US6776810B1 (en) * 2002-02-11 2004-08-17 Cabot Microelectronics Corporation Anionic abrasive particles treated with positively charged polyelectrolytes for CMP
US20030162398A1 (en) * 2002-02-11 2003-08-28 Small Robert J. Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same
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JP2003347247A (en) * 2002-05-28 2003-12-05 Hitachi Chem Co Ltd Cmp polishing agent for semiconductor insulating film and method of polishing substrate
JP3875155B2 (en) * 2002-07-31 2007-01-31 花王株式会社 Roll-off reducing agent
GB2393186B (en) * 2002-07-31 2006-02-22 Kao Corp Polishing composition
JP4446371B2 (en) * 2002-08-30 2010-04-07 花王株式会社 Polishing liquid composition
GB2393447B (en) * 2002-08-07 2006-04-19 Kao Corp Polishing composition
JP2004193495A (en) * 2002-12-13 2004-07-08 Toshiba Corp Cmp slurry, and method of producing semiconductor device using same
JP2004311484A (en) * 2003-04-02 2004-11-04 Sumitomo Bakelite Co Ltd Abrasive composition
TW200517478A (en) * 2003-05-09 2005-06-01 Sanyo Chemical Ind Ltd Polishing liquid for CMP process and polishing method
JP2004335978A (en) * 2003-05-12 2004-11-25 Jsr Corp Chemical mechanical polishing method
US7247566B2 (en) * 2003-10-23 2007-07-24 Dupont Air Products Nanomaterials Llc CMP method for copper, tungsten, titanium, polysilicon, and other substrates using organosulfonic acids as oxidizers

Also Published As

Publication number Publication date
JP2006150534A (en) 2006-06-15
JP4836441B2 (en) 2011-12-14
US20060112647A1 (en) 2006-06-01
GB2421244B (en) 2009-03-18
GB0523438D0 (en) 2005-12-28
TWI370844B (en) 2012-08-21
TW200621967A (en) 2006-07-01
US20080280538A1 (en) 2008-11-13
CN1781971A (en) 2006-06-07
CN1781971B (en) 2010-05-05
GB2421244A (en) 2006-06-21

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