MXPA05011197A - Herramienta y metodo para la deposicion quimica por vapor de una capa de dos fases en un cuerpo de sustrato. - Google Patents
Herramienta y metodo para la deposicion quimica por vapor de una capa de dos fases en un cuerpo de sustrato.Info
- Publication number
- MXPA05011197A MXPA05011197A MXPA05011197A MXPA05011197A MXPA05011197A MX PA05011197 A MXPA05011197 A MX PA05011197A MX PA05011197 A MXPA05011197 A MX PA05011197A MX PA05011197 A MXPA05011197 A MX PA05011197A MX PA05011197 A MXPA05011197 A MX PA05011197A
- Authority
- MX
- Mexico
- Prior art keywords
- phase
- tool
- layer
- vapor deposition
- chemical vapor
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
La invencion se relaciona con una herramienta, particularmente una herramienta de corte, comprendiendo un cuerpo de sustrato en que se ha depositado al menos una capa mediante CVD y un metodo para la deposicion quimica por vapor de una capa bifasica en un componente sinterizado. Segun la invencion, la unica capa depositada o al menos una de las capas estan provistas con una fase TiCN, una fase TiOCN, una fase TiOC o una fase TiC y una fase adicional consistiendo de ZrO2 y/o HfO2. CH3CN, C5H5N, o C6H6 se usan en la atmosfera gaseosa para producir semejantes capas en adicion a TiCl4, HfCl4 y/ ZrCl4 y CO2, siendo que el resto se compone de H2 y/o Ar.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2003120652 DE10320652A1 (de) | 2003-05-07 | 2003-05-07 | Werkzeug, insbesondere Schneidwerkzeug und Verfahren zur CVD-Abscheidung einer zweiphasigen Schicht auf einem Substratkörper |
| DE102004010594 | 2004-03-02 | ||
| PCT/DE2004/000845 WO2004099463A2 (de) | 2003-05-07 | 2004-04-23 | Werkzeug und verfahren zur cvd-abscheidung einer zweiphasigen schicht auf einem substratkörper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MXPA05011197A true MXPA05011197A (es) | 2005-12-14 |
Family
ID=33435964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MXPA05011197A MXPA05011197A (es) | 2003-05-07 | 2004-04-23 | Herramienta y metodo para la deposicion quimica por vapor de una capa de dos fases en un cuerpo de sustrato. |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP1620578B1 (es) |
| JP (1) | JP4440920B2 (es) |
| CA (1) | CA2524643C (es) |
| MX (1) | MXPA05011197A (es) |
| WO (1) | WO2004099463A2 (es) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE602004020526D1 (de) | 2004-12-30 | 2009-05-20 | Lg Electronics Inc | Verfahren zur herstellung eines ultrahydrophilen nanofilms auf basis von ti-o-c |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4714660A (en) * | 1985-12-23 | 1987-12-22 | Fansteel Inc. | Hard coatings with multiphase microstructures |
| DE59903347D1 (de) * | 1998-09-24 | 2002-12-12 | Widia Gmbh | Verbundwerkstoff-überzug und verfahren zu seiner herstellung |
| DE10017909B4 (de) * | 1999-04-13 | 2009-07-23 | Mitsubishi Materials Corp. | Beschichtetes Sinterkarbid-Schneidwerkzeugelement |
| JP2002224903A (ja) * | 2001-01-31 | 2002-08-13 | Hitachi Tool Engineering Ltd | 多層被覆工具 |
| JP3475941B2 (ja) * | 2001-06-20 | 2003-12-10 | 三菱マテリアル神戸ツールズ株式会社 | 切粉に対する表面潤滑性にすぐれた表面被覆超硬合金製切削工具 |
-
2004
- 2004-04-23 WO PCT/DE2004/000845 patent/WO2004099463A2/de active Application Filing
- 2004-04-23 MX MXPA05011197A patent/MXPA05011197A/es active IP Right Grant
- 2004-04-23 CA CA2524643A patent/CA2524643C/en not_active Expired - Fee Related
- 2004-04-23 EP EP04729035.8A patent/EP1620578B1/de not_active Expired - Lifetime
- 2004-04-23 JP JP2006504307A patent/JP4440920B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP4440920B2 (ja) | 2010-03-24 |
| WO2004099463A2 (de) | 2004-11-18 |
| EP1620578B1 (de) | 2014-05-21 |
| EP1620578A2 (de) | 2006-02-01 |
| CA2524643A1 (en) | 2004-11-18 |
| JP2006525125A (ja) | 2006-11-09 |
| CA2524643C (en) | 2010-11-02 |
| WO2004099463A3 (de) | 2005-01-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG | Grant or registration |