AU2003283428A1 - Method for chemical vapour deposition (cvd) of zrbless thansbgreater thanxless than/sbgreater thancless thansbgreater thanyless than/sbgreater thannless thansbgreater thanz less than/sbgreater than(or x+y+z=1) layers and a cutting tool coated with said layer - Google Patents
Method for chemical vapour deposition (cvd) of zrbless thansbgreater thanxless than/sbgreater thancless thansbgreater thanyless than/sbgreater thannless thansbgreater thanz less than/sbgreater than(or x+y+z=1) layers and a cutting tool coated with said layerInfo
- Publication number
- AU2003283428A1 AU2003283428A1 AU2003283428A AU2003283428A AU2003283428A1 AU 2003283428 A1 AU2003283428 A1 AU 2003283428A1 AU 2003283428 A AU2003283428 A AU 2003283428A AU 2003283428 A AU2003283428 A AU 2003283428A AU 2003283428 A1 AU2003283428 A1 AU 2003283428A1
- Authority
- AU
- Australia
- Prior art keywords
- thansbgreater
- sbgreater
- layers
- layer
- less
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/006—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterized by the colour of the layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Photoreceptors In Electrophotography (AREA)
- Physical Vapour Deposition (AREA)
Abstract
According to the invention, in order to form a ZRBXCYNZ (OR X+Y+Z=1) layer, wherein x+y+z=1 and x=0.001 to 0.05, y= 0 to 0.95 and z=0 to 0.95, by chemical vapour deposition a processing gas is used in which a Zr halide content is higher than 5 % volume and a boron halide content is less than 5 % volume. The thus produced layers can be used as anti-wearing protection and as decorative layers.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10258282A DE10258282A1 (en) | 2002-12-13 | 2002-12-13 | CVD coating process for ZrBx CyNz layers (x + y + z = 1) and coated cutting tool |
DE10258282.3 | 2002-12-13 | ||
PCT/EP2003/013289 WO2004055235A1 (en) | 2002-12-13 | 2003-11-26 | Method for chemical vapour deposition (cvd) of zrbxcynz (or x+y+z=1) layers and a cutting tool coated with said layer |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2003283428A1 true AU2003283428A1 (en) | 2004-07-09 |
Family
ID=32477611
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003283428A Abandoned AU2003283428A1 (en) | 2002-12-13 | 2003-11-26 | Method for chemical vapour deposition (cvd) of zrbless thansbgreater thanxless than/sbgreater thancless thansbgreater thanyless than/sbgreater thannless thansbgreater thanz less than/sbgreater than(or x+y+z=1) layers and a cutting tool coated with said layer |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1570105B1 (en) |
AT (1) | ATE331054T1 (en) |
AU (1) | AU2003283428A1 (en) |
DE (2) | DE10258282A1 (en) |
ES (1) | ES2268449T3 (en) |
WO (1) | WO2004055235A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005049393B4 (en) * | 2005-10-15 | 2019-08-08 | Kennametal Widia Produktions Gmbh & Co. Kg | Method for producing a coated substrate body, substrate body with a coating and use of the coated substrate body |
JP4753249B2 (en) * | 2006-01-13 | 2011-08-24 | 株式会社神戸製鋼所 | Mold for glass molding |
JP2008211079A (en) * | 2007-02-27 | 2008-09-11 | Ulvac Japan Ltd | Barrier film and forming method thereof, and multilayer interconnection structure and manufacturing method thereof |
WO2008105360A1 (en) | 2007-02-27 | 2008-09-04 | Ulvac, Inc. | Semiconductor device manufacturing method and semiconductor device manufacturing apparatus |
JP2008211090A (en) * | 2007-02-27 | 2008-09-11 | Ulvac Japan Ltd | Method and apparatus for manufacturing semiconductor device |
DE102007058564A1 (en) * | 2007-11-30 | 2009-06-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Smooth wear-protection coating for metal or ceramic components or tools, deposits layers of alternating structure to limit growth of defects and prevent unacceptable surface roughness |
CN116162917B (en) * | 2023-04-26 | 2023-07-14 | 赣州澳克泰工具技术有限公司 | Multilayer coating cutter and preparation method thereof |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4239536A (en) * | 1977-09-09 | 1980-12-16 | Sumitomo Electric Industries, Ltd. | Surface-coated sintered hard body |
JPS5948864B2 (en) * | 1978-07-05 | 1984-11-29 | 住友電気工業株式会社 | Manufacturing method for coated cemented carbide parts |
SE8205274L (en) * | 1982-09-15 | 1984-03-16 | Santrade Ltd | HAPPENS AND METHOD FOR MANUFACTURING THE SAME |
FR2612946B1 (en) * | 1987-03-27 | 1993-02-19 | Chimie Metal | PROCESS AND PLANT FOR CHEMICAL DEPOSITION OF MODERATE TEMPERATURE ULTRADOR COATINGS |
AT387988B (en) * | 1987-08-31 | 1989-04-10 | Plansee Tizit Gmbh | METHOD FOR PRODUCING MULTI-LAYER COATED HARD METAL PARTS |
JP3424263B2 (en) * | 1993-05-27 | 2003-07-07 | 住友電気工業株式会社 | Coated hard alloy members |
JPH10176289A (en) * | 1996-12-10 | 1998-06-30 | Balzers Ag | Coated hard alloy |
JP3231006B2 (en) * | 1997-08-28 | 2001-11-19 | 株式会社シマノ | Gear change control device for bicycle |
US6492011B1 (en) * | 1998-09-02 | 2002-12-10 | Unaxis Trading Ag | Wear-resistant workpiece and method for producing same |
DE29818029U1 (en) * | 1998-10-09 | 1999-03-25 | Balzers Prozess Systeme Vertri | Wear-resistant workpiece |
-
2002
- 2002-12-13 DE DE10258282A patent/DE10258282A1/en not_active Withdrawn
-
2003
- 2003-11-26 ES ES03775393T patent/ES2268449T3/en not_active Expired - Lifetime
- 2003-11-26 EP EP03775393A patent/EP1570105B1/en not_active Expired - Lifetime
- 2003-11-26 WO PCT/EP2003/013289 patent/WO2004055235A1/en not_active Application Discontinuation
- 2003-11-26 DE DE50303995T patent/DE50303995D1/en not_active Expired - Lifetime
- 2003-11-26 AU AU2003283428A patent/AU2003283428A1/en not_active Abandoned
- 2003-11-26 AT AT03775393T patent/ATE331054T1/en active
Also Published As
Publication number | Publication date |
---|---|
WO2004055235A1 (en) | 2004-07-01 |
DE50303995D1 (en) | 2006-08-03 |
ES2268449T3 (en) | 2007-03-16 |
EP1570105B1 (en) | 2006-06-21 |
EP1570105A1 (en) | 2005-09-07 |
ATE331054T1 (en) | 2006-07-15 |
DE10258282A1 (en) | 2004-07-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |