MX2009005488A - Procedimiento no electrolitico mejorado para la metalizacion de un substrato mediante la reduccion de sales metalicas y la proyeccion de aerosoles. - Google Patents
Procedimiento no electrolitico mejorado para la metalizacion de un substrato mediante la reduccion de sales metalicas y la proyeccion de aerosoles.Info
- Publication number
- MX2009005488A MX2009005488A MX2009005488A MX2009005488A MX2009005488A MX 2009005488 A MX2009005488 A MX 2009005488A MX 2009005488 A MX2009005488 A MX 2009005488A MX 2009005488 A MX2009005488 A MX 2009005488A MX 2009005488 A MX2009005488 A MX 2009005488A
- Authority
- MX
- Mexico
- Prior art keywords
- projection
- substrate
- metallisation
- phases
- aerosol
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1617—Purification and regeneration of coating baths
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1655—Process features
- C23C18/1658—Process features with two steps starting with metal deposition followed by addition of reducing agent
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1655—Process features
- C23C18/166—Process features with two steps starting with addition of reducing agent followed by metal deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/1683—Control of electrolyte composition, e.g. measurement, adjustment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T50/00—Aeronautics or air transport
- Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
Landscapes
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Chemically Coating (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Electrolytic Production Of Metals (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
- Electroplating Methods And Accessories (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Abstract
La invención se relaciona con la metalización no electrolítica de un substrato de cualquier naturaleza, por la proyección de un aerosol que contiene una solución de un catión metálico oxidante y un reductor, apta para transformar este catión en un metal; el objeto de la presente invención es un procedimiento y un dispositivo de metalización química industrial y automático, mejorados; este objeto se alcanza por el procedimiento de la invención, que aplica una etapa previa -ap- de remojo del substrato, por medio de un fluido de remojo; y más tardar 60 segundos después del fin del remojo, comenzar a efectuar la proyección de la metalización de acuerdo con una sucesión de fases de proyección, alternadas con las fase de relajación: (i) fijando la duración Dp de las fase de proyección y la duración Dr de las fases de relajación a partir de una constante k de metalización intrínseca para cada metal, (ii) y ajustando los caudales de proyección; se efectúa la proyección de la metalización de manera dinámica, desplazando los medios de proyección con respecto al substrato, para efectuar un barrido periódico; con Dp que corresponde a la duración durante la cual la unidad de superficie considerada es sometida a la proyección continua del aerosol y Dr es la duración durante la cual la pieza no se somete a la proyección; los medios de proyección se desplazan de acuerdo con una trayectoria TOA entre un punto de origen (O) y un punto de llegada (A) a una velocidad de desplazamiento en la proyección VOA, después vuelven al punto (O) a una velocidad VAO de desplazamiento sin proyección, de acuerdo con una trayectoria TAO; una unidad de cálculo y de mando UCC, a la cual están sometidos los medios de proyección y un sistema de desplazamiento de los medios de proyección, se utiliza para automatizar el procedimiento.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0610287A FR2909101B1 (fr) | 2006-11-24 | 2006-11-24 | Procede non electrolytique prefectionne de metallisation d'un substrat par voie de reduction de sel(s) metallique(s) et par projection d'aerosol(s) |
PCT/EP2007/062815 WO2008062070A1 (fr) | 2006-11-24 | 2007-11-26 | Procede non electrolytique perfectionne de metallisation d'un substrat par voie de reduction de sel(s) metallique(s) et par projection d'aerosol(s) |
Publications (1)
Publication Number | Publication Date |
---|---|
MX2009005488A true MX2009005488A (es) | 2009-08-07 |
Family
ID=38217232
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2009005488A MX2009005488A (es) | 2006-11-24 | 2007-11-26 | Procedimiento no electrolitico mejorado para la metalizacion de un substrato mediante la reduccion de sales metalicas y la proyeccion de aerosoles. |
Country Status (16)
Country | Link |
---|---|
US (1) | US8507043B2 (es) |
EP (1) | EP2087147B1 (es) |
JP (1) | JP5647789B2 (es) |
KR (1) | KR101509825B1 (es) |
CN (1) | CN101605924B (es) |
AT (1) | ATE503036T1 (es) |
BR (1) | BRPI0719012B1 (es) |
CA (1) | CA2670213C (es) |
DE (1) | DE602007013454D1 (es) |
DK (1) | DK2087147T3 (es) |
ES (1) | ES2366262T3 (es) |
FR (1) | FR2909101B1 (es) |
MX (1) | MX2009005488A (es) |
PL (1) | PL2087147T3 (es) |
PT (1) | PT2087147E (es) |
WO (1) | WO2008062070A1 (es) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2934609B1 (fr) * | 2008-07-30 | 2011-07-22 | Jet Metal Technologies | Procede non eletrolytique de metallisation en ligne de substrats par projection avec traitement de surface prealable et dispositif pour la mise en oeuvre du procede. |
FR2934964B1 (fr) * | 2008-08-12 | 2010-10-22 | Jet Metal Technologies | Procede de traitement optophysique de surface de substrats polymere et dispositif pour la mise en oeuvre du procede |
FR2943144B1 (fr) * | 2009-03-13 | 2012-12-14 | Jet Metal Technologies | Miroir anticorrosion, son procede de fabrication et ses applications dans la recuperation de l'energie solaire |
IT1401234B1 (it) * | 2010-07-14 | 2013-07-12 | Polymtec Engineering Ag Mauren Fl Succursale Di Lugano | Serbatoio per contenere carburante e relativo procedimento di realizzazione. |
FR2994197B1 (fr) * | 2012-08-06 | 2014-08-22 | Plastic Omnium Cie | Procede de metallisation d'une surface d'une piece pour vehicule automobile |
WO2014098774A1 (en) * | 2012-12-21 | 2014-06-26 | Agency For Science, Technology And Research | Porous metallic membrane |
FR3032724B1 (fr) * | 2015-02-12 | 2019-12-13 | Jet Metal Technologies | Procede et dispositif de realisation de motifs metalliques sur un substrat a des fins decoratives et/ou fonctionnelles fabrication d'objets integrant cette realisation et ensemble de consommables utilises |
US9433826B1 (en) * | 2015-03-27 | 2016-09-06 | Acushnet Company | Golf ball incorporating metallic film and method of making |
KR102233897B1 (ko) * | 2020-11-18 | 2021-03-31 | (주)엔젤엠엘 | 항균 손잡이의 제조 방법 및 이에 의해 제조된 항균 손잡이 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3783005A (en) * | 1972-02-04 | 1974-01-01 | Western Electric Co | Method of depositing a metal on a surface of a nonconductive substrate |
US4144361A (en) * | 1977-07-06 | 1979-03-13 | Nathan Feldstein | Methods for applying metallic silver coatings |
HU184308B (en) * | 1980-07-04 | 1984-08-28 | Bacsmegyei Allami Epitoeipari | Process for coating glas threads with metal-glas |
CN87100440B (zh) * | 1987-01-27 | 1988-05-11 | 中国人民解放军装甲兵工程学院 | 在不导电材料上刷镀铜的方法 |
US5976383A (en) * | 1991-04-08 | 1999-11-02 | Romar Technologies, Inc. | Recycle process for removing dissolved heavy metals from water with aluminum particles |
US6268016B1 (en) * | 1996-06-28 | 2001-07-31 | International Business Machines Corporation | Manufacturing computer systems with fine line circuitized substrates |
FR2763962B1 (fr) * | 1997-05-29 | 1999-10-15 | Guy Stremsdoerfer | Procede non electrolytique de metallisation d'un substrat par voie de reduction de sel(s) metallique(s) et par projection d'aerosol(s) |
JPH11335858A (ja) * | 1998-05-27 | 1999-12-07 | Yuji Shikamata | 銀鏡面の形成方法及びその溶液 |
JP3352422B2 (ja) * | 1999-02-10 | 2002-12-03 | セントラル硝子株式会社 | 銀被膜形成用薬液および銀被膜形成方法 |
FR2796962B1 (fr) | 1999-07-30 | 2003-11-21 | Bio Merieux | Procede de culture in vitro de virus des familles togaviridae et flaviviridae, lignee cellulaire et utilisations |
JP3866012B2 (ja) * | 2000-06-02 | 2007-01-10 | 株式会社荏原製作所 | 無電解めっき方法及び装置 |
US6843852B2 (en) * | 2002-01-16 | 2005-01-18 | Intel Corporation | Apparatus and method for electroless spray deposition |
US6800569B2 (en) * | 2002-01-30 | 2004-10-05 | Kabushiki Kaisha Toshiba | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus |
GB0301933D0 (en) * | 2003-01-28 | 2003-02-26 | Conductive Inkjet Tech Ltd | Method of forming a conductive metal region on a substrate |
JP2006111938A (ja) * | 2004-10-15 | 2006-04-27 | Tokyo Electron Ltd | 無電解めっき装置 |
-
2006
- 2006-11-24 FR FR0610287A patent/FR2909101B1/fr active Active
-
2007
- 2007-11-26 ES ES07847348T patent/ES2366262T3/es active Active
- 2007-11-26 MX MX2009005488A patent/MX2009005488A/es active IP Right Grant
- 2007-11-26 JP JP2009537655A patent/JP5647789B2/ja active Active
- 2007-11-26 AT AT07847348T patent/ATE503036T1/de not_active IP Right Cessation
- 2007-11-26 BR BRPI0719012A patent/BRPI0719012B1/pt active IP Right Grant
- 2007-11-26 EP EP07847348A patent/EP2087147B1/fr active Active
- 2007-11-26 US US12/515,461 patent/US8507043B2/en active Active
- 2007-11-26 CN CN2007800497991A patent/CN101605924B/zh active Active
- 2007-11-26 WO PCT/EP2007/062815 patent/WO2008062070A1/fr active Application Filing
- 2007-11-26 PT PT07847348T patent/PT2087147E/pt unknown
- 2007-11-26 CA CA2670213A patent/CA2670213C/fr active Active
- 2007-11-26 PL PL07847348T patent/PL2087147T3/pl unknown
- 2007-11-26 KR KR1020097013085A patent/KR101509825B1/ko active IP Right Grant
- 2007-11-26 DK DK07847348.5T patent/DK2087147T3/da active
- 2007-11-26 DE DE602007013454T patent/DE602007013454D1/de active Active
Also Published As
Publication number | Publication date |
---|---|
PT2087147E (pt) | 2011-07-04 |
ATE503036T1 (de) | 2011-04-15 |
CN101605924B (zh) | 2013-05-29 |
CA2670213A1 (fr) | 2008-05-29 |
WO2008062070A1 (fr) | 2008-05-29 |
CA2670213C (fr) | 2014-10-14 |
BRPI0719012A2 (pt) | 2014-01-14 |
PL2087147T3 (pl) | 2011-11-30 |
FR2909101A1 (fr) | 2008-05-30 |
JP2010510389A (ja) | 2010-04-02 |
FR2909101B1 (fr) | 2009-02-27 |
CN101605924A (zh) | 2009-12-16 |
ES2366262T3 (es) | 2011-10-18 |
US8507043B2 (en) | 2013-08-13 |
JP5647789B2 (ja) | 2015-01-07 |
US20100075053A1 (en) | 2010-03-25 |
DE602007013454D1 (de) | 2011-05-05 |
EP2087147A1 (fr) | 2009-08-12 |
EP2087147B1 (fr) | 2011-03-23 |
DK2087147T3 (da) | 2011-07-18 |
BRPI0719012B1 (pt) | 2018-10-16 |
KR101509825B1 (ko) | 2015-04-06 |
KR20090097892A (ko) | 2009-09-16 |
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