MX2007003584A - Control de comportamiento electromecanico de estruturas dentro de un dispositivo de sistemas microelectromecanicos. - Google Patents
Control de comportamiento electromecanico de estruturas dentro de un dispositivo de sistemas microelectromecanicos.Info
- Publication number
- MX2007003584A MX2007003584A MX2007003584A MX2007003584A MX2007003584A MX 2007003584 A MX2007003584 A MX 2007003584A MX 2007003584 A MX2007003584 A MX 2007003584A MX 2007003584 A MX2007003584 A MX 2007003584A MX 2007003584 A MX2007003584 A MX 2007003584A
- Authority
- MX
- Mexico
- Prior art keywords
- structures
- microelectromechanical systems
- systems device
- characteristic
- controlling electromechanical
- Prior art date
Links
Landscapes
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US61346604P | 2004-09-27 | 2004-09-27 | |
US11/090,911 US7781850B2 (en) | 2002-09-20 | 2005-03-25 | Controlling electromechanical behavior of structures within a microelectromechanical systems device |
PCT/US2005/030902 WO2006036435A1 (en) | 2004-09-27 | 2005-08-30 | Controlling electromechanical behavior of structures within a microelectromechanical systems device |
Publications (1)
Publication Number | Publication Date |
---|---|
MX2007003584A true MX2007003584A (es) | 2007-05-23 |
Family
ID=38744850
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2007003584A MX2007003584A (es) | 2004-09-27 | 2005-08-30 | Control de comportamiento electromecanico de estruturas dentro de un dispositivo de sistemas microelectromecanicos. |
Country Status (6)
Country | Link |
---|---|
CN (1) | CN101027594A (zh) |
BR (1) | BRPI0516020A (zh) |
IL (1) | IL181616A0 (zh) |
MX (1) | MX2007003584A (zh) |
RU (1) | RU2381532C2 (zh) |
SG (1) | SG155948A1 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5856760B2 (ja) * | 2011-06-03 | 2016-02-10 | ピクストロニクス,インコーポレイテッド | 表示装置及び表示装置の製造方法 |
JP5727303B2 (ja) * | 2011-06-03 | 2015-06-03 | ピクストロニクス,インコーポレイテッド | 表示装置 |
-
2005
- 2005-08-30 RU RU2007115882/28A patent/RU2381532C2/ru not_active IP Right Cessation
- 2005-08-30 MX MX2007003584A patent/MX2007003584A/es not_active Application Discontinuation
- 2005-08-30 BR BRPI0516020-0A patent/BRPI0516020A/pt not_active IP Right Cessation
- 2005-08-30 CN CN 200580032155 patent/CN101027594A/zh active Pending
- 2005-08-30 SG SG200906278-7A patent/SG155948A1/en unknown
-
2007
- 2007-02-27 IL IL181616A patent/IL181616A0/en unknown
Also Published As
Publication number | Publication date |
---|---|
IL181616A0 (en) | 2007-07-04 |
CN101027594A (zh) | 2007-08-29 |
BRPI0516020A (pt) | 2008-08-19 |
RU2381532C2 (ru) | 2010-02-10 |
SG155948A1 (en) | 2009-10-29 |
RU2007115882A (ru) | 2008-11-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW200626486A (en) | Controlling electromechanical behavior of structures within a microelectromechanical systems device | |
MXPA05003078A (es) | Control de comportamiento electromecanico de estructuras dentro de un aparato de sistemas microelectromecanicos. | |
WO2004087561A3 (en) | Novel sacrificial layers for use in fabrications of microelectromechanical devices | |
WO2004041918A3 (en) | Microstructures and methods of fabrication thereof | |
WO2007067488A3 (en) | Method and system for double-sided patterning of substrates | |
EP1652219A4 (en) | ANKER FOR MICROELECTROMECHANICAL SYSTEMS WITH AN SOI SUBSTRATE AND METHOD OF MANUFACTURING THEREOF | |
TW200717027A (en) | Support structure for MEMS device and methods therefor | |
WO2004097518A3 (en) | A method of forming stepped structures employing imprint lithography | |
WO2007075445A3 (en) | Systems, methods and devices for actuating a moveable miniature platform | |
TW200715358A (en) | MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same | |
WO2006050171A3 (en) | Electro-active intraocular lenses | |
WO2008044617A3 (en) | Method of manufacturing liquid crystal display device | |
WO2006094241A3 (en) | Thin-film device comprising an oxide semiconductor and method of selective annealing a blanket coated oxide semiconductor layer | |
WO2007145790A3 (en) | An integrated circuit device having barrier and method of fabricating the same | |
WO2007149475A3 (en) | Method for packaging an optical mems device | |
WO2005025840A3 (en) | Methods for the manufacture of porous prosthesis | |
DE60226389D1 (de) | Piezoelektrisches Dünnfilmbauelement, dessen Herstellungsverfahren sowie Aktuator mit diesem | |
WO2008039372A3 (en) | Assembling and applying nano-electro-mechanical systems | |
WO2008036066A3 (en) | Protective composite structures and methods of making protective composite structures | |
WO2008068735A3 (en) | A gimbaled scanning micro-mirror actuation scheme and architecture | |
WO2005078817A3 (en) | Manufacture of flat panel light emitting devices | |
WO2008156294A3 (en) | Semiconductor light emitting device and method of fabricating the same | |
WO2008085495A3 (en) | Micromirror manufacturing method | |
HK1056040A1 (en) | Thin film piezoelectric element and its manufacturing method, and actuator unit using same | |
WO2005046206A3 (en) | Electromechanical micromirror devices and methods of manufacturing the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GB | Transfer or rights |
Owner name: QUALCOMM MEMS TECHNOLOGIES, INC. |
|
FA | Abandonment or withdrawal |