SG155948A1 - Controlling electromechanical behavior of structures within a microelectromechanical systems device - Google Patents

Controlling electromechanical behavior of structures within a microelectromechanical systems device

Info

Publication number
SG155948A1
SG155948A1 SG200906278-7A SG2009062787A SG155948A1 SG 155948 A1 SG155948 A1 SG 155948A1 SG 2009062787 A SG2009062787 A SG 2009062787A SG 155948 A1 SG155948 A1 SG 155948A1
Authority
SG
Singapore
Prior art keywords
microelectromechanical systems
systems device
structures
characteristic
response
Prior art date
Application number
SG200906278-7A
Inventor
Mark W Miles
John Batey
Clarence Chui
Manish Kothari
Ming-Hau Tung
Original Assignee
Idc Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/090,911 external-priority patent/US7781850B2/en
Application filed by Idc Llc filed Critical Idc Llc
Publication of SG155948A1 publication Critical patent/SG155948A1/en

Links

Landscapes

  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

Controlling Electromechanical Behaviour Of Structures Within A Microelectromechanical Systems Device In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the microelectromechanical systems device. Figure 10H
SG200906278-7A 2004-09-27 2005-08-30 Controlling electromechanical behavior of structures within a microelectromechanical systems device SG155948A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61346604P 2004-09-27 2004-09-27
US11/090,911 US7781850B2 (en) 2002-09-20 2005-03-25 Controlling electromechanical behavior of structures within a microelectromechanical systems device

Publications (1)

Publication Number Publication Date
SG155948A1 true SG155948A1 (en) 2009-10-29

Family

ID=38744850

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200906278-7A SG155948A1 (en) 2004-09-27 2005-08-30 Controlling electromechanical behavior of structures within a microelectromechanical systems device

Country Status (6)

Country Link
CN (1) CN101027594A (en)
BR (1) BRPI0516020A (en)
IL (1) IL181616A0 (en)
MX (1) MX2007003584A (en)
RU (1) RU2381532C2 (en)
SG (1) SG155948A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5727303B2 (en) * 2011-06-03 2015-06-03 ピクストロニクス，インコーポレイテッド Display device
JP5856760B2 (en) * 2011-06-03 2016-02-10 ピクストロニクス，インコーポレイテッド Display device and manufacturing method of display device

Also Published As

Publication number Publication date
BRPI0516020A (en) 2008-08-19
RU2381532C2 (en) 2010-02-10
CN101027594A (en) 2007-08-29
IL181616A0 (en) 2007-07-04
MX2007003584A (en) 2007-05-23
RU2007115882A (en) 2008-11-10

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