MD4010G2 - Procedeu de obţinere a peliculelor subţiri de semiconductoare oxidice de In2O3 - Google Patents
Procedeu de obţinere a peliculelor subţiri de semiconductoare oxidice de In2O3 Download PDFInfo
- Publication number
- MD4010G2 MD4010G2 MDA20070334A MD20070334A MD4010G2 MD 4010 G2 MD4010 G2 MD 4010G2 MD A20070334 A MDA20070334 A MD A20070334A MD 20070334 A MD20070334 A MD 20070334A MD 4010 G2 MD4010 G2 MD 4010G2
- Authority
- MD
- Moldova
- Prior art keywords
- in2o3
- oxide semiconductors
- thin films
- films
- obtaining thin
- Prior art date
Links
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000010409 thin film Substances 0.000 title abstract 2
- 239000010408 film Substances 0.000 abstract 2
- PSCMQHVBLHHWTO-UHFFFAOYSA-K indium(iii) chloride Chemical compound Cl[In](Cl)Cl PSCMQHVBLHHWTO-UHFFFAOYSA-K 0.000 abstract 2
- 238000000137 annealing Methods 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 230000007935 neutral effect Effects 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 abstract 1
- 238000005118 spray pyrolysis Methods 0.000 abstract 1
Landscapes
- Formation Of Insulating Films (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
Invenţia se referă la un procedeu de obţinere a peliculelor subţiri de semiconductoare oxidice, în particular de In2O3.Procedeul include depunerea peliculelor prin piroliză spray la temperatura de 450…550°C din soluţii apoase de InCl3 cu concentraţia sării de metal din soluţie ce depăşeşte 0,2M cu recoacerea ulterioară în atmosferă neutră sau cu conţinut de oxigen la o temperatură nu mai mică de 1000°C.Rezultatul invenţiei constă în obţinerea peliculelor cu textură înaltă în direcţia (100) cu grosimea de 200…3000 nm cu dimensiuni mari ale suprafeţei cristalografice plate a cristalitelor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20070334A MD4010G2 (ro) | 2007-12-12 | 2007-12-12 | Procedeu de obţinere a peliculelor subţiri de semiconductoare oxidice de In2O3 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20070334A MD4010G2 (ro) | 2007-12-12 | 2007-12-12 | Procedeu de obţinere a peliculelor subţiri de semiconductoare oxidice de In2O3 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| MD20070334A MD20070334A (ro) | 2009-09-30 |
| MD4010F2 MD4010F2 (ro) | 2010-01-29 |
| MD4010G2 true MD4010G2 (ro) | 2010-08-31 |
Family
ID=43568782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MDA20070334A MD4010G2 (ro) | 2007-12-12 | 2007-12-12 | Procedeu de obţinere a peliculelor subţiri de semiconductoare oxidice de In2O3 |
Country Status (1)
| Country | Link |
|---|---|
| MD (1) | MD4010G2 (ro) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MD20080058A (ro) * | 2008-02-25 | 2009-08-31 | Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы | Dispozitiv de obţinere a peliculelor supraconductoare |
| MD175Z (ro) * | 2008-02-25 | 2010-10-31 | Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы | Dispozitiv de obţinere a peliculelor supraconductoare |
| MD193Z (ro) * | 2009-06-04 | 2010-11-30 | Институт Прикладной Физики Академии Наук Молдовы | Procedeu de obţinere a peliculei polisulfidice |
| MD353Z (ro) * | 2010-02-24 | 2011-10-31 | Институт Электронной Инженерии И Промышленных Технологий | Ventil supraconductor de spin |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04260695A (ja) * | 1990-09-28 | 1992-09-16 | Commiss Energ Atom | 酸化物型結晶薄膜及びその製造方法 |
| JPH05148091A (ja) * | 1991-12-03 | 1993-06-15 | Nittetsu Mining Co Ltd | ルチル単結晶の処理方法 |
| RU2051207C1 (ru) * | 1992-02-27 | 1995-12-27 | Санкт-Петербургский государственный университет | Способ получения слоев гидроксидов металлов |
-
2007
- 2007-12-12 MD MDA20070334A patent/MD4010G2/ro not_active IP Right Cessation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04260695A (ja) * | 1990-09-28 | 1992-09-16 | Commiss Energ Atom | 酸化物型結晶薄膜及びその製造方法 |
| JPH05148091A (ja) * | 1991-12-03 | 1993-06-15 | Nittetsu Mining Co Ltd | ルチル単結晶の処理方法 |
| RU2051207C1 (ru) * | 1992-02-27 | 1995-12-27 | Санкт-Петербургский государственный университет | Способ получения слоев гидроксидов металлов |
Non-Patent Citations (6)
| Title |
|---|
| Besenbacher F., Lægsgaard E., Stensgaard I. Fast-scanning STM studies. Materials Today 8(5), 2005, p. 26-30 * |
| Masayuki Kamei, Hiromi Enomoto, Itaru Yasui. Origin of the crystalline orientation dependence of the electrical properties in tin-doped indium oxide films. * |
| Masayuki Kamei, Hiromi Enomoto, Itaru Yasui. Origin of the crystalline orientation dependence of the electrical properties in tin-doped indium oxide films. Thin Solid Films, 392, 2001, p. 265-268 * |
| Ratcheva T.M., Nanova M.D., Vassilev L.V., Mikhailov M.G. Properties of In2O3:Te films prepared by the spraying method. Thin Solid Films, 139, 1986, p. * |
| Ratcheva T.M., Nanova M.D., Vassilev L.V., Mikhailov M.G. Properties of In2O3:Te films prepared by the spraying method. Thin Solid Films, 139, 1986, p. 189-199 * |
| Zheng Wei Pan, Zu Rong Dai, Zhong Lin Wang. Nanobelts of Semiconducting Oxides. Science, vol. 291, 9 march, 2001, p. 19471949 * |
Also Published As
| Publication number | Publication date |
|---|---|
| MD20070334A (ro) | 2009-09-30 |
| MD4010F2 (ro) | 2010-01-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG4A | Patent for invention issued | ||
| KA4A | Patent for invention lapsed due to non-payment of fees (with right of restoration) | ||
| MM4A | Patent for invention definitely lapsed due to non-payment of fees |