MD1829Y - Processes for obtaining ceramic targets and thin conductive layers of Fe2O3:(ZnO)k alloys at low temperatures - Google Patents
Processes for obtaining ceramic targets and thin conductive layers of Fe2O3:(ZnO)k alloys at low temperatures Download PDFInfo
- Publication number
- MD1829Y MD1829Y MDS20240072A MDS20240072A MD1829Y MD 1829 Y MD1829 Y MD 1829Y MD S20240072 A MDS20240072 A MD S20240072A MD S20240072 A MDS20240072 A MD S20240072A MD 1829 Y MD1829 Y MD 1829Y
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- MD
- Moldova
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- fe2o3
- zno
- substrates
- conductive layers
- kceramic
- Prior art date
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- Physical Vapour Deposition (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
The invention relates to semiconductor material production processes and can be used in semiconductor technology.The process for producing Fe2O3:(ZnO)kceramic targets at low temperatures consists in sintering Fe2O3and kZnO powders in a closed volume at a temperature of 800…1200°C, sintering is carried out by a chemical transport reaction, using HCl as a transport agent, with an initial pressure of 0.01…10 atm and H2with an initial pressure of ≤10 atm, and producing Fe2O3:(ZnO)kceramic targets, with the admixture of Cl having a concentration of 1·1018…1·1020cm-3.The process for producing thin conductive layers of Fe2O3:(ZnO)kalloys at low temperatures consists in loading a Fe2O3:(ZnO)kceramic target produced by the described above process and substrates for thin layers into a magnetron; evacuating the magnetron chamber to a pressure of (1…5)·10-8atm; heating the substrates to a deposition temperature of 200…500°C; pumping Ar gas under a pressure of (1…10)·10-8atm; magnetron sputtering at a deposition temperature of 200…500°C of the Fe2O3:(ZnO)kceramic target onto the substrates; cooling the substrates with the produced Fe2O3:(ZnO)kthin conductive layers to room temperature at a rate of ≤200°C/hour; extracting from the magnetron the substrates with the produced Fe2O3:(ZnO)kthin conductive layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDS20240072A MD1829Z (en) | 2024-07-31 | 2024-07-31 | Processes for producing Fe2O3:(ZnO)k ceramic targets and thin conductive layers at low temperatures |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDS20240072A MD1829Z (en) | 2024-07-31 | 2024-07-31 | Processes for producing Fe2O3:(ZnO)k ceramic targets and thin conductive layers at low temperatures |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| MD1829Y true MD1829Y (en) | 2025-03-31 |
| MD1829Z MD1829Z (en) | 2025-10-31 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MDS20240072A MD1829Z (en) | 2024-07-31 | 2024-07-31 | Processes for producing Fe2O3:(ZnO)k ceramic targets and thin conductive layers at low temperatures |
Country Status (1)
| Country | Link |
|---|---|
| MD (1) | MD1829Z (en) |
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2024
- 2024-07-31 MD MDS20240072A patent/MD1829Z/en active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| MD1829Z (en) | 2025-10-31 |
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