LU73127A1 - - Google Patents

Info

Publication number
LU73127A1
LU73127A1 LU73127A LU73127A LU73127A1 LU 73127 A1 LU73127 A1 LU 73127A1 LU 73127 A LU73127 A LU 73127A LU 73127 A LU73127 A LU 73127A LU 73127 A1 LU73127 A1 LU 73127A1
Authority
LU
Luxembourg
Application number
LU73127A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of LU73127A1 publication Critical patent/LU73127A1/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
LU73127A 1974-07-31 1975-07-31 LU73127A1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18020974A DD113247A1 (enrdf_load_stackoverflow) 1974-07-31 1974-07-31

Publications (1)

Publication Number Publication Date
LU73127A1 true LU73127A1 (enrdf_load_stackoverflow) 1976-04-13

Family

ID=5496751

Family Applications (1)

Application Number Title Priority Date Filing Date
LU73127A LU73127A1 (enrdf_load_stackoverflow) 1974-07-31 1975-07-31

Country Status (7)

Country Link
JP (1) JPS5825739B2 (enrdf_load_stackoverflow)
BE (1) BE831989A (enrdf_load_stackoverflow)
DD (1) DD113247A1 (enrdf_load_stackoverflow)
DE (1) DE2527269A1 (enrdf_load_stackoverflow)
IT (1) IT1036929B (enrdf_load_stackoverflow)
LU (1) LU73127A1 (enrdf_load_stackoverflow)
SU (1) SU652237A1 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4444538C2 (de) * 1994-12-14 2001-02-01 Ardenne Anlagentech Gmbh Einrichtung zur langzeitstabilen Verdampfung von Elementen und Verbindungen für die reaktive Abscheidung auf bewegten Substraten, vorzugsweise breiten Bändern
DE102021103354A1 (de) 2021-02-12 2022-08-18 VON ARDENNE Asset GmbH & Co. KG Verfahren, Steuervorrichtung und Speichermedium

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1308291A (en) * 1968-12-02 1973-02-21 Parsons & Co Sir Howard G Evaporation sources for depositing thin films
JPS5315837B2 (enrdf_load_stackoverflow) * 1974-04-16 1978-05-27

Also Published As

Publication number Publication date
SU652237A1 (ru) 1979-03-15
IT1036929B (it) 1979-10-30
DE2527269A1 (de) 1976-02-12
JPS5825739B2 (ja) 1983-05-30
JPS5149183A (ja) 1976-04-28
BE831989A (fr) 1975-11-17
DD113247A1 (enrdf_load_stackoverflow) 1975-05-20

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